CA2329412C - Masque elastomere et son utilisation dans la fabrication de dispositifs, dont des afficheurs electroluminescents pixelises - Google Patents

Masque elastomere et son utilisation dans la fabrication de dispositifs, dont des afficheurs electroluminescents pixelises Download PDF

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Publication number
CA2329412C
CA2329412C CA2329412A CA2329412A CA2329412C CA 2329412 C CA2329412 C CA 2329412C CA 2329412 A CA2329412 A CA 2329412A CA 2329412 A CA2329412 A CA 2329412A CA 2329412 C CA2329412 C CA 2329412C
Authority
CA
Canada
Prior art keywords
mask
article
agent
channels
applying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA2329412A
Other languages
English (en)
Other versions
CA2329412A1 (fr
Inventor
Rebecca J. Jackman
David C. Duffy
George M. Whitesides
Kathleen M. Vaeth
Klavs F. Jensen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harvard College
Massachusetts Institute of Technology
Original Assignee
Harvard College
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harvard College, Massachusetts Institute of Technology filed Critical Harvard College
Publication of CA2329412A1 publication Critical patent/CA2329412A1/fr
Application granted granted Critical
Publication of CA2329412C publication Critical patent/CA2329412C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/12Production of screen printing forms or similar printing forms, e.g. stencils
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Composite Materials (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
CA2329412A 1998-04-21 1999-04-20 Masque elastomere et son utilisation dans la fabrication de dispositifs, dont des afficheurs electroluminescents pixelises Expired - Fee Related CA2329412C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US6374298A 1998-04-21 1998-04-21
US09/063,742 1998-04-21
PCT/US1999/008623 WO1999054786A1 (fr) 1998-04-21 1999-04-20 Masque elastomere et son utilisation dans la fabrication de dispositifs, dont des afficheurs electroluminescents pixelises

Publications (2)

Publication Number Publication Date
CA2329412A1 CA2329412A1 (fr) 1999-10-28
CA2329412C true CA2329412C (fr) 2010-09-21

Family

ID=22051194

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2329412A Expired - Fee Related CA2329412C (fr) 1998-04-21 1999-04-20 Masque elastomere et son utilisation dans la fabrication de dispositifs, dont des afficheurs electroluminescents pixelises

Country Status (4)

Country Link
EP (1) EP1080394A1 (fr)
JP (1) JP2002512124A (fr)
CA (1) CA2329412C (fr)
WO (1) WO1999054786A1 (fr)

