CA2206464C - Gas removal device - Google Patents
Gas removal device Download PDFInfo
- Publication number
- CA2206464C CA2206464C CA002206464A CA2206464A CA2206464C CA 2206464 C CA2206464 C CA 2206464C CA 002206464 A CA002206464 A CA 002206464A CA 2206464 A CA2206464 A CA 2206464A CA 2206464 C CA2206464 C CA 2206464C
- Authority
- CA
- Canada
- Prior art keywords
- hydrolysis reactor
- outlet
- oven
- gas
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 claims abstract description 48
- 238000006460 hydrolysis reaction Methods 0.000 claims abstract description 41
- 230000007062 hydrolysis Effects 0.000 claims abstract description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000002253 acid Substances 0.000 claims abstract description 11
- 239000007787 solid Substances 0.000 claims abstract description 11
- 239000000243 solution Substances 0.000 claims abstract description 10
- 238000002347 injection Methods 0.000 claims abstract description 9
- 239000007924 injection Substances 0.000 claims abstract description 9
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 238000001764 infiltration Methods 0.000 claims description 10
- 230000008595 infiltration Effects 0.000 claims description 10
- 239000002131 composite material Substances 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 230000003472 neutralizing effect Effects 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000000605 extraction Methods 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 231100000331 toxic Toxicity 0.000 description 5
- 230000002588 toxic effect Effects 0.000 description 5
- 150000001805 chlorine compounds Chemical class 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052580 B4C Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910003685 SiB4 Inorganic materials 0.000 description 1
- -1 SiC) Chemical compound 0.000 description 1
- ZILJFRYKLPPLTO-UHFFFAOYSA-N [C].[B].[Si] Chemical compound [C].[B].[Si] ZILJFRYKLPPLTO-UHFFFAOYSA-N 0.000 description 1
- IUHFWCGCSVTMPG-UHFFFAOYSA-N [C].[C] Chemical class [C].[C] IUHFWCGCSVTMPG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000011153 ceramic matrix composite Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S261/00—Gas and liquid contact apparatus
- Y10S261/54—Venturi scrubbers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Analytical Chemistry (AREA)
- Biomedical Technology (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR94/14584 | 1994-12-05 | ||
| FR9414584A FR2727692A1 (fr) | 1994-12-05 | 1994-12-05 | Dispositif d'extraction de gaz pour four d'infiltration ou depot chimique en phase vapeur dans une installation de fabrication de pieces en materiau composite |
| PCT/FR1995/001587 WO1996017972A1 (fr) | 1994-12-05 | 1995-12-01 | Dispositif d'extraction de gaz |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2206464A1 CA2206464A1 (en) | 1996-06-13 |
| CA2206464C true CA2206464C (en) | 2003-09-16 |
Family
ID=9469472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002206464A Expired - Fee Related CA2206464C (en) | 1994-12-05 | 1995-12-01 | Gas removal device |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6051071A (enExample) |
| EP (1) | EP0797689B1 (enExample) |
| JP (1) | JP3979663B2 (enExample) |
| CA (1) | CA2206464C (enExample) |
| DE (1) | DE69504868T2 (enExample) |
| ES (1) | ES2124033T3 (enExample) |
| FR (1) | FR2727692A1 (enExample) |
| GB (1) | GB2295831B (enExample) |
| WO (1) | WO1996017972A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030153044A1 (en) * | 2001-05-14 | 2003-08-14 | Monika Liljedahl | Tissues or organs for use in xenotransplantation |
| WO2002092791A1 (en) * | 2001-05-14 | 2002-11-21 | Stell | Tissues or organs for use in xenotransplantation |
| US6702744B2 (en) * | 2001-06-20 | 2004-03-09 | Advanced Cardiovascular Systems, Inc. | Agents that stimulate therapeutic angiogenesis and techniques and devices that enable their delivery |
| US8608661B1 (en) | 2001-11-30 | 2013-12-17 | Advanced Cardiovascular Systems, Inc. | Method for intravascular delivery of a treatment agent beyond a blood vessel wall |
| US6953605B2 (en) | 2001-12-26 | 2005-10-11 | Messier-Bugatti | Method for densifying porous substrates by chemical vapour infiltration with preheated gas |
| US7361368B2 (en) * | 2002-06-28 | 2008-04-22 | Advanced Cardiovascular Systems, Inc. | Device and method for combining a treatment agent and a gel |
| US8821473B2 (en) * | 2003-04-15 | 2014-09-02 | Abbott Cardiovascular Systems Inc. | Methods and compositions to treat myocardial conditions |
| US7641643B2 (en) | 2003-04-15 | 2010-01-05 | Abbott Cardiovascular Systems Inc. | Methods and compositions to treat myocardial conditions |
| US8038991B1 (en) | 2003-04-15 | 2011-10-18 | Abbott Cardiovascular Systems Inc. | High-viscosity hyaluronic acid compositions to treat myocardial conditions |
| US8187621B2 (en) * | 2005-04-19 | 2012-05-29 | Advanced Cardiovascular Systems, Inc. | Methods and compositions for treating post-myocardial infarction damage |
| US8828433B2 (en) | 2005-04-19 | 2014-09-09 | Advanced Cardiovascular Systems, Inc. | Hydrogel bioscaffoldings and biomedical device coatings |
| US9539410B2 (en) | 2005-04-19 | 2017-01-10 | Abbott Cardiovascular Systems Inc. | Methods and compositions for treating post-cardial infarction damage |
| US20080125745A1 (en) * | 2005-04-19 | 2008-05-29 | Shubhayu Basu | Methods and compositions for treating post-cardial infarction damage |
| US8303972B2 (en) * | 2005-04-19 | 2012-11-06 | Advanced Cardiovascular Systems, Inc. | Hydrogel bioscaffoldings and biomedical device coatings |
| US7732190B2 (en) * | 2006-07-31 | 2010-06-08 | Advanced Cardiovascular Systems, Inc. | Modified two-component gelation systems, methods of use and methods of manufacture |
| US9242005B1 (en) | 2006-08-21 | 2016-01-26 | Abbott Cardiovascular Systems Inc. | Pro-healing agent formulation compositions, methods and treatments |
| US9005672B2 (en) | 2006-11-17 | 2015-04-14 | Abbott Cardiovascular Systems Inc. | Methods of modifying myocardial infarction expansion |
| US8741326B2 (en) * | 2006-11-17 | 2014-06-03 | Abbott Cardiovascular Systems Inc. | Modified two-component gelation systems, methods of use and methods of manufacture |
| US8192760B2 (en) * | 2006-12-04 | 2012-06-05 | Abbott Cardiovascular Systems Inc. | Methods and compositions for treating tissue using silk proteins |
| US10648075B2 (en) | 2015-03-23 | 2020-05-12 | Goodrich Corporation | Systems and methods for chemical vapor infiltration and densification of porous substrates |
| FR3114329B1 (fr) * | 2020-09-24 | 2023-06-23 | Safran Ceram | Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2109970C3 (de) * | 1971-03-03 | 1980-03-20 | Hoechst Ag, 6000 Frankfurt | Verfahren und Vorrichtung zur Entarsenierung von Polyphosphorsäure |
