CA2021821A1 - Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe - Google Patents

Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe

Info

Publication number
CA2021821A1
CA2021821A1 CA2021821A CA2021821A CA2021821A1 CA 2021821 A1 CA2021821 A1 CA 2021821A1 CA 2021821 A CA2021821 A CA 2021821A CA 2021821 A CA2021821 A CA 2021821A CA 2021821 A1 CA2021821 A1 CA 2021821A1
Authority
CA
Canada
Prior art keywords
thin film
superconducting thin
preparing
compound oxide
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2021821A
Other languages
English (en)
Other versions
CA2021821C (fr
Inventor
Keizo Harada
Hideo Itozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2021821A1 publication Critical patent/CA2021821A1/fr
Application granted granted Critical
Publication of CA2021821C publication Critical patent/CA2021821C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0381Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H10N60/0632Intermediate layers, e.g. for growth control
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/922Static electricity metal bleed-off metallic stock
    • Y10S428/9265Special properties
    • Y10S428/93Electric superconducting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • Y10S505/702Josephson junction present
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • Y10S505/703Microelectronic device with superconducting conduction line
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704Wire, fiber, or cable

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
CA002021821A 1989-07-24 1990-07-24 Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe Expired - Fee Related CA2021821C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1191013A JPH0354116A (ja) 1989-07-24 1989-07-24 複合酸化物超電導薄膜および作製方法
JP191013/1989 1989-07-24

Publications (2)

Publication Number Publication Date
CA2021821A1 true CA2021821A1 (fr) 1991-01-25
CA2021821C CA2021821C (fr) 1998-04-14

Family

ID=16267428

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002021821A Expired - Fee Related CA2021821C (fr) 1989-07-24 1990-07-24 Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe

Country Status (5)

Country Link
US (1) US5135906A (fr)
EP (1) EP0410868B1 (fr)
JP (1) JPH0354116A (fr)
CA (1) CA2021821C (fr)
DE (1) DE69017112T2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04357198A (ja) * 1991-02-20 1992-12-10 Sanyo Electric Co Ltd 酸化物超電導薄膜の製造方法
JP3037514B2 (ja) * 1992-09-29 2000-04-24 松下電器産業株式会社 薄膜超伝導体及びその製造方法
JP3144104B2 (ja) * 1992-11-17 2001-03-12 住友電気工業株式会社 高品質な酸化物超電導薄膜の作製方法
US5501175A (en) * 1993-07-02 1996-03-26 Sumitomo Electric Industries, Ltd. Process for preparing high crystallinity oxide thin film
EP1195732A3 (fr) * 2000-10-02 2004-03-10 Werner Brauweiler Procédé et dispositif pour l'utilisation orientée client des systèmes d'identification
WO2003034448A1 (fr) * 2000-12-06 2003-04-24 The Regents Of The University Of California Structure composite superconductrice
US20030036483A1 (en) * 2000-12-06 2003-02-20 Arendt Paul N. High temperature superconducting thick films
JP4228569B2 (ja) * 2001-11-28 2009-02-25 セイコーエプソン株式会社 電子デバイス用基板の製造方法及び電子デバイスの製造方法
US6756139B2 (en) * 2002-03-28 2004-06-29 The Regents Of The University Of California Buffer layers on metal alloy substrates for superconducting tapes
US6884527B2 (en) * 2003-07-21 2005-04-26 The Regents Of The University Of California Biaxially textured composite substrates
CN100365740C (zh) * 2006-04-27 2008-01-30 西南交通大学 一种高温超导涂层导体的缓冲层

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0301962B1 (fr) * 1987-07-27 1994-04-20 Sumitomo Electric Industries Limited Film mince supraconducteur of méthode pour fabriquer celui-ci
EP0323345B1 (fr) * 1987-12-25 1995-03-08 Sumitomo Electric Industries Limited Un substrat semi-conducteur avec une couche mince supra-conductrice
US4965244A (en) * 1988-09-19 1990-10-23 Regents Of The University Of Minnesota CaF2 passivation layers for high temperature superconductors

Also Published As

Publication number Publication date
US5135906A (en) 1992-08-04
CA2021821C (fr) 1998-04-14
DE69017112T2 (de) 1995-09-14
JPH0354116A (ja) 1991-03-08
EP0410868A3 (en) 1991-05-29
DE69017112D1 (de) 1995-03-30
EP0410868B1 (fr) 1995-02-22
EP0410868A2 (fr) 1991-01-30

Similar Documents

Publication Publication Date Title
CA2029355A1 (fr) Film mince d'un compose d'oxyde supraconducteur comportant une couche tampon
EP0329400A3 (en) Semiconductor thin film and process for fabricating the same
CA2090312A1 (fr) Outil de coupe revetu d'un substrat obtenu par depot chimique en phase vapeur et par depot physique en phase vapeur
CA2021821A1 (fr) Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe
AU1309388A (en) Process for depositing a superconducting thin film
CA2020302A1 (fr) Substrat enduit d'une pellicule supraconductrice
EP0328757A3 (en) Method for manufacturing thin films from high tc oxide superconductors
CA2062294A1 (fr) Couche mince de supraconducteur a orientations cristallines localement differentes et sa methode de fabrication
AU3425989A (en) Superconducting thin film fabrication
CA2115716A1 (fr) Methode de fabrication de couches minces d'oxydes supraconducteurs configurees
CA2064169A1 (fr) Procede pour l'obtention d'un compose d'oxyde supraconducteur en couche mince
EP0660428A3 (fr) Procédé de fabrication d'une marche sur la surface de dépÔt d'un substrat pour un dispositif supraconducteur comportant un supraconducteur d'oxyde.
EP0319585A4 (fr) Procede de formation de films minces d'oxyde supraconducteur.
AU3389689A (en) Semiconductor substrate having a superconducting thin film, and a process for producing the same
AU606807B2 (en) A superconducting thin film and a process for depositing the same
EP0414205A3 (en) Thin film superconductors, and superconductor devices, and manufacturing methods therefor
HK164695A (en) A semiconductor substrate having a superconducting thin film
AU568474B2 (en) Thin film deposition
AU6964591A (en) Process for producing an aluminum oxide layer on various substrates
CA2103085A1 (fr) Methode de fabrication de couches minces supraconductrices faites d'un oxyde supraconducteur a haute temperature
CA2128311A1 (fr) Procede de fabrication de films de titano-zirconate de plomb
CA2062709A1 (fr) Mince pellicule supraconductrice a au moins une zone isolee supraconductrice formee de matiere d'oxyde supraconductrice et methode de fabrication connexe
AU4086189A (en) Process for preparing a bismuth-type superconducting thin film
CA2212473A1 (fr) Methode pour preparer une structure laminee comprenant un film mince d'oxyde supraconducteur
EP0466607A3 (en) Process for depositing a different thin film on an oxide superconductor

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed