JPH0815542A - 漂白マスク - Google Patents
漂白マスクInfo
- Publication number
- JPH0815542A JPH0815542A JP17689095A JP17689095A JPH0815542A JP H0815542 A JPH0815542 A JP H0815542A JP 17689095 A JP17689095 A JP 17689095A JP 17689095 A JP17689095 A JP 17689095A JP H0815542 A JPH0815542 A JP H0815542A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- photoresist
- mask
- wavelength
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004061 bleaching Methods 0.000 title description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 44
- 229920000642 polymer Polymers 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 22
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 230000001678 irradiating effect Effects 0.000 claims abstract description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000005286 illumination Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 description 26
- 239000002184 metal Substances 0.000 description 26
- 230000005855 radiation Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007844 bleaching agent Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229920000831 ionic polymer Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP94201811 | 1994-06-23 | ||
| NL94201811.0 | 1994-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0815542A true JPH0815542A (ja) | 1996-01-19 |
Family
ID=8216985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17689095A Pending JPH0815542A (ja) | 1994-06-23 | 1995-06-21 | 漂白マスク |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH0815542A (enrdf_load_stackoverflow) |
| CN (1) | CN1125850A (enrdf_load_stackoverflow) |
| CA (1) | CA2152558A1 (enrdf_load_stackoverflow) |
| TW (1) | TW275668B (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110924182A (zh) * | 2019-11-26 | 2020-03-27 | 天守(福建)超纤科技股份有限公司 | 一种波导处理技术的聚氨酯合成革及其制备方法 |
-
1994
- 1994-09-06 TW TW83108206A patent/TW275668B/zh active
-
1995
- 1995-06-21 JP JP17689095A patent/JPH0815542A/ja active Pending
- 1995-06-22 CN CN 95107664 patent/CN1125850A/zh active Pending
- 1995-06-23 CA CA 2152558 patent/CA2152558A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| TW275668B (enrdf_load_stackoverflow) | 1996-05-11 |
| CN1125850A (zh) | 1996-07-03 |
| CA2152558A1 (en) | 1995-12-24 |
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