CA1272528A - Pressure control apparatus for use in an integrated circuit testing station - Google Patents

Pressure control apparatus for use in an integrated circuit testing station

Info

Publication number
CA1272528A
CA1272528A CA000545700A CA545700A CA1272528A CA 1272528 A CA1272528 A CA 1272528A CA 000545700 A CA000545700 A CA 000545700A CA 545700 A CA545700 A CA 545700A CA 1272528 A CA1272528 A CA 1272528A
Authority
CA
Canada
Prior art keywords
probe
pressure
pad
support structure
control apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000545700A
Other languages
English (en)
French (fr)
Inventor
Dale R. Rath
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Application granted granted Critical
Publication of CA1272528A publication Critical patent/CA1272528A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
CA000545700A 1986-09-03 1987-08-31 Pressure control apparatus for use in an integrated circuit testing station Expired - Fee Related CA1272528A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US903,356 1986-09-03
US06/903,356 US4758785A (en) 1986-09-03 1986-09-03 Pressure control apparatus for use in an integrated circuit testing station

Publications (1)

Publication Number Publication Date
CA1272528A true CA1272528A (en) 1990-08-07

Family

ID=25417363

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000545700A Expired - Fee Related CA1272528A (en) 1986-09-03 1987-08-31 Pressure control apparatus for use in an integrated circuit testing station

Country Status (5)

Country Link
US (1) US4758785A (enEXAMPLES)
EP (1) EP0259667A3 (enEXAMPLES)
JP (1) JPS6367742A (enEXAMPLES)
KR (1) KR880004321A (enEXAMPLES)
CA (1) CA1272528A (enEXAMPLES)

