CA1212469A - Method of manufacturing magnetic thin film transducer head - Google Patents

Method of manufacturing magnetic thin film transducer head

Info

Publication number
CA1212469A
CA1212469A CA000439505A CA439505A CA1212469A CA 1212469 A CA1212469 A CA 1212469A CA 000439505 A CA000439505 A CA 000439505A CA 439505 A CA439505 A CA 439505A CA 1212469 A CA1212469 A CA 1212469A
Authority
CA
Canada
Prior art keywords
magnetic
transducer head
thin film
protecting
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000439505A
Other languages
French (fr)
Inventor
Hideo Suyama
Shigeyoshi Imakoshi
Yutaka Souda
Tetsuo Sekiya
Hiroyuki Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of CA1212469A publication Critical patent/CA1212469A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

ABSTRACT OF THE DISCLOSURE

A method of manufacturing a magnetic thin film transducer head in which after a protecting layer formed on a magnetic thin film transducer head element on a substrate is made flat, a protecting plate is bonded onto the protecting layer.

Description

Field of the Invention The present invention relates generally -to a method of manufacturing a magnetic thin film transducer head, for example, a magneto resistance effect type magnetic transducer head utilizing a. magneto resistance effect in which a pro-tooting plate is bonded to a magnetic transducer head element portion with a protecting layer there between. More portico-laxly, this invention is to prevent a bonding layer, which is used to bond the protesting plate to the protecting layer thereby, from being dropped out or peeled off and to prevent a spacing loss from being caused thereby.
Description of the prior art A magneto resistance effect type magnetic transducer head is proposed which reproduces a magnetic recording medium by utilizing a magneto resistance effect. As compared with an electromagnet induction type magnetic reproducing transducer head, this magneto resistance effect type magnetic transducer head has advantages that it is capable of no-producing a magnetic signal in narrow track width of short wavelength or with ultra-slow speed. And, as the magneto-resistance effect type magnetic transducer head, there is proposed a so-called rear type one in which a magnetoresis~
lance effect element is placed at the rear of a tape contact surface. In the magne~oxesistance effect type magnetic I transducer head of rear type, since a step or a projection is formed on the surface of the protecting layer/ practical-lye insulating layer which is coated on the magnetoresis-I. .,
- 2 - .

