FR2179978A1 - - Google Patents

Info

Publication number
FR2179978A1
FR2179978A1 FR7313064A FR7313064A FR2179978A1 FR 2179978 A1 FR2179978 A1 FR 2179978A1 FR 7313064 A FR7313064 A FR 7313064A FR 7313064 A FR7313064 A FR 7313064A FR 2179978 A1 FR2179978 A1 FR 2179978A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7313064A
Other languages
French (fr)
Other versions
FR2179978B1 (da
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2179978A1 publication Critical patent/FR2179978A1/fr
Application granted granted Critical
Publication of FR2179978B1 publication Critical patent/FR2179978B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7313064A 1972-04-12 1973-04-11 Expired FR2179978B1 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7204859A NL7204859A (da) 1972-04-12 1972-04-12

Publications (2)

Publication Number Publication Date
FR2179978A1 true FR2179978A1 (da) 1973-11-23
FR2179978B1 FR2179978B1 (da) 1978-02-10

Family

ID=19815829

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7313064A Expired FR2179978B1 (da) 1972-04-12 1973-04-11

Country Status (8)

Country Link
CA (1) CA984524A (da)
CH (1) CH569275A5 (da)
DE (1) DE2315130A1 (da)
FR (1) FR2179978B1 (da)
GB (1) GB1424224A (da)
IT (1) IT983000B (da)
NL (1) NL7204859A (da)
SE (1) SE386770B (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
DE3636506A1 (de) * 1986-10-27 1988-04-28 Atomika Tech Physik Gmbh Spiralabtastverfahren
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
FR2075739A5 (da) * 1970-01-21 1971-10-08 Cambridge Scient

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
FR2075739A5 (da) * 1970-01-21 1971-10-08 Cambridge Scient

Non-Patent Citations (9)

* Cited by examiner, † Cited by third party
Title
ARTICLE DE D.C. JOY ET AL. 'SIMULTANEOUS DISPLAY OF MICROGRAPH AND SELECTED-AREA CHANNELING *
DE F. FUJIMOTO ET AL.'DIFFRACTION PATTERNS OBTAINED BY SCANNING ELECTRON MICROSCOPE' *
'DIRECT IMAGE ANALYSIS IN THE ELECTROM MICROSCOPE') *
JOURNAL OF PHYSICS E SERIES2, VOULUME 2, NO 1, JANVIER 1969, PAGES 45-47 ARTICLE DE A STRANG *
'JOURNAL OF PHYSICS E : SCIENTIFIC INSTRUMENTS', VOLUME 4, NO 11, NOVEMBRE 1971, PAGES 837-842, *
PATTERN USING THE SCANNING ELECTROM MICROSCOPE' *
REVUE DT 'ZEITSCHRIFT FUR NATURFORSCHUNG', VOLUME 27A, NO 3, MARS 1972, PAGES 441-444C, ARTICLE *
REVUE GB *
REVUE GB 'JOURNAL OF SCIENTIFIC INSTRMENTS' *

Also Published As

Publication number Publication date
FR2179978B1 (da) 1978-02-10
SE386770B (sv) 1976-08-16
IT983000B (it) 1974-10-21
GB1424224A (en) 1976-02-11
DE2315130A1 (de) 1973-10-18
CA984524A (en) 1976-02-24
NL7204859A (da) 1973-10-16
CH569275A5 (da) 1975-11-14

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Legal Events

Date Code Title Description
ST Notification of lapse