DE2315130A1 - Elektronenoptische vorrichtung zur aufzeichnung ausgewaehlter beugungsmuster - Google Patents
Elektronenoptische vorrichtung zur aufzeichnung ausgewaehlter beugungsmusterInfo
- Publication number
- DE2315130A1 DE2315130A1 DE19732315130 DE2315130A DE2315130A1 DE 2315130 A1 DE2315130 A1 DE 2315130A1 DE 19732315130 DE19732315130 DE 19732315130 DE 2315130 A DE2315130 A DE 2315130A DE 2315130 A1 DE2315130 A1 DE 2315130A1
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- television
- detector
- specimen
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 33
- 238000002360 preparation method Methods 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000003086 colorant Substances 0.000 claims description 2
- 230000036962 time dependent Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 10
- 230000004075 alteration Effects 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004532 chromating Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000001493 electron microscopy Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
- H01J37/2955—Electron or ion diffraction tubes using scanning ray
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7204859A NL7204859A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-04-12 | 1972-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2315130A1 true DE2315130A1 (de) | 1973-10-18 |
Family
ID=19815829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732315130 Pending DE2315130A1 (de) | 1972-04-12 | 1973-03-27 | Elektronenoptische vorrichtung zur aufzeichnung ausgewaehlter beugungsmuster |
Country Status (8)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0013738A1 (en) * | 1979-01-18 | 1980-08-06 | International Business Machines Corporation | Method and apparatus for producing a high brightness electron beam |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3636506A1 (de) * | 1986-10-27 | 1988-04-28 | Atomika Tech Physik Gmbh | Spiralabtastverfahren |
| JPH0233843A (ja) * | 1988-07-25 | 1990-02-05 | Hitachi Ltd | 走査電子顕微鏡 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1248201A (en) * | 1967-07-03 | 1971-09-29 | Nat Res Dev | Electron microscopes |
| GB1284061A (en) * | 1970-01-21 | 1972-08-02 | Cambridge Scientific Instr Ltd | Electron beam apparatus |
-
1972
- 1972-04-12 NL NL7204859A patent/NL7204859A/xx unknown
-
1973
- 1973-03-27 DE DE19732315130 patent/DE2315130A1/de active Pending
- 1973-04-09 GB GB1691873A patent/GB1424224A/en not_active Expired
- 1973-04-09 SE SE7304969A patent/SE386770B/xx unknown
- 1973-04-09 CA CA168,263A patent/CA984524A/en not_active Expired
- 1973-04-09 CH CH507173A patent/CH569275A5/xx not_active IP Right Cessation
- 1973-04-09 IT IT4930373A patent/IT983000B/it active
- 1973-04-11 FR FR7313064A patent/FR2179978B1/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0013738A1 (en) * | 1979-01-18 | 1980-08-06 | International Business Machines Corporation | Method and apparatus for producing a high brightness electron beam |
Also Published As
| Publication number | Publication date |
|---|---|
| CH569275A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-11-14 |
| NL7204859A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-10-16 |
| FR2179978B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-02-10 |
| IT983000B (it) | 1974-10-21 |
| FR2179978A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-11-23 |
| CA984524A (en) | 1976-02-24 |
| SE386770B (sv) | 1976-08-16 |
| GB1424224A (en) | 1976-02-11 |
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