| DE2157737C3 (de) * | 1971-11-22 | 1981-10-29 | Schering Ag Berlin Und Bergkamen, 1000 Berlin | Kontinuierliche Verfahren in einem Blasensäulenreaktor |
| US3929968A (en) * | 1973-10-10 | 1975-12-30 | Du Pont | Dry collection of waste materials |
| CH612591A5 (en) * | 1976-01-08 | 1979-08-15 | Sulzer Ag | Mass transfer column |
| US4041088A (en) * | 1976-11-08 | 1977-08-09 | Lithium Corporation Of America | Recirculation telomerization process and its liquid telomers and liquid telomers produced thereby |
| US4185025A (en) * | 1977-03-29 | 1980-01-22 | Henkel Kommanditgesellschaft Auf Aktien (Henkel Kgaa) | Continuous process for ozonizing unsaturated compounds |
| US4251236A (en) * | 1977-11-17 | 1981-02-17 | Ciba-Geigy Corporation | Process for purifying the off-gases from industrial furnaces, especially from waste incineration plants |
| JPS5794323A (en) * | 1980-12-03 | 1982-06-11 | Stanley Electric Co Ltd | Treating method for waste gas of cvd apparatus |
| FI67030B (fi) * | 1981-06-26 | 1984-09-28 | Outokumpu Oy | Foerfarande och anordning foer rening av gaser innehaollandefasta och gasformiga foeroreningar |
| JPS5950165A (ja) * | 1982-09-16 | 1984-03-23 | Sony Corp | 減圧反応装置 |
| DE3338852C2 (de) * | 1982-12-11 | 1987-02-26 | Man Technologie Gmbh, 8000 Muenchen | Verfahren zum oxidativen Beschichten von metallischen Werkstoffen |
| US4603035A (en) * | 1983-09-30 | 1986-07-29 | Chevron Research Company | Hydrogen sulfide removal process |
| JPS59197141A (ja) * | 1984-03-13 | 1984-11-08 | Sony Corp | 減圧反応装置に於ける排気処理方法 |
| JPS6123758A (ja) * | 1984-07-10 | 1986-02-01 | Toshiba Corp | シリコン製造装置 |
| FR2594119B1 (fr) * | 1986-02-10 | 1988-06-03 | Europ Propulsion | Installation pour l'infiltration chimique en phase vapeur d'un materiau refractaire autre que le carbone |
| JPH06104898B2 (ja) * | 1988-01-13 | 1994-12-21 | 忠弘 大見 | 減圧表面処理装置 |
| US5380370A (en) * | 1993-04-30 | 1995-01-10 | Tokyo Electron Limited | Method of cleaning reaction tube |
| FR2714076B1 (fr) * | 1993-12-16 | 1996-03-15 | Europ Propulsion | Procédé de densification de substrats poreux par infiltration chimique en phase vapeur de carbure de silicium. |
-
1994
- 1994-12-05 FR FR9414584A patent/FR2727692A1/fr active Granted
-
1995
- 1995-09-22 GB GB9519431A patent/GB2295831B/en not_active Expired - Fee Related
- 1995-12-01 US US08/849,623 patent/US6051071A/en not_active Expired - Lifetime
- 1995-12-01 WO PCT/FR1995/001587 patent/WO1996017972A1/fr not_active Ceased
- 1995-12-01 DE DE69504868T patent/DE69504868T2/de not_active Expired - Lifetime
- 1995-12-01 CA CA002206464A patent/CA2206464C/en not_active Expired - Fee Related
- 1995-12-01 ES ES95941752T patent/ES2124033T3/es not_active Expired - Lifetime
- 1995-12-01 JP JP51735696A patent/JP3979663B2/ja not_active Expired - Lifetime
- 1995-12-01 EP EP95941752A patent/EP0797689B1/fr not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2727692A1 (fr) | 1996-06-07 |
| JP3979663B2 (ja) | 2007-09-19 |
| GB9519431D0 (en) | 1995-11-22 |
| GB2295831A (en) | 1996-06-12 |
| EP0797689A1 (fr) | 1997-10-01 |
| GB2295831B (en) | 1998-04-29 |
| DE69504868T2 (de) | 1999-05-20 |
| EP0797689B1 (fr) | 1998-09-16 |
| CA2206464A1 (en) | 1996-06-13 |
| US6051071A (en) | 2000-04-18 |
| WO1996017972A1 (fr) | 1996-06-13 |
| ES2124033T3 (es) | 1999-01-16 |
| JPH10509767A (ja) | 1998-09-22 |
| FR2727692B1 (enExample) | 1997-02-28 |
| DE69504868D1 (de) | 1998-10-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20151201 |