Lo lance effect element, a spacing loss is caused and the reliability of the magnetic transducer head is lowered.
A preferred embodiment of the invention will be described with reference to the accompanying drawings in which:
Fig. 1 is an oblique view of a prior art magneto-resistance effect magnetic transducer.
Figs. 2 and 3 are sections, in side and plan views, respectively, of the prior art magnetic transducer shown in-Fig. 1.
Fig. 4 and Fig. 6 (appearing with Fig. I are sectional views of the present invention.
Fig. 5, appearing with Fig. 1, is a further sectional view of the present invention.
The above facts will be considered with reference to an example shown in Figs. 1 to 3.
As schematically shown in Fig. 1, the magnetoresis-lance effect type magnetic transducer head of rear type is formed such that on a ferrite substrate 1 made of Nissan ferrite or the like are sequentially deposited a bias conductor 2 9 a magneto resistance effect film 3 and a core magnetic member 4 in this order to thereby form a magnetic transducer head element portion which includes a thin film magnetic circuit. In Fig. 1 an insulating layer and so on are omitted and hence not shown. The magneto resistance effect film 3 is made of alloy containing mainly Nephew, alloy containing mainly Nikko or the like. It is formed at the position backward from a tape corltact surface lo by approximately 10 my The shape thereof is of a U-letter and the width thereof is selected to be approximately from 5 to 10 em. Thy core magnetic member 4 is formed of S an amorphous film or the like made of permalloy~ molybdenum permalloy, sendu~t, Con Fe-B and so on and is extended from the tape contact surface lo side to the backside 50 - as to bridge over the magneto resistance effect film 3.
The core magnetic member 4 is cut away on the portion corresponding to the magneto resistance effect film 3 go what the magnetic flux which passes through the magnetic --circuit formed of the core magnetic member 4 and the ferrite substrate 1 is allowed to pass through the magneto resistance effect film 3. Of course, at the tape contact surface lo side, a magnetic-gap is formed between the ferrite substrate 1 and the core magnetic member 4.
In this case, it is possible that the bias conductor 2 is omitted but the sol f-biasing is employed .
When such magneto resistance effect type magnetic transducer head of rear type is manufactured, a thin film forming technique it employed as will be clear from the above. Namely, as shown in Figs 2 and 3, first, the ferrite substrate 1 is prepared and then thy bias conductor 2 is deposited thereon. When a ferrite substrate made of good conductor such as Mn-Zn ferrite or Thea like is used as thy ferrite substrate 1, it is Nasser to previously coat an insulating layer on the ferrite subs rat 1. On the bias conductor 2 is deposited an insulating layer 5 and on this ins tying layer 5 it do tied ye mahogany resistance effect film 3.. On this magneto resistance e:Efec~
film 3 is further depot tied is insulating layer I In tlli5 case, in order to r!dllce the magnetic resistance ox ye magnetic circuit, a contact window pa its wormed through the in slating layer 6. After that, the core magnetic member 4 is deposited. Thor and then an ins-feting layer (protecting layer 7 it further deputed on the core magnetic member 4. And, on this irlsulating layer 7 it; bonded a protecting plate 8 which it made of a glass plate or a ceramic plate. This Bedouin is cried out by the use of epoxy or glass adhesive gent. Namely, a bonding layer 9 is interposed there between.
With such configuration, due to the construction of thy magnetic circuit, on the upper surface of the upper-most insulating layer 7 therm is formed a step portion in the order of em. Thus in the vicinity of the skirt portion of the step portion including the tape enact surface lay the thickness of the bonding layer 9 it increased. As a result the spacing loss it caused and thereby the reproducing resolution is deteriorated and the Allah running of thy- acetic recording medium or tape is disturbed by such transducer head Moreover, at the skirt portion of thy above to partial holes are produced in the bonding layer 9 and whereby the bonding layer 9 -peeled of. Thus, the m~gn~tie transducer head 15 partially worn out by the tape so aye oh@ reliability of the antic transducer head it lowered. FurthenrDre, hen a rosin adhesive is used as the bonding layer 9, owing I the thicken of the bonding layer 9 the resin adhesive is e~cucled out and thereby clogging or the like it caused.
Object of the invention In it of such aspect, this inventiorl ii to preread a method of manufacturing a magnetic thin film transducer head which can prevent the bonding layer from being peeled off to thereby improve the reliability of the magnetic transducer head and which swan remove a spacing loss to thereby ensure the superior resolution and the table running of a tape.
summary of the invention According Jo a method of manufacturing a magnetic thin film transducer head of the present invention, before a protecting plate it bonded through a protecting _ layer on a magnetic transducer head element portion, the protecting layer is made flat.
According Jo this manufacturing method, the stop portion of the protesting layer can by removed so that a bonding layer can be selectee thin to thereby prevent the bonding layer from being peeled off and a spacing loss from being caused.
More particularly, there is provided:-A method for manufacturing a thin film type magnetic transducer head comprising the steps of:
forming a magnetic transducer head element portion which includes a thin film magnetic core on a substrate to form a magnetic circuit hiving a magnetic gap at a gap portion thereof, and having a projection portion, forming a protecting layer on said magnetic transducer head element portion, removing a part of said protecting layer over said projection portion to make said protect-in portion flat, bonding a protecting plate onto said protecting portion, and polishing thus bonded body to form a contact surface, having said magnetic gap for contact with-a traveling magnetic recording medium.
Description of the preferred embodiment An embodiment of this invention will herein after be described with reference to Figs 4 to 6. In these figures, like parts corresponding to those of Figs. 1 to 3 are marked with the same references and will not be described in detail.
In this embodiment, as shown in Fig. 4, the ferrite substrate 1 is prepared and thereon successively deposited are the bias conductor 2, the insulating layer 5, the magneto resistance effect film 3, the insulating layer 6, - pa -the core magnetic member 4 and -the insulating layer 7 in this order to form the magnetic transducer head element portion which includes -the thin film magnetic circuit.
This process is the same as that described in connection with Figs. 2 and 3. In this embodiment, after that, the uppermost insulating layer 7 is made flat Asian by a broken line in Fig. 4. The flattening of the insulating layer 7 can be carried out by ion etching or lapping.
When the ion etching is carried out, the masking is carried I out so as to expose the step portion of the insulating layer 7 and thereafter, the ion etching is carried out.
When the lapping is carried out, there is a fear that an electrode portion 10 shown in Fig. 5 may be scratched or broken. Therefore after a protecting layer 11 is coated on the electrode portion 10, the lapping is carried out. The protecting layer 11, after being lapped, is removed by a chemical method. In this case, the insulating layer 7 and the electrode portion 10 are protected from being corroded or damaged.
After the step portion of the insulating layer 7 was flattened as described above, as shown in Fig. 6, the protecting plate 8 is bonded to the insulating layer 7 through the bonding layer 9. In this case, since the upper surface of the insulating layer 7 is made flat, the thickness of the bonding layer 9 can be selected thin.
As a result, the spacing loss can be removed and the bonding layer 9 can be prevented from being peeled off.
While the above embodiment of the present invention is a case to manufacture the magneto resistance effect type magnetic transducer head used in the thin film magnetic reproducing transducer head, the present invention can be applied to a case to manufacture a thin film magnetic recording transducer head Effect of the invention As described above, according to the present invention, before the protecting plate is bonded to the upper portion of the magnetic transducer head element portion through the protecting layer, the protecting layer is made flat so that -the thickness of the adhesive agent which bonds the protecting plate to the protecting layer can be reduced. As a result, the spacing loss can be removed and the superior resolution and the stable running of the tape can ye ensured. Moreover, since the bonding layer is never peeled off, the partially worn out of the magnetic transducer head and so on can be avoided, and the reliability of the magnetic transducer head can be improved. Furthermore, even when the resin adhesive agent is employed, the adhesive agent can be prevented from being exuded and hence the clogging or the like can be avoided.
Brief Description of the Drawings Fig. 1 is a perspective view schematically illustrating an example of a magnetic thin film transducer head, Fig. 2 is a cross-sectional view used -to explain the manufacturing process of the magnetic thin film transducer head shown in Fig. 1, Fig. 3 is a plan view used in the same way, and Figs. 4 to 6 are respectively cross-sectional views used to explain an embodiment of the method according to this invention.
Reference numeral 1 represents the ferrite substrate, 3 the magnetoxesistance effect film, 4 the acre magnetic member 7 the insulating layer, 8 the protecting plate, 9 the bonding layer and g the magnetic gap.

,,

Claims (2)

THE EMBODIMENTS OF THE INVENTION IN WHICH AN EXCLU-SIVE PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. A method for manufacturing a thin film type magnetic transducer head comprising the steps of:
forming a magnetic transducer head element portion which includes a thin film magnetic core on a substrate to form a magnetic circuit having a magnetic gap at a gap portion thereof, and having a projection portion, forming a protecting layer on said magnetic trans-ducer head element portion, removing a part of said protecting layer over said projection portion to make said protecting portion flat, bonding a protecting plate onto said protecting portion, and polishing thus bonded body to form a contact sur-face, having said magnetic gap, for contact with a travel-ling magnetic recording medium.
2. A method of manufacturing a magnetic thin film transducer head according to claim 1, wherein said thin film magnetic circuit includes a magnetoresistance effect element.
CA000439505A 1982-10-25 1983-10-21 Method of manufacturing magnetic thin film transducer head Expired CA1212469A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP57187074A JPS5977617A (en) 1982-10-25 1982-10-25 Production of thin film magnetic head
JP187074/82 1982-10-25

Publications (1)

Publication Number Publication Date
CA1212469A true CA1212469A (en) 1986-10-07

Family

ID=16199676

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000439505A Expired CA1212469A (en) 1982-10-25 1983-10-21 Method of manufacturing magnetic thin film transducer head

Country Status (7)

Country Link
JP (1) JPS5977617A (en)
KR (1) KR840006861A (en)
CA (1) CA1212469A (en)
DE (1) DE3338719A1 (en)
FR (1) FR2535098A1 (en)
GB (1) GB2129600A (en)
NL (1) NL8303677A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0760490B2 (en) * 1983-08-29 1995-06-28 ソニー株式会社 Method for manufacturing multi-element thin film magnetic head
JPS61107520A (en) * 1984-10-31 1986-05-26 Sony Corp Multi-channel magnetoresistance effect type magnetic head

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2075466A5 (en) * 1970-01-29 1971-10-08 Ibm
FR2191186B1 (en) * 1972-07-03 1976-01-16 Inf Ci Interna Fr
DE2344561C3 (en) * 1973-09-04 1978-08-31 Siemens Ag, 1000 Berlin Und 8000 Muenchen Low-wear magnetic head
GB1518515A (en) * 1974-08-20 1978-07-19 Matsushita Electric Ind Co Ltd Magnetic heads
US4065797A (en) * 1974-12-20 1977-12-27 Matsushita Electric Industrial Co., Ltd. Multi-element magnetic head
JPS54104812A (en) * 1978-02-03 1979-08-17 Matsushita Electric Ind Co Ltd Thin film magnetic head and production of the same
JPS55135321A (en) * 1979-04-10 1980-10-22 Fujitsu Ltd Manufacture of thin-film magnetic head
NL7908611A (en) * 1979-11-28 1981-07-01 Philips Nv INTEGRATED MAGNETIC HEAD CONSTRUCTION.

Also Published As

Publication number Publication date
GB2129600A (en) 1984-05-16
GB8328339D0 (en) 1983-11-23
DE3338719A1 (en) 1984-04-26
KR840006861A (en) 1984-12-03
JPS5977617A (en) 1984-05-04
NL8303677A (en) 1984-05-16
FR2535098A1 (en) 1984-04-27

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