CA2039998A1 - Abrasif de polissage mecano-chimique - Google Patents

Abrasif de polissage mecano-chimique

Info

Publication number
CA2039998A1
CA2039998A1 CA 2039998 CA2039998A CA2039998A1 CA 2039998 A1 CA2039998 A1 CA 2039998A1 CA 2039998 CA2039998 CA 2039998 CA 2039998 A CA2039998 A CA 2039998A CA 2039998 A1 CA2039998 A1 CA 2039998A1
Authority
CA
Canada
Prior art keywords
abrasive
polishing
colloidal silica
mechanical
mechanochemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2039998
Other languages
English (en)
Inventor
Donald C. Zipperian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Buehler Ltd
Original Assignee
Buehler Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Buehler Ltd filed Critical Buehler Ltd
Publication of CA2039998A1 publication Critical patent/CA2039998A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CA 2039998 1990-10-09 1991-04-08 Abrasif de polissage mecano-chimique Abandoned CA2039998A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US59406590A 1990-10-09 1990-10-09
US07/594,065 1990-10-09

Publications (1)

Publication Number Publication Date
CA2039998A1 true CA2039998A1 (fr) 1992-04-10

Family

ID=24377366

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2039998 Abandoned CA2039998A1 (fr) 1990-10-09 1991-04-08 Abrasif de polissage mecano-chimique

Country Status (4)

Country Link
JP (1) JPH05156238A (fr)
CA (1) CA2039998A1 (fr)
DE (1) DE4130316A1 (fr)
FR (1) FR2667606A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018140421A1 (fr) * 2017-01-24 2018-08-02 Corning Incorporated Procédés et appareil de finition de bords de feuilles de verre

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2894209B2 (ja) * 1994-06-03 1999-05-24 信越半導体株式会社 シリコンウェーハ研磨用パッド及び研磨方法
US5693239A (en) * 1995-10-10 1997-12-02 Rodel, Inc. Polishing slurries comprising two abrasive components and methods for their use
JP4113282B2 (ja) * 1998-05-07 2008-07-09 スピードファム株式会社 研磨組成物及びそれを用いたエッジポリッシング方法
JP2000195792A (ja) * 1998-12-25 2000-07-14 Fujitsu Ltd 半導体装置の製造方法
US20060196849A1 (en) * 2005-03-04 2006-09-07 Kevin Moeggenborg Composition and method for polishing a sapphire surface
TWI605112B (zh) 2011-02-21 2017-11-11 Fujimi Inc 研磨用組成物
JP2016094510A (ja) * 2014-11-12 2016-05-26 株式会社フジミインコーポレーテッド 研磨用組成物およびそれを用いた基板の製造方法
JP5997235B2 (ja) * 2014-11-26 2016-09-28 アサヒ化成工業株式会社 複合砥粒とその製造方法と研磨方法と研磨装置
RU2627413C1 (ru) * 2016-07-27 2017-08-08 Станислав Петрович Бишко Абразивный порошок для обработки поверхностей и его применение

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018140421A1 (fr) * 2017-01-24 2018-08-02 Corning Incorporated Procédés et appareil de finition de bords de feuilles de verre

Also Published As

Publication number Publication date
FR2667606A1 (fr) 1992-04-10
JPH05156238A (ja) 1993-06-22
DE4130316A1 (de) 1992-04-16

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Legal Events

Date Code Title Description
FZDE Dead