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EP0929658A4 (fr) 1996-08-26 2005-11-02 Univ Princeton Dispositifs de tri de microstructures pouvant etre scellees de maniere reversible
US7282240B1 (en) 1998-04-21 2007-10-16 President And Fellows Of Harvard College Elastomeric mask and use in fabrication of devices
WO2001035081A1 (fr) * 1999-11-12 2001-05-17 Surromed, Inc. Biodetection par resonance plasmonique de surface
CA2402737A1 (fr) * 2000-03-17 2001-09-27 Emanuele Ostuni Technique de structuration cellulaire
US6686184B1 (en) 2000-05-25 2004-02-03 President And Fellows Of Harvard College Patterning of surfaces utilizing microfluidic stamps including three-dimensionally arrayed channel networks
US6645432B1 (en) 2000-05-25 2003-11-11 President & Fellows Of Harvard College Microfluidic systems including three-dimensionally arrayed channel networks
US7323143B2 (en) 2000-05-25 2008-01-29 President And Fellows Of Harvard College Microfluidic systems including three-dimensionally arrayed channel networks
GB0013394D0 (en) * 2000-06-01 2000-07-26 Microemissive Displays Ltd A method of creating a color optoelectronic device
US6770721B1 (en) 2000-11-02 2004-08-03 Surface Logix, Inc. Polymer gel contact masks and methods and molds for making same
US6864065B2 (en) 2000-11-08 2005-03-08 Surface Logix, Inc. Assays for monitoring cell motility in real-time
US7033821B2 (en) 2000-11-08 2006-04-25 Surface Logix, Inc. Device for monitoring cell motility in real-time
US6967074B2 (en) 2000-11-08 2005-11-22 Surface Logix, Inc. Methods of detecting immobilized biomolecules
US7001740B2 (en) 2000-11-08 2006-02-21 Surface Logix, Inc. Methods of arraying biological materials using peelable and resealable devices
US7033819B2 (en) 2000-11-08 2006-04-25 Surface Logix, Inc. System for monitoring cell motility in real-time
US7351575B2 (en) 2000-11-08 2008-04-01 Surface Logix, Inc. Methods for processing biological materials using peelable and resealable devices
US6893851B2 (en) 2000-11-08 2005-05-17 Surface Logix, Inc. Method for arraying biomolecules and for monitoring cell motility in real-time
US6803205B2 (en) 2000-11-08 2004-10-12 Surface Logix, Inc. Methods of measuring enzyme activity using peelable and resealable devices
US6844184B2 (en) 2000-11-08 2005-01-18 Surface Logix, Inc. Device for arraying biomolecules and for monitoring cell motility in real-time
US7439056B2 (en) 2000-11-08 2008-10-21 Surface Logix Inc. Peelable and resealable devices for arraying materials
US7371563B2 (en) 2000-11-08 2008-05-13 Surface Logix, Inc. Peelable and resealable devices for biochemical assays
WO2002086452A2 (fr) 2001-03-23 2002-10-31 President And Fellows Of Harvard College Depot selectif de materiaux sur des surfaces agencees
CN100493282C (zh) 2001-08-30 2009-05-27 夏普株式会社 有机电致发光装置的制造方法
US6833040B2 (en) 2001-12-19 2004-12-21 Surface Logix Inc. Apparatus and method for handling membranes
US6897164B2 (en) 2002-02-14 2005-05-24 3M Innovative Properties Company Aperture masks for circuit fabrication
US6821348B2 (en) 2002-02-14 2004-11-23 3M Innovative Properties Company In-line deposition processes for circuit fabrication
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EP1529317A2 (fr) * 2002-08-06 2005-05-11 Avecia Limited Dispositifs electroniques organiques
NL1022269C2 (nl) 2002-12-24 2004-06-25 Otb Group Bv Werkwijze voor het vervaardigen van een organic electroluminescent display device, substraat ten gebruike bij een dergelijke werkwijze, alsmede een organic electroluminescent display device verkregen met de werkwijze.
US6926840B2 (en) 2002-12-31 2005-08-09 Eastman Kodak Company Flexible frame for mounting a deposition mask
CA2549341C (fr) 2003-12-19 2014-06-10 The University Of North Carolina At Chapel Hill Procede de fabrication de microstructures et de nanostructures au moyen de la lithographie molle ou d'impression
DE102004034418B4 (de) * 2004-07-15 2009-06-25 Schott Ag Verfahren zur Herstellung struktuierter optischer Filterschichten auf Substraten
US7821199B2 (en) 2004-09-08 2010-10-26 Toray Industries, Inc. Organic electroluminescent device and manufacturing method thereof
US20060128165A1 (en) * 2004-12-13 2006-06-15 3M Innovative Properties Company Method for patterning surface modification
KR20060079957A (ko) * 2005-01-04 2006-07-07 삼성에스디아이 주식회사 포토리소그래피용 연질 포토마스크, 그 제조방법, 이를채용한 패턴 형성 방법
EP1681734A1 (fr) * 2005-01-18 2006-07-19 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Dispositif électro-optique et méthode de sa fabrication
WO2007061448A2 (fr) 2005-05-18 2007-05-31 President And Fellows Of Harvard College Fabrication de passages conducteurs, microcircuits et microstructures dans des reseaux microfluidiques
DE102006026981A1 (de) * 2006-06-10 2007-12-13 Leonhard Kurz Gmbh & Co. Kg Verfahren zur Herstellung einer strukturierten Schicht auf einem Trägersubstrat
DE102007029915B4 (de) 2006-12-20 2017-03-30 Lg Display Co., Ltd. Organisches Elektrolumineszenzbauteil und Verfahren zum Herstellen desselben
US7662663B2 (en) 2007-03-28 2010-02-16 Eastman Kodak Company OLED patterning method
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DE102011016453A1 (de) * 2011-04-08 2013-01-17 Universität Stuttgart Verfahren zur Herstellung einer Siebdruckform und damit hergestellte Solarzelle
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GB2607115B (en) * 2021-06-25 2023-10-04 Cipherx Tech Ltd Method of producing a microneedle array

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Also Published As

Publication number Publication date
CA2329412A1 (fr) 1999-10-28
WO1999054786A9 (fr) 2000-02-03
EP1080394A1 (fr) 2001-03-07
JP2002512124A (ja) 2002-04-23
WO1999054786A1 (fr) 1999-10-28

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Effective date: 20160420