CA2558483C - Wafer-level opto-electronic testing apparatus and method - Google Patents

Wafer-level opto-electronic testing apparatus and method Download PDF

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Publication number
CA2558483C
CA2558483C CA2558483A CA2558483A CA2558483C CA 2558483 C CA2558483 C CA 2558483C CA 2558483 A CA2558483 A CA 2558483A CA 2558483 A CA2558483 A CA 2558483A CA 2558483 C CA2558483 C CA 2558483C
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Prior art keywords
optical
wafer
opto
electronic
fiber
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CA2558483A
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English (en)
French (fr)
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CA2558483A1 (en
Inventor
Prakash Gothoskar
Margaret Ghiron
Robert Keith Montgomery
Vipulkumar Patel
Kalpendu Shastri
Soham Pathak
David Piede
Katherine A. Yanushefski
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Cisco Technology Inc
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Cisco Technology Inc
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Publication of CA2558483A1 publication Critical patent/CA2558483A1/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Optical Integrated Circuits (AREA)
CA2558483A 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method Active CA2558483C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US55131604P 2004-03-08 2004-03-08
US60/551,316 2004-03-08
PCT/US2005/007473 WO2005086786A2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
US11/075,430 US7109739B2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
US11/075,430 2005-03-08

Publications (2)

Publication Number Publication Date
CA2558483A1 CA2558483A1 (en) 2005-09-22
CA2558483C true CA2558483C (en) 2015-01-06

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Family Applications (1)

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CA2558483A Active CA2558483C (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method

Country Status (5)

Country Link
US (1) US7109739B2 (enExample)
JP (1) JP4847440B2 (enExample)
KR (1) KR101141014B1 (enExample)
CA (1) CA2558483C (enExample)
WO (1) WO2005086786A2 (enExample)

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Also Published As

Publication number Publication date
US7109739B2 (en) 2006-09-19
US20050194990A1 (en) 2005-09-08
WO2005086786A2 (en) 2005-09-22
JP2007528129A (ja) 2007-10-04
KR20060130679A (ko) 2006-12-19
WO2005086786A3 (en) 2006-06-22
KR101141014B1 (ko) 2012-05-02
CA2558483A1 (en) 2005-09-22
JP4847440B2 (ja) 2011-12-28

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