CA2370813C - Laser calibration apparatus and method - Google Patents
Laser calibration apparatus and method Download PDFInfo
- Publication number
- CA2370813C CA2370813C CA002370813A CA2370813A CA2370813C CA 2370813 C CA2370813 C CA 2370813C CA 002370813 A CA002370813 A CA 002370813A CA 2370813 A CA2370813 A CA 2370813A CA 2370813 C CA2370813 C CA 2370813C
- Authority
- CA
- Canada
- Prior art keywords
- laser beam
- scanner
- focused laser
- position coordinates
- aperture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 59
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000005065 mining Methods 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 230000002238 attenuated effect Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000005553 drilling Methods 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 238000013213 extrapolation Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000010845 search algorithm Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
- B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13113899P | 1999-04-27 | 1999-04-27 | |
| US60/131,138 | 1999-04-27 | ||
| PCT/CA2000/000472 WO2000064622A1 (en) | 1999-04-27 | 2000-04-26 | Laser calibration apparatus and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2370813A1 CA2370813A1 (en) | 2000-11-02 |
| CA2370813C true CA2370813C (en) | 2008-06-17 |
Family
ID=22448055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002370813A Expired - Fee Related CA2370813C (en) | 1999-04-27 | 2000-04-26 | Laser calibration apparatus and method |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6501061B1 (enExample) |
| EP (1) | EP1173302B1 (enExample) |
| JP (1) | JP2002542042A (enExample) |
| KR (1) | KR100600921B1 (enExample) |
| AU (1) | AU4280700A (enExample) |
| CA (1) | CA2370813C (enExample) |
| DE (1) | DE60019573T2 (enExample) |
| WO (1) | WO2000064622A1 (enExample) |
Families Citing this family (67)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7268774B2 (en) * | 1998-08-18 | 2007-09-11 | Candledragon, Inc. | Tracking motion of a writing instrument |
| US7838794B2 (en) | 1999-12-28 | 2010-11-23 | Gsi Group Corporation | Laser-based method and system for removing one or more target link structures |
| US7723642B2 (en) | 1999-12-28 | 2010-05-25 | Gsi Group Corporation | Laser-based system for memory link processing with picosecond lasers |
| US7671295B2 (en) | 2000-01-10 | 2010-03-02 | Electro Scientific Industries, Inc. | Processing a memory link with a set of at least two laser pulses |
| US20030024913A1 (en) * | 2002-04-15 | 2003-02-06 | Downes Joseph P. | Laser scanning method and system for marking articles such as printed circuit boards, integrated circuits and the like |
| US6972268B2 (en) * | 2001-03-29 | 2005-12-06 | Gsi Lumonics Corporation | Methods and systems for processing a device, methods and systems for modeling same and the device |
| US7230964B2 (en) * | 2001-04-09 | 2007-06-12 | Cymer, Inc. | Lithography laser with beam delivery and beam pointing control |
| US20050259709A1 (en) | 2002-05-07 | 2005-11-24 | Cymer, Inc. | Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate |
| US20050100072A1 (en) * | 2001-11-14 | 2005-05-12 | Rao Rajasekhar M. | High power laser output beam energy density reduction |
| US7257255B2 (en) | 2001-11-21 | 2007-08-14 | Candledragon, Inc. | Capturing hand motion |
| KR100445974B1 (ko) * | 2001-12-01 | 2004-08-25 | 주식회사 이오테크닉스 | 칩 스케일 마커의 마킹 위치 보정 방법 및 그 장치 |
| DE10206183A1 (de) * | 2002-02-14 | 2003-08-28 | Siemens Ag | Verfahren zur Bestimmung der Genauigkeit von Bearbeitungsmaschine |
| US7006237B2 (en) * | 2002-03-26 | 2006-02-28 | Mitsubishi Denki Kabushiki Kaisha | Laser beam positioning device for laser processing equipment |
| US7563695B2 (en) * | 2002-03-27 | 2009-07-21 | Gsi Group Corporation | Method and system for high-speed precise laser trimming and scan lens for use therein |
| US6951995B2 (en) * | 2002-03-27 | 2005-10-04 | Gsi Lumonics Corp. | Method and system for high-speed, precise micromachining an array of devices |
| US7015418B2 (en) | 2002-05-17 | 2006-03-21 | Gsi Group Corporation | Method and system for calibrating a laser processing system and laser marking system utilizing same |
| JP4531323B2 (ja) * | 2002-09-13 | 2010-08-25 | 株式会社半導体エネルギー研究所 | レーザ装置、レーザ照射方法、および半導体装置の作製方法 |
| US6814454B2 (en) * | 2002-10-25 | 2004-11-09 | Molecular Devices Corporation | Achromatic beam switch |
| US7277188B2 (en) | 2003-04-29 | 2007-10-02 | Cymer, Inc. | Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate |
| WO2005037478A2 (en) * | 2003-10-17 | 2005-04-28 | Gsi Lumonics Corporation | Flexible scan field |
| US20050205778A1 (en) * | 2003-10-17 | 2005-09-22 | Gsi Lumonics Corporation | Laser trim motion, calibration, imaging, and fixturing techniques |
| JP2005275135A (ja) * | 2004-03-25 | 2005-10-06 | Toshiba Corp | 液晶ディスプレイの欠陥画素修正方法および修正装置 |
| GB2428399B (en) * | 2004-06-07 | 2010-05-05 | Electro Scient Ind Inc | AOM modulation techniques for improving laser system performance |
| KR100584838B1 (ko) * | 2004-10-13 | 2006-05-30 | 주식회사 이오테크닉스 | 레이저 드릴링 시스템의 보정방법 |
| CN101208171B (zh) * | 2005-06-23 | 2011-01-12 | 通快机床两合公司 | 确定激光束的焦点位置的方法 |
| CN101611324B (zh) * | 2005-10-18 | 2012-11-21 | Gsi集团公司 | 利用光学基准的方法和器件 |
| US7317179B2 (en) | 2005-10-28 | 2008-01-08 | Cymer, Inc. | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate |
| US7679029B2 (en) | 2005-10-28 | 2010-03-16 | Cymer, Inc. | Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations |
| TWI504963B (zh) * | 2006-01-30 | 2015-10-21 | Electro Scient Ind Inc | 消色差掃描透鏡 |
| US20070215575A1 (en) * | 2006-03-15 | 2007-09-20 | Bo Gu | Method and system for high-speed, precise, laser-based modification of one or more electrical elements |
| US7755026B2 (en) * | 2006-05-04 | 2010-07-13 | CandleDragon Inc. | Generating signals representative of sensed light that is associated with writing being done by a user |
| KR100890259B1 (ko) | 2007-07-25 | 2009-03-24 | (주)와이티에스 | 레이저 마킹 시스템의 주행축 틀어짐에 따른 마킹패턴오프셋 자동 보정 방법 |
| CN101821081B (zh) * | 2007-08-23 | 2014-06-25 | 3D系统公司 | 利用激光扫描反射计的自动几何校准 |
| SG152090A1 (en) * | 2007-10-23 | 2009-05-29 | Hypertronics Pte Ltd | Scan head calibration system and method |
| TWI335252B (en) * | 2007-11-30 | 2011-01-01 | Ind Tech Res Inst | Calibration strip and the laser calibration system using thereof |
| US20090321397A1 (en) * | 2008-04-10 | 2009-12-31 | Applied Materials, Inc. | Laser-scribing platform |
| ES2379106B1 (es) * | 2009-07-31 | 2013-02-22 | Grupo Antolín-Ingeniería, S.A. | Instalación de grabado de motivos decorativos y/o indicativos sobre piezas de vehículos mediante la proyección de un haz de luz láser y proceso para uso en la instalación. |
| KR20120113245A (ko) * | 2009-12-30 | 2012-10-12 | 지에스아이 그룹 코포레이션 | 고속 빔 편향을 이용한 링크 처리 |
| DE102010008296A1 (de) * | 2010-02-17 | 2011-08-18 | Carl Zeiss NTS GmbH, 73447 | Laserbearbeitungssystem, Objekthalter und Laserbearbeitungsverfahren |
| TWI417969B (zh) * | 2010-07-21 | 2013-12-01 | Lextar Electronics Corp | 晶片轉移方法及晶片轉移設備 |
| CN102547048B (zh) * | 2010-10-22 | 2015-03-25 | 财团法人工业技术研究院 | 激光扫描装置 |
| US20120097833A1 (en) * | 2010-10-22 | 2012-04-26 | Industrial Technology Research Institute | Laser scanning device |
| US8669507B2 (en) * | 2010-10-22 | 2014-03-11 | Industrial Technology Research Institute | Laser scanning device |
| DE102011109449B9 (de) | 2011-08-04 | 2013-04-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum kalibrieren eines laserscanners, verwendung des verfahrens und bearbeitungssystem mit laserscanner |
| JP5385356B2 (ja) * | 2011-10-21 | 2014-01-08 | 株式会社片岡製作所 | レーザ加工機 |
| JP5715113B2 (ja) * | 2012-12-14 | 2015-05-07 | 株式会社片岡製作所 | レーザ加工機 |
| US9304090B2 (en) | 2013-03-11 | 2016-04-05 | Electro Scientific Industries, Inc. | Systems and methods for providing polarization compensated multi-spectral laser repair of liquid crystal display panels |
| TWI543830B (zh) | 2013-05-10 | 2016-08-01 | 財團法人工業技術研究院 | 視覺誤差校正方法 |
| CA3171484A1 (en) | 2014-12-05 | 2016-06-09 | Convergent Dental, Inc. | Systems and methods for alignment of a laser beam |
| DE102015001421B4 (de) | 2015-02-06 | 2016-09-15 | Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung | Vorrichtung und Verfahren zur Strahldiagnose an Laserbearbeitungs-Optiken (PRl-2015-001) |
| DE102015004163B4 (de) | 2015-04-01 | 2017-03-23 | Primes Gmbh | Vorrichtung und Verfahren zur Bestimmung von Eigenschaften eines Laserstrahls |
| KR20170017019A (ko) * | 2015-07-09 | 2017-02-15 | 주식회사 이오테크닉스 | 집광점 검출장치 |
| DE102015226722A1 (de) * | 2015-12-23 | 2017-06-29 | Eos Gmbh Electro Optical Systems | Vorrichtung und Verfahren zum Kalibrieren einer Vorrichtung zum generativen Herstellen eines dreidimensionalen Objekts |
| US11642725B2 (en) | 2016-01-19 | 2023-05-09 | General Electric Company | Method for calibrating laser additive manufacturing process |
| DE102016001355B4 (de) | 2016-02-08 | 2022-03-24 | Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung | Verfahren und Vorrichtung zur Analyse von Laserstrahlen in Anlagen für generative Fertigung |
| US20180311762A1 (en) * | 2017-04-26 | 2018-11-01 | Asm Technology Singapore Pte Ltd | Substrate cutting control and inspection |
| US10596802B2 (en) | 2017-05-30 | 2020-03-24 | General Electric Company | Calibration systems for calibrating build platforms of additive manufacturing systems and related program products |
| DE102018105364B4 (de) * | 2018-03-08 | 2020-06-25 | Precitec Gmbh & Co. Kg | Vorrichtung zur Bestimmung einer Fokuslage eines Laserstrahls in einem Laserbearbeitungssystem, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung einer Fokuslage eines Laserstrahls in einem Laserbearbeitungssystem |
| JP6592547B2 (ja) * | 2018-03-12 | 2019-10-16 | 株式会社アマダホールディングス | レーザ光の芯出し方法及びレーザ加工装置 |
| JP7305271B2 (ja) * | 2019-08-08 | 2023-07-10 | 株式会社ディスコ | レーザー加工装置の加工性能の確認方法 |
| EP4025426A4 (en) * | 2019-09-04 | 2024-01-03 | Vulcanforms Inc. | LASER ARRAY POSITION DETECTION |
| US11964430B2 (en) | 2020-09-17 | 2024-04-23 | Concept Laser Gmbh | Controlling irradiation parameters of an additive manufacturing machine |
| DE102022104530A1 (de) | 2022-02-25 | 2023-08-31 | Trumpf Laser Gmbh | Verfahren zum Stabilisieren der Strahllage und Lasersystem mit Strahllagebestimmung |
| CN115446333B (zh) * | 2022-08-03 | 2024-03-29 | 西安铂力特增材技术股份有限公司 | 振镜校准结构及激光校准方法 |
| US20240173920A1 (en) * | 2022-11-28 | 2024-05-30 | Concept Laser Gmbh | Methods and systems for calibrating an additive manufacturing machine |
| DE102022214253A1 (de) | 2022-12-21 | 2024-06-27 | Robert Bosch Gesellschaft mit beschränkter Haftung | Prüfanordnung für eine Galvanometer-Scanner-Vorrichtung |
| EP4506096A3 (de) * | 2023-08-07 | 2025-05-14 | Precitec GmbH & Co. KG | Verfahren zum kalibrieren eines laserbearbeitungssystems sowie laserbearbeitungssystem zur durchführung des verfahrens |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4532402A (en) | 1983-09-02 | 1985-07-30 | Xrl, Inc. | Method and apparatus for positioning a focused beam on an integrated circuit |
| US4769523A (en) * | 1985-03-08 | 1988-09-06 | Nippon Kogaku K.K. | Laser processing apparatus |
| JPH04253585A (ja) * | 1991-01-31 | 1992-09-09 | Nec Corp | レーザ加工装置 |
| US5210410A (en) * | 1991-09-26 | 1993-05-11 | The Board Of Trustees Of The Leland Stanford Junior University | Scanning probe microscope having scan correction |
| DE4437284A1 (de) * | 1994-10-18 | 1996-04-25 | Eos Electro Optical Syst | Verfahren zum Kalibrieren einer Steuerung zur Ablenkung eines Laserstrahls |
| US5751585A (en) | 1995-03-20 | 1998-05-12 | Electro Scientific Industries, Inc. | High speed, high accuracy multi-stage tool positioning system |
| US5847960A (en) | 1995-03-20 | 1998-12-08 | Electro Scientific Industries, Inc. | Multi-tool positioning system |
-
2000
- 2000-04-26 DE DE60019573T patent/DE60019573T2/de not_active Expired - Lifetime
- 2000-04-26 US US09/558,367 patent/US6501061B1/en not_active Expired - Lifetime
- 2000-04-26 JP JP2000613603A patent/JP2002542042A/ja active Pending
- 2000-04-26 EP EP00922377A patent/EP1173302B1/en not_active Expired - Lifetime
- 2000-04-26 CA CA002370813A patent/CA2370813C/en not_active Expired - Fee Related
- 2000-04-26 AU AU42807/00A patent/AU4280700A/en not_active Abandoned
- 2000-04-26 KR KR1020017013732A patent/KR100600921B1/ko not_active Expired - Fee Related
- 2000-04-26 WO PCT/CA2000/000472 patent/WO2000064622A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| AU4280700A (en) | 2000-11-10 |
| EP1173302B1 (en) | 2005-04-20 |
| KR100600921B1 (ko) | 2006-07-13 |
| WO2000064622A1 (en) | 2000-11-02 |
| DE60019573D1 (de) | 2005-05-25 |
| JP2002542042A (ja) | 2002-12-10 |
| US6501061B1 (en) | 2002-12-31 |
| CA2370813A1 (en) | 2000-11-02 |
| EP1173302A1 (en) | 2002-01-23 |
| KR20010112950A (ko) | 2001-12-22 |
| DE60019573T2 (de) | 2006-03-23 |
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