CA2021821A1 - Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe - Google Patents

Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe

Info

Publication number
CA2021821A1
CA2021821A1 CA2021821A CA2021821A CA2021821A1 CA 2021821 A1 CA2021821 A1 CA 2021821A1 CA 2021821 A CA2021821 A CA 2021821A CA 2021821 A CA2021821 A CA 2021821A CA 2021821 A1 CA2021821 A1 CA 2021821A1
Authority
CA
Canada
Prior art keywords
thin film
superconducting thin
preparing
compound oxide
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2021821A
Other languages
English (en)
Other versions
CA2021821C (fr
Inventor
Keizo Harada
Hideo Itozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2021821A1 publication Critical patent/CA2021821A1/fr
Application granted granted Critical
Publication of CA2021821C publication Critical patent/CA2021821C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H10N60/0632—Intermediate layers, e.g. for growth control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704—Wire, fiber, or cable

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
CA002021821A 1989-07-24 1990-07-24 Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe Expired - Fee Related CA2021821C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1191013A JPH0354116A (ja) 1989-07-24 1989-07-24 複合酸化物超電導薄膜および作製方法
JP191013/1989 1989-07-24

Publications (2)

Publication Number Publication Date
CA2021821A1 true CA2021821A1 (fr) 1991-01-25
CA2021821C CA2021821C (fr) 1998-04-14

Family

ID=16267428

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002021821A Expired - Fee Related CA2021821C (fr) 1989-07-24 1990-07-24 Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe

Country Status (5)

Country Link
US (1) US5135906A (fr)
EP (1) EP0410868B1 (fr)
JP (1) JPH0354116A (fr)
CA (1) CA2021821C (fr)
DE (1) DE69017112T2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04357198A (ja) * 1991-02-20 1992-12-10 Sanyo Electric Co Ltd 酸化物超電導薄膜の製造方法
JP3037514B2 (ja) * 1992-09-29 2000-04-24 松下電器産業株式会社 薄膜超伝導体及びその製造方法
JP3144104B2 (ja) * 1992-11-17 2001-03-12 住友電気工業株式会社 高品質な酸化物超電導薄膜の作製方法
EP0633331B1 (fr) * 1993-07-02 2000-01-19 Sumitomo Electric Industries, Limited Procédé pour fabriquer un film mince d'oxyde SrTiO3 hautement cristallin
EP1195732A3 (fr) * 2000-10-02 2004-03-10 Werner Brauweiler Procédé et dispositif pour l'utilisation orientée client des systèmes d'identification
US20030036483A1 (en) * 2000-12-06 2003-02-20 Arendt Paul N. High temperature superconducting thick films
WO2003034448A1 (fr) * 2000-12-06 2003-04-24 The Regents Of The University Of California Structure composite superconductrice
JP4228569B2 (ja) * 2001-11-28 2009-02-25 セイコーエプソン株式会社 電子デバイス用基板の製造方法及び電子デバイスの製造方法
US6756139B2 (en) * 2002-03-28 2004-06-29 The Regents Of The University Of California Buffer layers on metal alloy substrates for superconducting tapes
US6884527B2 (en) * 2003-07-21 2005-04-26 The Regents Of The University Of California Biaxially textured composite substrates
CN100365740C (zh) * 2006-04-27 2008-01-30 西南交通大学 一种高温超导涂层导体的缓冲层

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0301962B1 (fr) * 1987-07-27 1994-04-20 Sumitomo Electric Industries Limited Film mince supraconducteur of méthode pour fabriquer celui-ci
DE3853273T2 (de) * 1987-12-25 1995-10-19 Sumitomo Electric Industries Ein Halbleitersubstrat mit einem supraleitenden Dünnfilm.
US4965244A (en) * 1988-09-19 1990-10-23 Regents Of The University Of Minnesota CaF2 passivation layers for high temperature superconductors

Also Published As

Publication number Publication date
EP0410868A3 (en) 1991-05-29
DE69017112T2 (de) 1995-09-14
CA2021821C (fr) 1998-04-14
DE69017112D1 (de) 1995-03-30
US5135906A (en) 1992-08-04
EP0410868B1 (fr) 1995-02-22
EP0410868A2 (fr) 1991-01-30
JPH0354116A (ja) 1991-03-08

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