CA2027067A1 - Methode de deposition d'une couche oxyde continue supraconductrice a sections d'epaisseurs diverses pour dispositif supraconducteur - Google Patents
Methode de deposition d'une couche oxyde continue supraconductrice a sections d'epaisseurs diverses pour dispositif supraconducteurInfo
- Publication number
- CA2027067A1 CA2027067A1 CA2027067A CA2027067A CA2027067A1 CA 2027067 A1 CA2027067 A1 CA 2027067A1 CA 2027067 A CA2027067 A CA 2027067A CA 2027067 A CA2027067 A CA 2027067A CA 2027067 A1 CA2027067 A1 CA 2027067A1
- Authority
- CA
- Canada
- Prior art keywords
- oxide superconductor
- forming
- thin film
- different thickness
- thickness portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002887 superconductor Substances 0.000 title abstract 9
- 238000000034 method Methods 0.000 title abstract 4
- 239000010409 thin film Substances 0.000 abstract 6
- 239000002184 metal Substances 0.000 abstract 2
- 238000001312 dry etching Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
- H10N60/0688—Etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
- H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/728—Etching
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1261491A JPH03124077A (ja) | 1989-10-06 | 1989-10-06 | 超電導素子の作製方法 |
JP261491/1989 | 1989-10-06 | ||
JP1296740A JPH03156983A (ja) | 1989-11-15 | 1989-11-15 | 超電導素子 |
JP296740/1989 | 1989-11-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2027067A1 true CA2027067A1 (fr) | 1991-04-07 |
CA2027067C CA2027067C (fr) | 1996-07-23 |
Family
ID=26545106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002027067A Expired - Fee Related CA2027067C (fr) | 1989-10-06 | 1990-10-05 | Methode de deposition d'une couche oxyde continue supraconductrice a sections d'epaisseurs diverses pour dispositif supraconducteur |
Country Status (4)
Country | Link |
---|---|
US (1) | US5418213A (fr) |
EP (1) | EP0421889B1 (fr) |
CA (1) | CA2027067C (fr) |
DE (1) | DE69026179T2 (fr) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0445350A3 (en) * | 1990-03-09 | 1991-12-11 | The Regents Of The University Of California | Microelectronic superconducting crossover and coil |
CA2443792A1 (fr) * | 2002-10-08 | 2004-04-08 | Bayer Healthcare Llc | Methode et systemes de gestion de donnees de diagnostic et de traitement de patients |
US7521932B2 (en) | 2003-05-06 | 2009-04-21 | The Penn State Research Foundation | Method and system for adjusting the fundamental symmetric mode of coupled high temperature superconductor coils |
US7295085B2 (en) * | 2003-08-21 | 2007-11-13 | E.I. Du Pont De Nemours And Company | Process for making high temperature superconductor devices each having a line oriented in a spiral fashion |
US7332910B2 (en) * | 2003-11-24 | 2008-02-19 | E.I. Du Pont De Nemours And Company | Frequency detection system comprising circuitry for adjusting the resonance frequency of a high temperature superconductor self-resonant coil |
US7301344B2 (en) | 2003-11-24 | 2007-11-27 | E.I. Du Pont De Nemours & Co. | Q-damping circuit including a high temperature superconductor coil for damping a high temperature superconductor self-resonant coil in a nuclear quadrupole resonance detection system |
US20070245374A1 (en) * | 2003-11-24 | 2007-10-18 | Inventec Corporation | Video program subtitle tex recording method and system |
US7375525B2 (en) * | 2003-12-15 | 2008-05-20 | E.I. Du Pont De Nemours And Company | Use of multiple sensors in a nuclear quadropole resonance detection system to improve measurement speed |
US7355401B2 (en) * | 2004-02-04 | 2008-04-08 | E.I. Du Pont De Nemours And Company | Use of two or more sensors to detect different nuclear quadrupole resonance signals of a target compound |
WO2005109023A2 (fr) * | 2004-02-04 | 2005-11-17 | E.I. Dupont De Nemours And Company | L'utilisation de deux capteurs ou plus dans un système de détection de résonance nucléaire à quadrupôle afin d'améliorer un rapport signal sur bruit |
EP1740967A2 (fr) * | 2004-04-30 | 2007-01-10 | E.I.Du pont de nemours and company | Procedes et appareil pour balayer une bande de frequences en utilisant un reseau de capteurs supraconducteurs haute temperature |
US7279897B2 (en) * | 2004-04-30 | 2007-10-09 | E. I. Du Pont De Nemours And Company | Scanning a band of frequencies using an array of high temperature superconductor sensors tuned to different frequencies |
