CA2048904A1 - Methode de fabrication d'un capteur d'humidite capacitif - Google Patents
Methode de fabrication d'un capteur d'humidite capacitifInfo
- Publication number
- CA2048904A1 CA2048904A1 CA2048904A CA2048904A CA2048904A1 CA 2048904 A1 CA2048904 A1 CA 2048904A1 CA 2048904 A CA2048904 A CA 2048904A CA 2048904 A CA2048904 A CA 2048904A CA 2048904 A1 CA2048904 A1 CA 2048904A1
- Authority
- CA
- Canada
- Prior art keywords
- particles
- polymer layer
- layer
- depositing
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP90810689 | 1990-09-12 | ||
EP90810689.1 | 1990-09-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2048904A1 true CA2048904A1 (fr) | 1992-03-13 |
CA2048904C CA2048904C (fr) | 1994-09-13 |
Family
ID=8205952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002048904A Expired - Fee Related CA2048904C (fr) | 1990-09-12 | 1991-08-09 | Methode de fabrication d'un capteur d'humidite capacitif |
Country Status (7)
Country | Link |
---|---|
US (1) | US5254371A (fr) |
EP (1) | EP0475025B1 (fr) |
JP (1) | JP2509400B2 (fr) |
CA (1) | CA2048904C (fr) |
DE (1) | DE59105040D1 (fr) |
DK (1) | DK0475025T3 (fr) |
ES (1) | ES2069784T3 (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4427627C2 (de) * | 1994-08-04 | 1999-03-11 | Leybold Ag | Regensensor |
DE19917717C2 (de) * | 1999-04-20 | 2002-10-17 | Joerg Mueller | Kapazitiver Feuchtesensor |
US6580600B2 (en) * | 2001-02-20 | 2003-06-17 | Nippon Soken, Inc. | Capacitance type humidity sensor and manufacturing method of the same |
JP3855950B2 (ja) * | 2003-03-19 | 2006-12-13 | 株式会社デンソー | 容量式湿度センサ |
JP4609173B2 (ja) * | 2005-04-22 | 2011-01-12 | 株式会社デンソー | 容量式湿度センサおよびその製造方法 |
CN103069269B (zh) | 2010-06-15 | 2016-08-03 | 3M创新有限公司 | 可变电容传感器及其制造方法 |
CN102967634A (zh) * | 2012-12-04 | 2013-03-13 | 中国科学院合肥物质科学研究院 | 基于阳极氧化铝薄膜共平面电极结构的电容湿敏传感器及其制备方法 |
JP6515683B2 (ja) * | 2015-05-29 | 2019-05-22 | 富士通株式会社 | 測定装置および測定システム |
US11815504B2 (en) * | 2016-07-11 | 2023-11-14 | Quipip, Llc | Sensor device, and systems and methods for obtaining measurements of selected characteristics of a concrete mixture |
EP3502680A4 (fr) * | 2016-09-30 | 2019-09-11 | Minebea Mitsumi Inc. | Capteur d'humidité |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3024297C2 (de) * | 1980-06-27 | 1985-08-14 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Kapazitiver Feuchtigkeitsfühler und Verfahren zum Herstellen seiner feuchtigkeitsempfindlichen Schicht |
FR2486656A1 (fr) * | 1980-07-09 | 1982-01-15 | Commissariat Energie Atomique | Hygrometre capacitif |
DE3151630C2 (de) * | 1981-12-28 | 1986-07-03 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Feuchtigkeitsfühler und Verfahren zu seiner Herstellung |
JPS5991355A (ja) * | 1982-11-16 | 1984-05-26 | Murata Mfg Co Ltd | 湿度センサ |
DE3313150C1 (de) * | 1983-04-12 | 1984-10-04 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Duennschicht-Feuchtsensor zur Messung der absoluten Feuchte und Verfahren zu seiner Herstellung |
US4761710A (en) * | 1987-06-23 | 1988-08-02 | Industrial Technology Research Institute | Polyimide capacitive humidity sensing element |
-
1991
- 1991-07-19 DE DE59105040T patent/DE59105040D1/de not_active Expired - Fee Related
