DE60019573D1 - Laserkalibrierungsvorrichtung und -verfahren - Google Patents

Laserkalibrierungsvorrichtung und -verfahren

Info

Publication number
DE60019573D1
DE60019573D1 DE60019573T DE60019573T DE60019573D1 DE 60019573 D1 DE60019573 D1 DE 60019573D1 DE 60019573 T DE60019573 T DE 60019573T DE 60019573 T DE60019573 T DE 60019573T DE 60019573 D1 DE60019573 D1 DE 60019573D1
Authority
DE
Germany
Prior art keywords
calibration device
laser calibration
laser
calibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60019573T
Other languages
English (en)
Other versions
DE60019573T2 (de
Inventor
Theodore Kitai
James Miller
Glenn Parker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GSI Lumonics Inc Canada
Original Assignee
GSI Lumonics Inc Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GSI Lumonics Inc Canada filed Critical GSI Lumonics Inc Canada
Application granted granted Critical
Publication of DE60019573D1 publication Critical patent/DE60019573D1/de
Publication of DE60019573T2 publication Critical patent/DE60019573T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring device

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE60019573T 1999-04-27 2000-04-26 Laserkalibrierungsvorrichtung und -verfahren Expired - Lifetime DE60019573T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13113899P 1999-04-27 1999-04-27
US131138P 1999-04-27
PCT/CA2000/000472 WO2000064622A1 (en) 1999-04-27 2000-04-26 Laser calibration apparatus and method

Publications (2)

Publication Number Publication Date
DE60019573D1 true DE60019573D1 (de) 2005-05-25
DE60019573T2 DE60019573T2 (de) 2006-03-23

Family

ID=22448055

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60019573T Expired - Lifetime DE60019573T2 (de) 1999-04-27 2000-04-26 Laserkalibrierungsvorrichtung und -verfahren

Country Status (8)

Country Link
US (1) US6501061B1 (de)
EP (1) EP1173302B1 (de)
JP (1) JP2002542042A (de)
KR (1) KR100600921B1 (de)
AU (1) AU4280700A (de)
CA (1) CA2370813C (de)
DE (1) DE60019573T2 (de)
WO (1) WO2000064622A1 (de)

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US6777645B2 (en) * 2001-03-29 2004-08-17 Gsi Lumonics Corporation High-speed, precision, laser-based method and system for processing material of one or more targets within a field
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US20050100072A1 (en) * 2001-11-14 2005-05-12 Rao Rajasekhar M. High power laser output beam energy density reduction
US7257255B2 (en) 2001-11-21 2007-08-14 Candledragon, Inc. Capturing hand motion
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DE10206183A1 (de) * 2002-02-14 2003-08-28 Siemens Ag Verfahren zur Bestimmung der Genauigkeit von Bearbeitungsmaschine
US7006237B2 (en) * 2002-03-26 2006-02-28 Mitsubishi Denki Kabushiki Kaisha Laser beam positioning device for laser processing equipment
US6951995B2 (en) 2002-03-27 2005-10-04 Gsi Lumonics Corp. Method and system for high-speed, precise micromachining an array of devices
US7563695B2 (en) * 2002-03-27 2009-07-21 Gsi Group Corporation Method and system for high-speed precise laser trimming and scan lens for use therein
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JP4531323B2 (ja) * 2002-09-13 2010-08-25 株式会社半導体エネルギー研究所 レーザ装置、レーザ照射方法、および半導体装置の作製方法
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JP2007509368A (ja) * 2003-10-17 2007-04-12 ジーエスアイ・ルモニクス・コーポレーション 柔軟な走査範囲
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JP2005275135A (ja) * 2004-03-25 2005-10-06 Toshiba Corp 液晶ディスプレイの欠陥画素修正方法および修正装置
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US7679029B2 (en) 2005-10-28 2010-03-16 Cymer, Inc. Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations
TWI504963B (zh) * 2006-01-30 2015-10-21 Electro Scient Ind Inc 消色差掃描透鏡
US20070215575A1 (en) * 2006-03-15 2007-09-20 Bo Gu Method and system for high-speed, precise, laser-based modification of one or more electrical elements
US7755026B2 (en) * 2006-05-04 2010-07-13 CandleDragon Inc. Generating signals representative of sensed light that is associated with writing being done by a user
KR100890259B1 (ko) 2007-07-25 2009-03-24 (주)와이티에스 레이저 마킹 시스템의 주행축 틀어짐에 따른 마킹패턴오프셋 자동 보정 방법
EP2185344B1 (de) * 2007-08-23 2018-06-13 3D Systems, Inc. Automatische geometrische kalibrierung unter verwendung von laser-scanning-reflektometrie
SG152090A1 (en) * 2007-10-23 2009-05-29 Hypertronics Pte Ltd Scan head calibration system and method
TWI335252B (en) * 2007-11-30 2011-01-01 Ind Tech Res Inst Calibration strip and the laser calibration system using thereof
TW201002466A (en) * 2008-04-10 2010-01-16 Applied Materials Inc Laser-scribing platform
ES2379106B1 (es) * 2009-07-31 2013-02-22 Grupo Antolín-Ingeniería, S.A. Instalación de grabado de motivos decorativos y/o indicativos sobre piezas de vehículos mediante la proyección de un haz de luz láser y proceso para uso en la instalación.
US20110210105A1 (en) * 2009-12-30 2011-09-01 Gsi Group Corporation Link processing with high speed beam deflection
DE102010008296A1 (de) * 2010-02-17 2011-08-18 Carl Zeiss NTS GmbH, 73447 Laserbearbeitungssystem, Objekthalter und Laserbearbeitungsverfahren
TWI417969B (zh) * 2010-07-21 2013-12-01 Lextar Electronics Corp 晶片轉移方法及晶片轉移設備
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CN102547048B (zh) * 2010-10-22 2015-03-25 财团法人工业技术研究院 激光扫描装置
US8669507B2 (en) * 2010-10-22 2014-03-11 Industrial Technology Research Institute Laser scanning device
DE102011109449B9 (de) * 2011-08-04 2013-04-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum kalibrieren eines laserscanners, verwendung des verfahrens und bearbeitungssystem mit laserscanner
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TWI543830B (zh) 2013-05-10 2016-08-01 財團法人工業技術研究院 視覺誤差校正方法
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DE102015001421B4 (de) * 2015-02-06 2016-09-15 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Strahldiagnose an Laserbearbeitungs-Optiken (PRl-2015-001)
DE102015004163B4 (de) 2015-04-01 2017-03-23 Primes Gmbh Vorrichtung und Verfahren zur Bestimmung von Eigenschaften eines Laserstrahls
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DE102015226722A1 (de) * 2015-12-23 2017-06-29 Eos Gmbh Electro Optical Systems Vorrichtung und Verfahren zum Kalibrieren einer Vorrichtung zum generativen Herstellen eines dreidimensionalen Objekts
US11642725B2 (en) 2016-01-19 2023-05-09 General Electric Company Method for calibrating laser additive manufacturing process
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JP6592547B2 (ja) * 2018-03-12 2019-10-16 株式会社アマダホールディングス レーザ光の芯出し方法及びレーザ加工装置
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CN115943056A (zh) * 2019-09-04 2023-04-07 伏尔肯模型公司 激光阵列位置检测
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Also Published As

Publication number Publication date
WO2000064622A1 (en) 2000-11-02
DE60019573T2 (de) 2006-03-23
AU4280700A (en) 2000-11-10
CA2370813A1 (en) 2000-11-02
KR100600921B1 (ko) 2006-07-13
US6501061B1 (en) 2002-12-31
JP2002542042A (ja) 2002-12-10
KR20010112950A (ko) 2001-12-22
CA2370813C (en) 2008-06-17
EP1173302A1 (de) 2002-01-23
EP1173302B1 (de) 2005-04-20

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