CH487505A - Verfahren zum Aufbereiten von Halbleiterkristallen für einen Diffusionsprozess - Google Patents
Verfahren zum Aufbereiten von Halbleiterkristallen für einen DiffusionsprozessInfo
- Publication number
- CH487505A CH487505A CH179367A CH179367A CH487505A CH 487505 A CH487505 A CH 487505A CH 179367 A CH179367 A CH 179367A CH 179367 A CH179367 A CH 179367A CH 487505 A CH487505 A CH 487505A
- Authority
- CH
- Switzerland
- Prior art keywords
- semiconductor crystals
- preparing semiconductor
- diffusion
- diffusion process
- preparing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/02—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/017—Clean surfaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/06—Gettering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/906—Cleaning of wafer as interim step
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/974—Substrate surface preparation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
- Y10T428/2991—Coated
- Y10T428/2993—Silicic or refractory material containing [e.g., tungsten oxide, glass, cement, etc.]
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0102364 | 1966-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH487505A true CH487505A (de) | 1970-03-15 |
Family
ID=7524385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH179367A CH487505A (de) | 1966-03-04 | 1967-02-07 | Verfahren zum Aufbereiten von Halbleiterkristallen für einen Diffusionsprozess |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3480474A (de) |
| BE (1) | BE694813A (de) |
| CH (1) | CH487505A (de) |
| DE (1) | DE1544281C3 (de) |
| GB (1) | GB1165585A (de) |
| NL (1) | NL6701905A (de) |
| SE (1) | SE304750B (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4859280A (en) * | 1986-12-01 | 1989-08-22 | Harris Corporation | Method of etching silicon by enhancing silicon etching capability of alkali hydroxide through the addition of positive valence impurity ions |
| US4843037A (en) * | 1987-08-21 | 1989-06-27 | Bell Communications Research, Inc. | Passivation of indium gallium arsenide surfaces |
| EP0308814B1 (de) * | 1987-09-21 | 1993-01-27 | National Semiconductor Corporation | Veränderung der grenzschichtfelder zwischen Isolatoren und Halbleitern |
| US4789596A (en) * | 1987-11-27 | 1988-12-06 | Ethyl Corporation | Dopant coated bead-like silicon particles |
| JP3534213B2 (ja) * | 1995-09-30 | 2004-06-07 | コマツ電子金属株式会社 | 半導体ウェハの製造方法 |
| KR100709205B1 (ko) * | 2001-04-02 | 2007-04-18 | 삼성에스디아이 주식회사 | 리튬 이차 전지용 양극 활물질 조성물 |
| EP3229262B1 (de) | 2016-04-05 | 2018-08-15 | Siltronic AG | Verfahren zur dampfphasenätzung einer halbleiterscheibe zur spurenmetallanalyse |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL192840A (de) * | 1954-12-01 | |||
| NL132314C (de) * | 1960-07-06 |
-
1966
- 1966-03-04 DE DE1544281A patent/DE1544281C3/de not_active Expired
-
1967
- 1967-02-07 CH CH179367A patent/CH487505A/de not_active IP Right Cessation
- 1967-02-08 NL NL6701905A patent/NL6701905A/xx unknown
- 1967-02-28 SE SE2731/67A patent/SE304750B/xx unknown
- 1967-02-28 BE BE694813D patent/BE694813A/xx unknown
- 1967-03-02 US US619917A patent/US3480474A/en not_active Expired - Lifetime
- 1967-03-03 GB GB00293/67A patent/GB1165585A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SE304750B (de) | 1968-10-07 |
| DE1544281B2 (de) | 1974-08-01 |
| NL6701905A (de) | 1967-09-05 |
| DE1544281A1 (de) | 1971-01-21 |
| BE694813A (de) | 1967-08-28 |
| US3480474A (en) | 1969-11-25 |
| DE1544281C3 (de) | 1975-04-03 |
| GB1165585A (en) | 1969-10-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |