CA1255191A - Process and apparatus for producing semi-conductor foils - Google Patents

Process and apparatus for producing semi-conductor foils

Info

Publication number
CA1255191A
CA1255191A CA000481887A CA481887A CA1255191A CA 1255191 A CA1255191 A CA 1255191A CA 000481887 A CA000481887 A CA 000481887A CA 481887 A CA481887 A CA 481887A CA 1255191 A CA1255191 A CA 1255191A
Authority
CA
Canada
Prior art keywords
molding body
support
conductor
semi
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000481887A
Other languages
English (en)
French (fr)
Inventor
Ingo Schwirtlich
Peter Woditsch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer AG
Original Assignee
Bayer AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6236602&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA1255191(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Bayer AG filed Critical Bayer AG
Application granted granted Critical
Publication of CA1255191A publication Critical patent/CA1255191A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/007—Pulling on a substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/915—Separating from substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Photovoltaic Devices (AREA)
  • Silicon Compounds (AREA)
CA000481887A 1984-05-23 1985-05-21 Process and apparatus for producing semi-conductor foils Expired CA1255191A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP3419137.2 1984-05-23
DE19843419137 DE3419137A1 (de) 1984-05-23 1984-05-23 Verfahren und vorrichtung zur herstellung von halbleiterfolien

Publications (1)

Publication Number Publication Date
CA1255191A true CA1255191A (en) 1989-06-06

Family

ID=6236602

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000481887A Expired CA1255191A (en) 1984-05-23 1985-05-21 Process and apparatus for producing semi-conductor foils

Country Status (9)

Country Link
US (1) US4670096A (US06373033-20020416-M00035.png)
EP (1) EP0165449B2 (US06373033-20020416-M00035.png)
JP (1) JPS60261130A (US06373033-20020416-M00035.png)
AU (1) AU577499B2 (US06373033-20020416-M00035.png)
CA (1) CA1255191A (US06373033-20020416-M00035.png)
DE (2) DE3419137A1 (US06373033-20020416-M00035.png)
ES (1) ES8604323A1 (US06373033-20020416-M00035.png)
GR (1) GR851250B (US06373033-20020416-M00035.png)
ZA (1) ZA853873B (US06373033-20020416-M00035.png)

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DE4102484A1 (de) * 1991-01-29 1992-07-30 Bayer Ag Verfahren zur herstellung von metallscheiben sowie die verwendung von siliciumscheiben
DE19927604A1 (de) 1999-06-17 2000-12-21 Bayer Ag Silicium mit strukturierter Sauerstoffdotierung, dessen Herstellung und Verwendung
DE10047929B4 (de) * 2000-09-27 2013-04-11 Rgs Development B.V. Verfahren und Vorrichtung zur Herstellung von Halbleiter- und Metallscheiben oder -folien
NL1026043C2 (nl) * 2004-04-26 2005-10-27 Stichting Energie Werkwijze en inrichting voor het fabriceren van metalen folies.
US7465351B2 (en) * 2004-06-18 2008-12-16 Memc Electronic Materials, Inc. Melter assembly and method for charging a crystal forming apparatus with molten source material
US7691199B2 (en) * 2004-06-18 2010-04-06 Memc Electronic Materials, Inc. Melter assembly and method for charging a crystal forming apparatus with molten source material
US7344594B2 (en) * 2004-06-18 2008-03-18 Memc Electronic Materials, Inc. Melter assembly and method for charging a crystal forming apparatus with molten source material
US7569462B2 (en) * 2006-12-13 2009-08-04 Applied Materials, Inc. Directional crystallization of silicon sheets using rapid thermal processing
US20100314804A1 (en) * 2007-08-31 2010-12-16 Antonio Vallera Method for the production of semiconductor ribbons from a gaseous feedstock
FR2931297B1 (fr) * 2008-05-16 2010-08-27 Commissariat Energie Atomique Film autosupporte et plaquette en silicium obtenue par frittage
US20090289390A1 (en) * 2008-05-23 2009-11-26 Rec Silicon, Inc. Direct silicon or reactive metal casting
US20100047148A1 (en) * 2008-05-23 2010-02-25 Rec Silicon, Inc. Skull reactor
JP5715579B2 (ja) * 2009-03-09 2015-05-07 １３６６ テクノロジーズ インク． 薄い半導体本体を溶融物質から作成するための方法及び装置
US9012766B2 (en) 2009-11-12 2015-04-21 Silevo, Inc. Aluminum grid as backside conductor on epitaxial silicon thin film solar cells
US9214576B2 (en) 2010-06-09 2015-12-15 Solarcity Corporation Transparent conducting oxide for photovoltaic devices
US20110303290A1 (en) * 2010-06-14 2011-12-15 Korea Institute Of Energy Research Method and apparatus for manufacturing silicon substrate with excellent surface quality using inert gas blowing
US20110305891A1 (en) * 2010-06-14 2011-12-15 Korea Institute Of Energy Research Method and apparatus for manufacturing silicon substrate with excellent productivity and surface quality using continuous casting
US9773928B2 (en) 2010-09-10 2017-09-26 Tesla, Inc. Solar cell with electroplated metal grid
US9800053B2 (en) 2010-10-08 2017-10-24 Tesla, Inc. Solar panels with integrated cell-level MPPT devices
US9096946B2 (en) * 2011-05-12 2015-08-04 Korea Institute Of Energy Research Reusable dual crucible for silicon melting and manufacturing apparatus of silicon slim plate including the same
US9054256B2 (en) 2011-06-02 2015-06-09 Solarcity Corporation Tunneling-junction solar cell with copper grid for concentrated photovoltaic application
FR2985524B1 (fr) 2012-01-09 2014-03-07 Commissariat Energie Atomique Procede de preparation de silicium a l'etat solide
WO2014055781A1 (en) 2012-10-04 2014-04-10 Silevo, Inc. Photovoltaic devices with electroplated metal grids
US9865754B2 (en) 2012-10-10 2018-01-09 Tesla, Inc. Hole collectors for silicon photovoltaic cells
US9281436B2 (en) 2012-12-28 2016-03-08 Solarcity Corporation Radio-frequency sputtering system with rotary target for fabricating solar cells
US9219174B2 (en) 2013-01-11 2015-12-22 Solarcity Corporation Module fabrication of solar cells with low resistivity electrodes
US9412884B2 (en) 2013-01-11 2016-08-09 Solarcity Corporation Module fabrication of solar cells with low resistivity electrodes
US9624595B2 (en) 2013-05-24 2017-04-18 Solarcity Corporation Electroplating apparatus with improved throughput
US10309012B2 (en) 2014-07-03 2019-06-04 Tesla, Inc. Wafer carrier for reducing contamination from carbon particles and outgassing
FR3025222A1 (fr) 2014-09-01 2016-03-04 Guy Baret Procede de fabrication d'un subrat de silicium
US9899546B2 (en) 2014-12-05 2018-02-20 Tesla, Inc. Photovoltaic cells with electrodes adapted to house conductive paste
US9947822B2 (en) 2015-02-02 2018-04-17 Tesla, Inc. Bifacial photovoltaic module using heterojunction solar cells
US9761744B2 (en) 2015-10-22 2017-09-12 Tesla, Inc. System and method for manufacturing photovoltaic structures with a metal seed layer
US9842956B2 (en) 2015-12-21 2017-12-12 Tesla, Inc. System and method for mass-production of high-efficiency photovoltaic structures
US9496429B1 (en) 2015-12-30 2016-11-15 Solarcity Corporation System and method for tin plating metal electrodes
US10115838B2 (en) 2016-04-19 2018-10-30 Tesla, Inc. Photovoltaic structures with interlocking busbars
US10672919B2 (en) 2017-09-19 2020-06-02 Tesla, Inc. Moisture-resistant solar cells for solar roof tiles
US11190128B2 (en) 2018-02-27 2021-11-30 Tesla, Inc. Parallel-connected solar roof tile modules
JP6585799B1 (ja) * 2018-10-15 2019-10-02 昭和電工株式会社 ＳｉＣ基板の評価方法及びＳｉＣエピタキシャルウェハの製造方法
NL2027980B1 (en) 2021-04-15 2022-10-25 E Magy B V Nano-structured carbon coated silicon material and manufacturing method for use in lithium ion based secondary batteries

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JPS52106673A (en) * 1976-03-04 1977-09-07 Matsushita Electric Ind Co Ltd Crystal growing method and device thereof
JPS5384457A (en) * 1976-12-29 1978-07-25 Fujitsu Ltd Liquid-phase epitaxial growth method
JPS5919916B2 (ja) * 1977-06-22 1984-05-09 富士通株式会社 液相エピタキシヤル成長法
FR2401696A1 (fr) * 1977-08-31 1979-03-30 Ugine Kuhlmann Methode de depot de silicium cristallin en films minces sur substrats graphites
DE2817285A1 (de) * 1978-04-20 1979-10-31 Erwin Prof Dr Schopper Verfahren zur herstellung grossflaechiger, monokristalliner folien
DE2952620C2 (de) * 1979-01-02 1984-07-05 Allied Corp., Morris Township, N.J. Vorrichtung zum Stranggießen glasartiger Metallegierungs-Fäden
DE2927086A1 (de) * 1979-07-04 1981-01-22 Siemens Ag Verfahren zum herstellen von platten- oder bandfoermigen siliziumkristallkoerpern mit einer der kolumnarstruktur gleichwertigen saeulenstruktur fuer solarzellen
US4323419A (en) * 1980-05-08 1982-04-06 Atlantic Richfield Company Method for ribbon solar cell fabrication
US4484614A (en) * 1980-05-09 1984-11-27 Allegheny Ludlum Steel Corporation Method of and apparatus for strip casting
DE3231326A1 (de) * 1982-08-23 1984-02-23 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum herstellen von grossflaechigen, bandfoermigen siliziumkoerpern fuer solarzellen
US4468281A (en) * 1982-12-27 1984-08-28 Atlantic Richfield Company Silicon ribbon growth wheel and method for heat flow control therein
US4468280A (en) * 1982-12-27 1984-08-28 Atlantic Richfield Company Silicon ribbon growth wheel and method for surface temperature profiling thereof

Also Published As

Publication number Publication date
JPS60261130A (ja) 1985-12-24
ZA853873B (en) 1986-01-29
DE3564455D1 (en) 1988-09-22
GR851250B (US06373033-20020416-M00035.png) 1985-11-25
DE3419137A1 (de) 1985-11-28
JPH0347572B2 (US06373033-20020416-M00035.png) 1991-07-19
ES543388A0 (es) 1986-01-16
AU4272385A (en) 1985-11-28
AU577499B2 (en) 1988-09-22
US4670096A (en) 1987-06-02
ES8604323A1 (es) 1986-01-16
EP0165449B2 (de) 1992-02-19
EP0165449B1 (de) 1988-08-17
EP0165449A1 (de) 1985-12-27

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