- 1991-07-19 DK DK91112098.8T patent/DK0475025T3/da active
- 1991-07-19 EP EP91112098A patent/EP0475025B1/fr not_active Expired - Lifetime
- 1991-07-19 ES ES91112098T patent/ES2069784T3/es not_active Expired - Lifetime
- 1991-08-09 CA CA002048904A patent/CA2048904C/fr not_active Expired - Fee Related
- 1991-08-28 US US07/751,169 patent/US5254371A/en not_active Expired - Fee Related
- 1991-09-11 JP JP3231390A patent/JP2509400B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE59105040D1 (de) | 1995-05-04 |
JPH04256849A (ja) | 1992-09-11 |
CA2048904C (fr) | 1994-09-13 |
JP2509400B2 (ja) | 1996-06-19 |
EP0475025A1 (fr) | 1992-03-18 |
US5254371A (en) | 1993-10-19 |
ES2069784T3 (es) | 1995-05-16 |
DK0475025T3 (da) | 1995-06-19 |
EP0475025B1 (fr) | 1995-03-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2271412A1 (fr) | Dispositif photovoltaique et procede de preparation | |
US4482581A (en) | Process for the production of a capacitive hygrometer | |
EP0814514A3 (fr) | Dispositif semi-conducteur à mémoire ayant un condensateur | |
CA2048904A1 (fr) | Methode de fabrication d'un capteur d'humidite capacitif | |
CA2249062A1 (fr) | Dispositif electronique et methode de fabrication de ce produit | |
FR2162230B1 (fr) | ||
CA2326244A1 (fr) | Element de connexion electrique et methode de production connexe | |
WO2001039288A8 (fr) | Procede de formation de motifs sur des dispositifs | |
EP0813089A3 (fr) | Dispositif à miroir déformable et méthode pour sa fabrication | |
BG101818A (en) | Multilayer moisture barrier for elecirochemical cell tester | |
CA2357923A1 (fr) | Processus d'enrobage par l'application d'une poudre et d'un sirop en suspension | |
AUPP922399A0 (en) | A method and apparatus (ij46p2) | |
EP0867919A3 (fr) | Substrat semiconducteur et procédé de fabrication | |
CA2197829A1 (fr) | Dispositif de traitement d'ondes acoustiques de surface | |
WO2001071734A3 (fr) | Dispositif a tunnel multicouche avec couche d'isolation a stoechiometrie progressive | |
WO1998043282A3 (fr) | Decalques et procede visant a constituer un enduit antireflechissant et une metallisation sur une cellule solaire | |
CA2056456A1 (fr) | Passivation haute performance pour la fabrication de dispositifs a semiconducteur | |
AU6356796A (en) | Method and installation for measuring the thickness of a non-ferromagnetic conductive layer on a ferromagnetic conductive substrate | |
AU3712099A (en) | Acoustic element | |
DK0946890T3 (da) | Lag med porøst lagområde, interferensfilter indeholdende et sådant lag samt fremgangsmåde til fremstilling deraf | |
WO1996036072A3 (fr) | Procede de fabrication d'un dispositif consistant a coller un substrat a elements semi-conducteurs et a traces conducteurs sur un support comportant une metallisation | |
CA2027067A1 (fr) | Methode de deposition d'une couche oxyde continue supraconductrice a sections d'epaisseurs diverses pour dispositif supraconducteur | |
CA2115716A1 (fr) | Methode de fabrication de couches minces d'oxydes supraconducteurs configurees | |
TW367528B (en) | Titanium aluminide wetting layer for aluminum contacts | |
TW350979B (en) | Method to produce a condensator in a semiconductor arrangement |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |