CA1310469C - Method of selective reduction of halodisilanes with alkyltin hydrides - Google Patents
Method of selective reduction of halodisilanes with alkyltin hydridesInfo
- Publication number
- CA1310469C CA1310469C CA000582749A CA582749A CA1310469C CA 1310469 C CA1310469 C CA 1310469C CA 000582749 A CA000582749 A CA 000582749A CA 582749 A CA582749 A CA 582749A CA 1310469 C CA1310469 C CA 1310469C
- Authority
- CA
- Canada
- Prior art keywords
- silicon
- reduction
- halogen
- halodisilanes
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000009467 reduction Effects 0.000 title claims abstract description 41
- 150000004678 hydrides Chemical class 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 20
- 229910052736 halogen Inorganic materials 0.000 claims description 17
- 150000002367 halogens Chemical class 0.000 claims description 16
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 9
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 125000004432 carbon atom Chemical group C* 0.000 claims description 5
- 229910052801 chlorine Inorganic materials 0.000 claims description 5
- 239000000460 chlorine Substances 0.000 claims description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
- 229910052794 bromium Inorganic materials 0.000 claims description 4
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 3
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 abstract description 9
- 229910008045 Si-Si Inorganic materials 0.000 abstract description 5
- 229910008284 Si—F Inorganic materials 0.000 abstract description 5
- 229910006411 Si—Si Inorganic materials 0.000 abstract description 5
- 150000003254 radicals Chemical class 0.000 abstract description 5
- 239000000543 intermediate Substances 0.000 abstract description 2
- 238000006722 reduction reaction Methods 0.000 description 37
- 238000006243 chemical reaction Methods 0.000 description 28
- 239000000203 mixture Substances 0.000 description 25
- 239000000047 product Substances 0.000 description 14
- LYRCQNDYYRPFMF-UHFFFAOYSA-N trimethyltin Chemical compound C[Sn](C)C LYRCQNDYYRPFMF-UHFFFAOYSA-N 0.000 description 14
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 238000002329 infrared spectrum Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 229910004014 SiF4 Inorganic materials 0.000 description 5
- 239000003638 chemical reducing agent Substances 0.000 description 5
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- MGNHOGAVECORPT-UHFFFAOYSA-N difluorosilicon Chemical group F[Si]F MGNHOGAVECORPT-UHFFFAOYSA-N 0.000 description 4
- 125000005843 halogen group Chemical group 0.000 description 4
- FTYZKCCJUXJFLT-UHFFFAOYSA-N bromosilicon Chemical compound Br[Si] FTYZKCCJUXJFLT-UHFFFAOYSA-N 0.000 description 3
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 3
- 230000007717 exclusion Effects 0.000 description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 239000011253 protective coating Substances 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 125000001424 substituent group Chemical group 0.000 description 3
- 229910004016 SiF2 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 150000001350 alkyl halides Chemical class 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- SIPUZPBQZHNSDW-UHFFFAOYSA-N bis(2-methylpropyl)aluminum Chemical compound CC(C)C[Al]CC(C)C SIPUZPBQZHNSDW-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical class [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000806 fluorine-19 nuclear magnetic resonance spectrum Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000011541 reaction mixture Substances 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000008707 rearrangement Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- KXCAEQNNTZANTK-UHFFFAOYSA-N stannane Chemical class [SnH4] KXCAEQNNTZANTK-UHFFFAOYSA-N 0.000 description 2
- YXFVVABEGXRONW-JGUCLWPXSA-N toluene-d8 Chemical compound [2H]C1=C([2H])C([2H])=C(C([2H])([2H])[2H])C([2H])=C1[2H] YXFVVABEGXRONW-JGUCLWPXSA-N 0.000 description 2
- UKHQRARQNZOXRL-UHFFFAOYSA-N trimethyltin Chemical compound C[SnH](C)C UKHQRARQNZOXRL-UHFFFAOYSA-N 0.000 description 2
- 125000001494 2-propynyl group Chemical group [H]C#CC([H])([H])* 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- 229910003676 SiBr4 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 125000002252 acyl group Chemical group 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 150000001502 aryl halides Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- IQJXMZAPGULHLO-UHFFFAOYSA-N bis(2-methylpropyl)stannane Chemical compound CC(C)C[SnH2]CC(C)C IQJXMZAPGULHLO-UHFFFAOYSA-N 0.000 description 1
- FAOSYNUKPVJLNZ-UHFFFAOYSA-N butylstannane Chemical compound CCCC[SnH3] FAOSYNUKPVJLNZ-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- KWTSZCJMWHGPOS-UHFFFAOYSA-M chloro(trimethyl)stannane Chemical compound C[Sn](C)(C)Cl KWTSZCJMWHGPOS-UHFFFAOYSA-M 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- QXDJFNYEWKDJJA-UHFFFAOYSA-N dimethylstannane Chemical compound C[SnH2]C QXDJFNYEWKDJJA-UHFFFAOYSA-N 0.000 description 1
- IFYGUNVJGWHEBO-UHFFFAOYSA-N dioctylstannane Chemical compound CCCCCCCC[SnH2]CCCCCCCC IFYGUNVJGWHEBO-UHFFFAOYSA-N 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- VWLWPRYRTWZCHJ-UHFFFAOYSA-N fluoro(silyl)silane Chemical compound F[SiH2][SiH3] VWLWPRYRTWZCHJ-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012433 hydrogen halide Substances 0.000 description 1
- 229910000039 hydrogen halide Inorganic materials 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000003586 protic polar solvent Substances 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- AIFMYMZGQVTROK-UHFFFAOYSA-N silicon tetrabromide Chemical compound Br[Si](Br)(Br)Br AIFMYMZGQVTROK-UHFFFAOYSA-N 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- PPDADIYYMSXQJK-UHFFFAOYSA-N trichlorosilicon Chemical compound Cl[Si](Cl)Cl PPDADIYYMSXQJK-UHFFFAOYSA-N 0.000 description 1
- RGUFCXSDKOITOF-UHFFFAOYSA-N tridecylstannane Chemical compound C(CCCCCCCCCCCC)[SnH3] RGUFCXSDKOITOF-UHFFFAOYSA-N 0.000 description 1
- MZGUIAFRJWSYJJ-UHFFFAOYSA-M trimethylstannanylium;bromide Chemical compound C[Sn](C)(C)Br MZGUIAFRJWSYJJ-UHFFFAOYSA-M 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US138,620 | 1987-12-28 | ||
| US07/138,620 US4798713A (en) | 1987-12-28 | 1987-12-28 | Method of selective reduction of halodisilanes with alkyltin hydrides |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1310469C true CA1310469C (en) | 1992-11-24 |
Family
ID=22482852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000582749A Expired - Lifetime CA1310469C (en) | 1987-12-28 | 1988-11-10 | Method of selective reduction of halodisilanes with alkyltin hydrides |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4798713A (OSRAM) |
| EP (1) | EP0323104B1 (OSRAM) |
| JP (1) | JPH01203214A (OSRAM) |
| CA (1) | CA1310469C (OSRAM) |
| DE (1) | DE3871111D1 (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5015624A (en) * | 1990-04-30 | 1991-05-14 | Dow Corning Corporation | Process for reduction of organohalosilanes |
| US12264074B2 (en) * | 2017-06-29 | 2025-04-01 | Nata Semiconductor Materials Co., Ltd. | Synthesis of 1,1,1-trichlorodisilane |
| TWI791547B (zh) * | 2017-07-31 | 2023-02-11 | 中國大陸商南大光電半導體材料有限公司 | 製備五氯二矽烷之方法及包含五氯二矽烷之經純化的反應產物 |
| WO2019067139A1 (en) * | 2017-09-28 | 2019-04-04 | Dow Silicones Corporation | SELECTIVE REDUCTION OF CHLORODISILANES WITH TRI-N-BUTYL HYDRIDE TIN |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3043857A (en) * | 1956-11-03 | 1962-07-10 | Kali Chemie Ag | Preparation of hydrides of the fourth and fifth group elements |
| DE1187614B (de) * | 1963-07-02 | 1965-02-25 | Bayer Ag | Verfahren zur Herstellung von vorzugsweise organisch substituierten Wasserstoffverbindungen der Elemente Bor und Silicium |
| US3439008A (en) * | 1966-03-31 | 1969-04-15 | Gen Electric | Method for making organometallic hydrides |
| JPS5395922A (en) * | 1977-02-02 | 1978-08-22 | Kawaken Fine Chem Co Ltd | Preparation of dialkylchlorosilane |
| JPS60176915A (ja) * | 1984-02-21 | 1985-09-11 | Central Glass Co Ltd | ジシランの製造法 |
| US4617357A (en) * | 1984-09-24 | 1986-10-14 | Ciba-Geigy Corporation | Process for reducing the content of chlorine in glycidyl compounds |
-
1987
- 1987-12-28 US US07/138,620 patent/US4798713A/en not_active Expired - Fee Related
-
1988
- 1988-11-10 CA CA000582749A patent/CA1310469C/en not_active Expired - Lifetime
- 1988-12-19 DE DE8888312028T patent/DE3871111D1/de not_active Expired - Fee Related
- 1988-12-19 EP EP88312028A patent/EP0323104B1/en not_active Expired
- 1988-12-26 JP JP63326385A patent/JPH01203214A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| EP0323104B1 (en) | 1992-05-13 |
| JPH0474287B2 (OSRAM) | 1992-11-25 |
| EP0323104A2 (en) | 1989-07-05 |
| EP0323104A3 (en) | 1990-01-24 |
| US4798713A (en) | 1989-01-17 |
| DE3871111D1 (de) | 1992-06-17 |
| JPH01203214A (ja) | 1989-08-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |