CA984524A - Electron-optical device for the recording of selected diffraction patterns - Google Patents

Electron-optical device for the recording of selected diffraction patterns

Info

Publication number
CA984524A
CA984524A CA168,263A CA168263A CA984524A CA 984524 A CA984524 A CA 984524A CA 168263 A CA168263 A CA 168263A CA 984524 A CA984524 A CA 984524A
Authority
CA
Canada
Prior art keywords
electron
recording
optical device
diffraction patterns
selected diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA168,263A
Other languages
English (en)
Other versions
CA168263S (en
Inventor
Karel J. Van Oostrum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA984524A publication Critical patent/CA984524A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA168,263A 1972-04-12 1973-04-09 Electron-optical device for the recording of selected diffraction patterns Expired CA984524A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7204859A NL7204859A (da) 1972-04-12 1972-04-12

Publications (1)

Publication Number Publication Date
CA984524A true CA984524A (en) 1976-02-24

Family

ID=19815829

Family Applications (1)

Application Number Title Priority Date Filing Date
CA168,263A Expired CA984524A (en) 1972-04-12 1973-04-09 Electron-optical device for the recording of selected diffraction patterns

Country Status (8)

Country Link
CA (1) CA984524A (da)
CH (1) CH569275A5 (da)
DE (1) DE2315130A1 (da)
FR (1) FR2179978B1 (da)
GB (1) GB1424224A (da)
IT (1) IT983000B (da)
NL (1) NL7204859A (da)
SE (1) SE386770B (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
DE3636506A1 (de) * 1986-10-27 1988-04-28 Atomika Tech Physik Gmbh Spiralabtastverfahren
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
GB1284061A (en) * 1970-01-21 1972-08-02 Cambridge Scientific Instr Ltd Electron beam apparatus

Also Published As

Publication number Publication date
DE2315130A1 (de) 1973-10-18
IT983000B (it) 1974-10-21
NL7204859A (da) 1973-10-16
GB1424224A (en) 1976-02-11
SE386770B (sv) 1976-08-16
FR2179978A1 (da) 1973-11-23
FR2179978B1 (da) 1978-02-10
CH569275A5 (da) 1975-11-14

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