CA2152558A1 - Bleaching mask - Google Patents
Bleaching maskInfo
- Publication number
- CA2152558A1 CA2152558A1 CA 2152558 CA2152558A CA2152558A1 CA 2152558 A1 CA2152558 A1 CA 2152558A1 CA 2152558 CA2152558 CA 2152558 CA 2152558 A CA2152558 A CA 2152558A CA 2152558 A1 CA2152558 A1 CA 2152558A1
- Authority
- CA
- Canada
- Prior art keywords
- wavelength
- photoresist
- waveguide
- irradiation
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000004061 bleaching Methods 0.000 title abstract description 13
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 42
- 229920000642 polymer Polymers 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 description 25
- 239000002184 metal Substances 0.000 description 25
- 230000005540 biological transmission Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP94201811 | 1994-06-23 | ||
| EP94201811.0 | 1994-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2152558A1 true CA2152558A1 (en) | 1995-12-24 |
Family
ID=8216985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2152558 Abandoned CA2152558A1 (en) | 1994-06-23 | 1995-06-23 | Bleaching mask |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH0815542A (enrdf_load_stackoverflow) |
| CN (1) | CN1125850A (enrdf_load_stackoverflow) |
| CA (1) | CA2152558A1 (enrdf_load_stackoverflow) |
| TW (1) | TW275668B (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110924182A (zh) * | 2019-11-26 | 2020-03-27 | 天守(福建)超纤科技股份有限公司 | 一种波导处理技术的聚氨酯合成革及其制备方法 |
-
1994
- 1994-09-06 TW TW83108206A patent/TW275668B/zh active
-
1995
- 1995-06-21 JP JP17689095A patent/JPH0815542A/ja active Pending
- 1995-06-22 CN CN 95107664 patent/CN1125850A/zh active Pending
- 1995-06-23 CA CA 2152558 patent/CA2152558A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| TW275668B (enrdf_load_stackoverflow) | 1996-05-11 |
| JPH0815542A (ja) | 1996-01-19 |
| CN1125850A (zh) | 1996-07-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Dead |