US7265549B2 (en) | 2004-04-30 | 2007-09-04 | E. I. Du Pont De Nemours And Company | Scanning a band of frequencies using an array of high temperature superconductor sensors tuned to the same frequency |
WO2006060706A1 (fr) | 2004-12-03 | 2006-06-08 | E.I. Dupont De Nemours And Company | Procede pour reduire le couplage entre les bobines d'excitation et de reception d'un systeme de detection a resonnance quadripole nucleaire |
EP1831714A1 (fr) * | 2004-12-13 | 2007-09-12 | E.I. Dupont De Nemours And Company | Alarme aux masques metalliques d'un systeme de detection de la contrebande rqn/rayons x |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047390A (en) * | 1988-10-03 | 1991-09-10 | Matsushita Electric Industrial Co., Ltd. | Josephson devices and process for manufacturing the same |
US5041188A (en) * | 1989-03-02 | 1991-08-20 | Santa Barbara Research Center | High temperature superconductor detector fabrication process |
DE69026301T2 (de) * | 1989-05-12 | 1996-09-05 | Matsushita Electric Ind Co Ltd | Supraleitende Einrichtung und deren Herstellungsverfahren |
-
1990
- 1990-10-05 CA CA002027067A patent/CA2027067C/fr not_active Expired - Fee Related
- 1990-10-08 EP EP90402787A patent/EP0421889B1/fr not_active Expired - Lifetime
- 1990-10-08 DE DE69026179T patent/DE69026179T2/de not_active Expired - Fee Related
-
1993
- 1993-05-18 US US08/064,331 patent/US5418213A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0421889A3 (en) | 1991-12-11 |
EP0421889B1 (fr) | 1996-03-27 |
DE69026179T2 (de) | 1996-10-10 |
US5418213A (en) | 1995-05-23 |
DE69026179D1 (de) | 1996-05-02 |
CA2027067C (fr) | 1996-07-23 |
EP0421889A2 (fr) | 1991-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2027067A1 (fr) | Methode de deposition d'une couche oxyde continue supraconductrice a sections d'epaisseurs diverses pour dispositif supraconducteur | |
EP0335313A3 (fr) | Procédé pour la fabrication d'un dispositif à semiconducteur et appareil pour sa mise en oeuvre | |
MY114849A (en) | Surface treatment process of metallic material and metallic obtained thereby | |
EP0401688A3 (fr) | Procédé de formation de contacts électriques entre des couches d'interconnexion situées à des niveaux | |
EP0316612A3 (fr) | Procédé pour la fabrication d'un dispositif à semi-conducteur ayant une rainure remplie d'un matériau d'interconnexion | |
SG49343A1 (en) | Semiconductor and a method for manufacturing an oxide film on the surface of a semiconductor substrate | |
CA2102675A1 (fr) | Film metallise et methode de production | |
EP0784216A3 (fr) | Méthode de fabrication d'un dispositif optique à rainure formée précisement | |
EP0193820A3 (fr) | Procédé pour former un dessin dans un film mince | |
CA2047139A1 (fr) | Methode de fabrication de dispositifs supraconducteurs comportant un oxyde supraconducteur et dispositif fabrique selon cette methode | |
EP1170983A4 (fr) | Carte de formation de circuit et procede de fabrication de carte de formation de circuit | |
CA2115716A1 (fr) | Methode de fabrication de couches minces d'oxydes supraconducteurs configurees | |
EP0272678A3 (fr) | Méthode pour produire une structure conductrice et ses applications | |
EP0390465A3 (fr) | Procédé de formation d'un patron en couche sur un substrat | |
CA2135500A1 (fr) | Methode pour former un gradin sur la surface de depot d'un substrat pour obtenir un dispositif supraconducteur utilisant un supraconducteur d'oxyde | |
CA2021821A1 (fr) | Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe | |
CA2355614A1 (fr) | Procede combine de polissage chimico-mecanique/gravure permettant de realiser une mince couche plane sur la surface d'un dispositif | |
AU3389689A (en) | Semiconductor substrate having a superconducting thin film, and a process for producing the same | |
EP0782183A3 (fr) | Méthodes de fabrication de parties submicroniques dans des dispositifs semi-conducteurs | |
CA2184185A1 (fr) | Pellicule de polyester pour bandes-amorces et procede de production | |
JPS5568655A (en) | Manufacturing method of wiring | |
EP0360967A3 (fr) | Procédé pour tester la qualité d'une pellicule conductrice | |
JPS5298750A (en) | Method of forming imitation etched pattern | |
DE3664980D1 (en) | Method of enlightening solar cells and cells thus obtained | |
EP0392364A3 (fr) | Procédé de fabrication d'un dispositif semi-conducteur |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |