AT259016B - Verfahren zum Herstellen von Halbleiteranordnungen - Google Patents
Verfahren zum Herstellen von HalbleiteranordnungenInfo
- Publication number
- AT259016B AT259016B AT23566A AT23566A AT259016B AT 259016 B AT259016 B AT 259016B AT 23566 A AT23566 A AT 23566A AT 23566 A AT23566 A AT 23566A AT 259016 B AT259016 B AT 259016B
- Authority
- AT
- Austria
- Prior art keywords
- semiconductor devices
- manufacturing semiconductor
- manufacturing
- devices
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/02—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/974—Substrate surface preparation
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0094987 | 1965-01-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
AT259016B true AT259016B (de) | 1967-12-27 |
Family
ID=7519067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT23566A AT259016B (de) | 1965-01-13 | 1966-01-11 | Verfahren zum Herstellen von Halbleiteranordnungen |
Country Status (8)
Country | Link |
---|---|
US (1) | US3498853A (de) |
AT (1) | AT259016B (de) |
CH (1) | CH482299A (de) |
DE (1) | DE1544257A1 (de) |
FR (1) | FR1463489A (de) |
GB (1) | GB1115101A (de) |
NL (1) | NL6516911A (de) |
SE (1) | SE334421B (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1764004A1 (de) * | 1968-03-20 | 1971-04-08 | Siemens Ag | Verfahren zum Herstellen eines Hochfrequenztransistors aus Silicium |
DE2408829C2 (de) * | 1974-02-23 | 1984-03-22 | Ibm Deutschland Gmbh, 7000 Stuttgart | Bor-Ionenquell-Material und Verfahren zu seiner Herstellung |
CN104557532B (zh) * | 2015-01-13 | 2017-03-01 | 西安力邦制药有限公司 | 二联苯衍生物及其应用 |
CN114823977B (zh) * | 2022-04-25 | 2024-02-23 | 中国科学技术大学 | 氧化镓光电探测器的制备方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2930722A (en) * | 1959-02-03 | 1960-03-29 | Bell Telephone Labor Inc | Method of treating silicon |
US3147152A (en) * | 1960-01-28 | 1964-09-01 | Western Electric Co | Diffusion control in semiconductive bodies |
NL260906A (de) * | 1960-02-12 | |||
US3168422A (en) * | 1960-05-09 | 1965-02-02 | Merck & Co Inc | Process of flushing unwanted residue from a vapor deposition system in which silicon is being deposited |
US3210225A (en) * | 1961-08-18 | 1965-10-05 | Texas Instruments Inc | Method of making transistor |
GB1052379A (de) * | 1963-03-28 | 1900-01-01 | ||
US3258359A (en) * | 1963-04-08 | 1966-06-28 | Siliconix Inc | Semiconductor etch and oxidation process |
US3255056A (en) * | 1963-05-20 | 1966-06-07 | Rca Corp | Method of forming semiconductor junction |
-
1965
- 1965-01-13 DE DE19651544257 patent/DE1544257A1/de active Pending
- 1965-12-24 NL NL6516911A patent/NL6516911A/xx unknown
-
1966
- 1966-01-07 US US519237A patent/US3498853A/en not_active Expired - Lifetime
- 1966-01-11 CH CH35166A patent/CH482299A/de not_active IP Right Cessation
- 1966-01-11 SE SE00335/66A patent/SE334421B/xx unknown
- 1966-01-11 AT AT23566A patent/AT259016B/de active
- 1966-01-12 GB GB1401/66A patent/GB1115101A/en not_active Expired
- 1966-01-12 FR FR45633A patent/FR1463489A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL6516911A (de) | 1966-07-14 |
DE1544257A1 (de) | 1970-03-26 |
FR1463489A (fr) | 1966-12-23 |
GB1115101A (en) | 1968-05-29 |
US3498853A (en) | 1970-03-03 |
SE334421B (de) | 1971-04-26 |
CH482299A (de) | 1969-11-30 |
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