CA2457869A1 - Very narrow band, two chamber, high rep rate gas discharge laser system - Google Patents

Very narrow band, two chamber, high rep rate gas discharge laser system Download PDF

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Publication number
CA2457869A1
CA2457869A1 CA002457869A CA2457869A CA2457869A1 CA 2457869 A1 CA2457869 A1 CA 2457869A1 CA 002457869 A CA002457869 A CA 002457869A CA 2457869 A CA2457869 A CA 2457869A CA 2457869 A1 CA2457869 A1 CA 2457869A1
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CA
Canada
Prior art keywords
laser
pulse
discharge
gas
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002457869A
Other languages
English (en)
French (fr)
Inventor
Richard L. Sandstrom
William N. Partlo
David W. Myers
Richard C. Ujazdowski
Stuart L. Anderson
Plash P. Das
Alexander I. Ershov
Eckehard D. Onkels
Jeffrey Oicles
Daniel J. W. Brown
William G. Hulburd
Herve A. Besaucele
Scott T. Smith
Richard M. Ness
David S. Knowles
Igor V. Fomenkov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/943,343 external-priority patent/US6567450B2/en
Priority claimed from US10/006,913 external-priority patent/US6535531B1/en
Application filed by Individual filed Critical Individual
Publication of CA2457869A1 publication Critical patent/CA2457869A1/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
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    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
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    • H01S3/2258—F2, i.e. molecular fluoride is comprised for lasing around 157 nm

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CA002457869A 2001-08-29 2002-08-28 Very narrow band, two chamber, high rep rate gas discharge laser system Abandoned CA2457869A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US09/943,343 2001-08-29
US09/943,343 US6567450B2 (en) 1999-12-10 2001-08-29 Very narrow band, two chamber, high rep rate gas discharge laser system
US10/006,913 2001-11-29
US10/006,913 US6535531B1 (en) 2001-11-29 2001-11-29 Gas discharge laser with pulse multiplier
US10/012,002 US6625191B2 (en) 1999-12-10 2001-11-30 Very narrow band, two chamber, high rep rate gas discharge laser system
US10/012,002 2001-11-30
PCT/US2002/027925 WO2003021728A2 (en) 2001-08-29 2002-08-28 Very narrow band, two chamber, high rep rate gas discharge laser system

Publications (1)

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CA2457869A1 true CA2457869A1 (en) 2003-03-13

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US (4) US6625191B2 (enExample)
EP (1) EP1438774B1 (enExample)
JP (2) JP2005502209A (enExample)
KR (2) KR100907299B1 (enExample)
AU (1) AU2002332801A1 (enExample)
CA (1) CA2457869A1 (enExample)
IL (1) IL160586A0 (enExample)
MY (1) MY153277A (enExample)
RU (1) RU2306649C2 (enExample)
TW (1) TW569508B (enExample)
WO (1) WO2003021728A2 (enExample)

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