CH569275A5CH507173ACH507173ACH569275A5CH 569275 A5CH569275 A5CH 569275A5CH 507173 ACH507173 ACH 507173ACH 507173 ACH507173 ACH 507173ACH 569275 A5CH569275 A5CH 569275A5
Authority
CH
Switzerland
Application number
CH507173A
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips NvfiledCriticalPhilips Nv
Publication of CH569275A5publicationCriticalpatent/CH569275A5/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/22—Optical, image processing or photographic arrangements associated with the tube
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/295—Electron or ion diffraction tubes
H01J37/2955—Electron or ion diffraction tubes using scanning ray
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)