CA2082779C - Installation de distribution d'azote a tres haute purete et procede de mise en oeuvre - Google Patents
Installation de distribution d'azote a tres haute purete et procede de mise en oeuvre Download PDFInfo
- Publication number
- CA2082779C CA2082779C CA002082779A CA2082779A CA2082779C CA 2082779 C CA2082779 C CA 2082779C CA 002082779 A CA002082779 A CA 002082779A CA 2082779 A CA2082779 A CA 2082779A CA 2082779 C CA2082779 C CA 2082779C
- Authority
- CA
- Canada
- Prior art keywords
- nitrogen
- installation according
- less
- tubing
- active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 29
- 239000012535 impurity Substances 0.000 claims abstract description 11
- 230000007935 neutral effect Effects 0.000 claims abstract description 10
- 230000001681 protective effect Effects 0.000 claims abstract description 9
- 238000007872 degassing Methods 0.000 claims abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 4
- 239000010935 stainless steel Substances 0.000 claims abstract description 4
- 238000009434 installation Methods 0.000 claims description 25
- 210000000056 organ Anatomy 0.000 claims description 10
- 238000010926 purge Methods 0.000 claims description 4
- 239000004809 Teflon Substances 0.000 claims description 2
- 229920006362 Teflon® Polymers 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 238000011010 flushing procedure Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 238000011109 contamination Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910001868 water Inorganic materials 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/01—Shape
- F17C2201/0138—Shape tubular
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2203/00—Vessel construction, in particular walls or details thereof
- F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
- F17C2203/0634—Materials for walls or layers thereof
- F17C2203/0636—Metals
- F17C2203/0639—Steels
- F17C2203/0643—Stainless steels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
- F17C2223/0153—Liquefied gas, e.g. LPG, GPL
- F17C2223/0161—Liquefied gas, e.g. LPG, GPL cryogenic, e.g. LNG, GNL, PLNG
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/06—Controlling or regulating of parameters as output values
- F17C2250/0605—Parameters
- F17C2250/0642—Composition; Humidity
- F17C2250/0647—Concentration of a product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2931—Diverse fluid containing pressure systems
- Y10T137/3115—Gas pressure storage over or displacement of liquid
- Y10T137/3127—With gas maintenance or application
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Pipeline Systems (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9114004A FR2683890A1 (fr) | 1991-11-14 | 1991-11-14 | Installation de distribution d'azote a tres haute purete et procede de mise en óoeuvre. |
| FR9114004 | 1991-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2082779A1 CA2082779A1 (fr) | 1993-05-15 |
| CA2082779C true CA2082779C (fr) | 2001-10-02 |
Family
ID=9418897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002082779A Expired - Fee Related CA2082779C (fr) | 1991-11-14 | 1992-11-12 | Installation de distribution d'azote a tres haute purete et procede de mise en oeuvre |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5287873A (enrdf_load_stackoverflow) |
| JP (1) | JPH05264000A (enrdf_load_stackoverflow) |
| CA (1) | CA2082779C (enrdf_load_stackoverflow) |
| DE (1) | DE4238436A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2683890A1 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5927325A (en) * | 1996-10-25 | 1999-07-27 | Inpod, Inc. | Microelectromechanical machined array valve |
| US6148847A (en) * | 1999-03-25 | 2000-11-21 | The Boc Group, Inc. | Low vapor pressure gas distribution system and method |
| DE102016112888A1 (de) | 2016-07-13 | 2018-01-18 | Truma Gerätetechnik GmbH & Co. KG | Flüssiggasanlage |
| CN112377815B (zh) * | 2020-09-21 | 2022-09-13 | 山东朗高计量泵科技有限公司 | 一种粘稠液体分流阀 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4432808A (en) * | 1982-05-26 | 1984-02-21 | Textron Inc. | Treatment of stainless steel apparatus used in the manufacture, transport or storage of nitrogen oxides |
| US4859375A (en) * | 1986-12-29 | 1989-08-22 | Air Products And Chemicals, Inc. | Chemical refill system |
| JPS63161145A (ja) * | 1986-12-25 | 1988-07-04 | Nkk Corp | クリ−ンル−ム用鋼管 |
| JP2678754B2 (ja) * | 1987-06-09 | 1997-11-17 | 日本酸素株式会社 | 高純度ガス供給用ステンレススチール製マニホールドの製造方法 |
| JPH0790272B2 (ja) * | 1987-06-09 | 1995-10-04 | 日本酸素株式会社 | ステンレススチ−ル製ｕ字管の製造方法 |
| JPH0688049B2 (ja) * | 1987-11-06 | 1994-11-09 | 日本鋼管株式会社 | 内面平滑性に優れた継目無管の製造方法 |
| JPH0644986B2 (ja) * | 1988-05-08 | 1994-06-15 | 忠弘 大見 | プロセスガス供給配管装置 |
| JP2676631B2 (ja) * | 1989-06-29 | 1997-11-17 | 日本鋼管株式会社 | クリーンルーム用鋼管 |
| EP0413835A1 (de) * | 1989-08-08 | 1991-02-27 | Siemens Aktiengesellschaft | Behälter mit einem Reaktionsgefäss für Chemische Reaktionen und Verfahren zum Betreiben dieses Behälters |
| US5148945B1 (en) * | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
-
1991
- 1991-11-14 FR FR9114004A patent/FR2683890A1/fr active Granted
-
1992
- 1992-11-12 JP JP4302328A patent/JPH05264000A/ja active Pending
- 1992-11-12 CA CA002082779A patent/CA2082779C/fr not_active Expired - Fee Related
- 1992-11-13 DE DE4238436A patent/DE4238436A1/de not_active Ceased
- 1992-11-13 US US07/976,102 patent/US5287873A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA2082779A1 (fr) | 1993-05-15 |
| JPH05264000A (ja) | 1993-10-12 |
| FR2683890A1 (fr) | 1993-05-21 |
| US5287873A (en) | 1994-02-22 |
| DE4238436A1 (enrdf_load_stackoverflow) | 1993-05-19 |
| FR2683890B1 (enrdf_load_stackoverflow) | 1997-03-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |