CA1279561C - Solvents pour l'enlevement d'agents photoresistants - Google Patents

Solvents pour l'enlevement d'agents photoresistants

Info

Publication number
CA1279561C
CA1279561C CA000520952A CA520952A CA1279561C CA 1279561 C CA1279561 C CA 1279561C CA 000520952 A CA000520952 A CA 000520952A CA 520952 A CA520952 A CA 520952A CA 1279561 C CA1279561 C CA 1279561C
Authority
CA
Canada
Prior art keywords
water
weight
soluble
agent
propylene glycol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000520952A
Other languages
English (en)
Inventor
Hans-Joachim Merrem
Axel Schmitt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoechst AG
Original Assignee
Hoechst AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst AG filed Critical Hoechst AG
Priority to CA000520952A priority Critical patent/CA1279561C/fr
Application granted granted Critical
Publication of CA1279561C publication Critical patent/CA1279561C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA000520952A 1985-10-22 1986-10-21 Solvents pour l'enlevement d'agents photoresistants Expired - Fee Related CA1279561C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000520952A CA1279561C (fr) 1985-10-22 1986-10-21 Solvents pour l'enlevement d'agents photoresistants

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP3537441.1 1985-10-22
CA000520952A CA1279561C (fr) 1985-10-22 1986-10-21 Solvents pour l'enlevement d'agents photoresistants

Publications (1)

Publication Number Publication Date
CA1279561C true CA1279561C (fr) 1991-01-29

Family

ID=4134184

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000520952A Expired - Fee Related CA1279561C (fr) 1985-10-22 1986-10-21 Solvents pour l'enlevement d'agents photoresistants

Country Status (1)

Country Link
CA (1) CA1279561C (fr)

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