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US5829128A (en) * 1993-11-16 1998-11-03 Formfactor, Inc. Method of mounting resilient contact structures to semiconductor devices
US4864227A (en) * 1987-02-27 1989-09-05 Canon Kabushiki Kaisha Wafer prober
US4980637A (en) * 1988-03-01 1990-12-25 Hewlett-Packard Company Force delivery system for improved precision membrane probe
US4899099A (en) * 1988-05-19 1990-02-06 Augat Inc. Flex dot wafer probe
US4922192A (en) * 1988-09-06 1990-05-01 Unisys Corporation Elastic membrane probe
US4906920A (en) * 1988-10-11 1990-03-06 Hewlett-Packard Company Self-leveling membrane probe
US4950981A (en) * 1989-04-14 1990-08-21 Tektronix, Inc. Apparatus for testing a circuit board
US5055778A (en) * 1989-10-02 1991-10-08 Nihon Denshizairyo Kabushiki Kaisha Probe card in which contact pressure and relative position of each probe end are correctly maintained
US5012186A (en) * 1990-06-08 1991-04-30 Cascade Microtech, Inc. Electrical probe with contact force protection
US5079501A (en) * 1990-07-10 1992-01-07 The United States Of America As Represented By The Secretary Of The Army Flexible membrane circuit tester
US5072176A (en) * 1990-07-10 1991-12-10 The United States Of America As Represented By The Secretary Of The Army Flexible membrane circuit tester
US5059898A (en) * 1990-08-09 1991-10-22 Tektronix, Inc. Wafer probe with transparent loading member
JP3208734B2 (ja) * 1990-08-20 2001-09-17 東京エレクトロン株式会社 プローブ装置
US5189363A (en) * 1990-09-14 1993-02-23 Ibm Corporation Integrated circuit testing system having a cantilevered contact lead probe pattern mounted on a flexible tape for interconnecting an integrated circuit to a tester
US5521518A (en) * 1990-09-20 1996-05-28 Higgins; H. Dan Probe card apparatus
US5124644A (en) * 1990-12-19 1992-06-23 Vlsi Technology, Inc. System for positioning a semiconductor chip package with respect to a testing device
JPH04330753A (ja) * 1991-01-16 1992-11-18 Tokyo Electron Ltd 半導体検査装置及び半導体検査方法
US5153504A (en) * 1991-04-23 1992-10-06 International Business Machines Corporation Pneumatically actuated hold down gate
US5495179A (en) * 1991-06-04 1996-02-27 Micron Technology, Inc. Carrier having interchangeable substrate used for testing of semiconductor dies
US6313649B2 (en) 1992-06-11 2001-11-06 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5355079A (en) * 1993-01-07 1994-10-11 Wentworth Laboratories, Inc. Probe assembly for testing integrated circuit devices
JPH10505162A (ja) * 1994-09-09 1998-05-19 マイクロモジュール・システムズ 回路のメンブレンプローブ
JPH10506459A (ja) * 1994-09-09 1998-06-23 マイクロモジュール・システムズ 回路のメンブレンプローブ
JP3685498B2 (ja) * 1994-10-28 2005-08-17 カリック アンド ソファ ホウルディングス インコーポレイテッド プログラム可能高密度電子工学試験装置
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5621333A (en) * 1995-05-19 1997-04-15 Microconnect, Inc. Contact device for making connection to an electronic circuit device
US5773987A (en) * 1996-02-26 1998-06-30 Motorola, Inc. Method for probing a semiconductor wafer using a motor controlled scrub process
US6046599A (en) * 1996-05-20 2000-04-04 Microconnect, Inc. Method and device for making connection
US5963027A (en) * 1997-06-06 1999-10-05 Cascade Microtech, Inc. Probe station having environment control chambers with orthogonally flexible lateral wall assembly
US6002263A (en) * 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6034533A (en) 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
US6343369B1 (en) 1998-09-15 2002-01-29 Microconnect, Inc. Methods for making contact device for making connection to an electronic circuit device and methods of using the same
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7009415B2 (en) * 1999-10-06 2006-03-07 Tokyo Electron Limited Probing method and probing apparatus
JP2001110857A (ja) * 1999-10-06 2001-04-20 Tokyo Electron Ltd プローブ方法及びプローブ装置
US6496026B1 (en) 2000-02-25 2002-12-17 Microconnect, Inc. Method of manufacturing and testing an electronic device using a contact device having fingers and a mechanical ground
US7262611B2 (en) * 2000-03-17 2007-08-28 Formfactor, Inc. Apparatuses and methods for planarizing a semiconductor contactor
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US20040169521A1 (en) * 2001-08-02 2004-09-02 Rincon Reynaldo M. High density probe card apparatus and method of manufacture
EP1432546A4 (en) 2001-08-31 2006-06-07 Cascade Microtech Inc OPTICAL TESTING APPARATUS
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
EP1754072A2 (en) 2004-06-07 2007-02-21 CASCADE MICROTECH, INC. (an Oregon corporation) Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
KR101090333B1 (ko) 2009-06-03 2011-12-07 주식회사 쎄믹스 척의 능동적 기울기 제어가 가능한 웨이퍼 프로브 스테이션 및 그 제어방법
WO2010140814A2 (ko) * 2009-06-03 2010-12-09 주식회사 쎄믹스 척의 능동적 기울기 제어가 가능한 웨이퍼 프로브 스테이션 및 그 제어방법
US8963567B2 (en) * 2011-10-31 2015-02-24 International Business Machines Corporation Pressure sensing and control for semiconductor wafer probing
US9435855B2 (en) 2013-11-19 2016-09-06 Teradyne, Inc. Interconnect for transmitting signals between a device and a tester
US9594114B2 (en) 2014-06-26 2017-03-14 Teradyne, Inc. Structure for transmitting signals in an application space between a device under test and test electronics
US9977052B2 (en) 2016-10-04 2018-05-22 Teradyne, Inc. Test fixture
US10677815B2 (en) 2018-06-08 2020-06-09 Teradyne, Inc. Test system having distributed resources
US11363746B2 (en) 2019-09-06 2022-06-14 Teradyne, Inc. EMI shielding for a signal trace
TWI733318B (zh) * 2020-01-22 2021-07-11 台灣福雷電子股份有限公司 壓測機構、測試設備及測試方法
TWI718938B (zh) * 2020-04-20 2021-02-11 中華精測科技股份有限公司 分隔式薄膜探針卡及其彈性模組
TWI719895B (zh) * 2020-05-11 2021-02-21 中華精測科技股份有限公司 陣列式薄膜探針卡及其測試模組
US11862901B2 (en) 2020-12-15 2024-01-02 Teradyne, Inc. Interposer
JP7714392B2 (ja) * 2021-07-01 2025-07-29 株式会社日本マイクロニクス 検査装置、位置調整ユニット及び位置調整方法

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US3936743A (en) * 1974-03-05 1976-02-03 Electroglas, Inc. High speed precision chuck assembly
US3996517A (en) * 1975-12-29 1976-12-07 Monsanto Company Apparatus for wafer probing having surface level sensing
US4328553A (en) * 1976-12-07 1982-05-04 Computervision Corporation Method and apparatus for targetless wafer alignment
US4195259A (en) * 1978-04-04 1980-03-25 Texas Instruments Incorporated Multiprobe test system and method of using same
GB2094479B (en) * 1978-01-30 1983-03-16 Texas Instruments Inc Determining probe contact in testing integrated circuits
US4219771A (en) * 1978-02-21 1980-08-26 Texas Instruments Incorporated Four-quadrant, multiprobe-edge sensor for semiconductor wafer probing
JPS5950942A (ja) * 1982-09-13 1984-03-24 Toyama Keikinzoku Kogyo Kk 印刻模様を有するＡｌ系金属型材の製造設備
US4649339A (en) * 1984-04-25 1987-03-10 Honeywell Inc. Integrated circuit interface

Also Published As

Publication number Publication date
US4758785A (en) 1988-07-19
EP0259667A2 (en) 1988-03-16
EP0259667A3 (en) 1989-10-04
JPS6367742A (ja) 1988-03-26
JPH0345540B2 (enEXAMPLES) 1991-07-11
KR880004321A (ko) 1988-06-03

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