CA1182930A - Field effect transistor with a high cut-off frequency - Google Patents

Field effect transistor with a high cut-off frequency

Info

Publication number
CA1182930A
CA1182930A CA000387748A CA387748A CA1182930A CA 1182930 A CA1182930 A CA 1182930A CA 000387748 A CA000387748 A CA 000387748A CA 387748 A CA387748 A CA 387748A CA 1182930 A CA1182930 A CA 1182930A
Authority
CA
Canada
Prior art keywords
layer
semiconductor
field effect
effect transistor
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000387748A
Other languages
English (en)
French (fr)
Inventor
Daniel Delagebeaudeuf
Trong L. Nuyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Application granted granted Critical
Publication of CA1182930A publication Critical patent/CA1182930A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82—Heterojunctions
    • H10D62/824—Heterojunctions comprising only Group III-V materials heterojunctions, e.g. GaN/AlGaN heterojunctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/473—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT
    • H10D30/4732—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT using Group III-V semiconductor material
    • H10D30/4738—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT using Group III-V semiconductor material having multiple donor layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
    • H10D30/4755—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Bipolar Transistors (AREA)
CA000387748A 1980-10-14 1981-10-13 Field effect transistor with a high cut-off frequency Expired CA1182930A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8021942A FR2492167A1 (fr) 1980-10-14 1980-10-14 Transistor a effet de champ a frequence de coupure elevee
FR8021942 1980-10-14

Publications (1)

Publication Number Publication Date
CA1182930A true CA1182930A (en) 1985-02-19

Family

ID=9246865

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000387748A Expired CA1182930A (en) 1980-10-14 1981-10-13 Field effect transistor with a high cut-off frequency

Country Status (5)

Country Link
EP (1) EP0050064B1 (enrdf_load_stackoverflow)
JP (1) JPS5795672A (enrdf_load_stackoverflow)
CA (1) CA1182930A (enrdf_load_stackoverflow)
DE (1) DE3170300D1 (enrdf_load_stackoverflow)
FR (1) FR2492167A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170230A (en) * 1989-05-10 1992-12-08 Fujitsu Limited Semiconductor device and production method thereof

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913376A (ja) * 1982-07-13 1984-01-24 Nippon Telegr & Teleph Corp <Ntt> ヘテロ接合を有する半導体薄膜
FR2537781B1 (fr) * 1982-12-14 1986-05-30 Thomson Csf Transistor a effet de champ, fonctionnant en regime d'accumulation par gaz d'electrons
JPS6052060A (ja) * 1983-08-31 1985-03-23 Masataka Inoue 電界効果トランジスタ
JPS60113475A (ja) * 1983-11-24 1985-06-19 Fujitsu Ltd 半導体装置
JPH07120790B2 (ja) * 1984-06-18 1995-12-20 株式会社日立製作所 半導体装置
GB2166286B (en) * 1984-10-26 1988-07-20 Stc Plc Photo-detectors
JPS61107758A (ja) * 1984-10-31 1986-05-26 Fujitsu Ltd ＧａＡｓ集積回路及びその製造方法
JPH0714056B2 (ja) * 1985-04-05 1995-02-15 日本電気株式会社 半導体装置
JPH0216102Y2 (enrdf_load_stackoverflow) * 1985-05-17 1990-05-01
JPS62145779A (ja) * 1985-12-19 1987-06-29 Sumitomo Electric Ind Ltd 電界効果トランジスタ
JPS6328072A (ja) 1986-07-21 1988-02-05 Sumitomo Electric Ind Ltd 電界効果トランジスタ
EP0264932A1 (en) * 1986-10-24 1988-04-27 Sumitomo Electric Industries Limited Field effect transistor
US4839702A (en) * 1987-11-20 1989-06-13 Bell Communications Research, Inc. Semiconductor device based on charge emission from a quantum well

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4160261A (en) * 1978-01-13 1979-07-03 Bell Telephone Laboratories, Incorporated Mis heterojunction structures
US4163237A (en) * 1978-04-24 1979-07-31 Bell Telephone Laboratories, Incorporated High mobility multilayered heterojunction devices employing modulated doping
FR2465318A1 (fr) * 1979-09-10 1981-03-20 Thomson Csf Transistor a effet de champ a frequence de coupure elevee
JPS577165A (en) * 1980-06-17 1982-01-14 Fujitsu Ltd Semiconductor device
CA1145482A (en) * 1979-12-28 1983-04-26 Takashi Mimura High electron mobility single heterojunction semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170230A (en) * 1989-05-10 1992-12-08 Fujitsu Limited Semiconductor device and production method thereof

Also Published As

Publication number Publication date
JPS5795672A (en) 1982-06-14
EP0050064B1 (fr) 1985-05-02
FR2492167B1 (enrdf_load_stackoverflow) 1984-02-17
EP0050064A3 (en) 1982-05-05
EP0050064A2 (fr) 1982-04-21
FR2492167A1 (fr) 1982-04-16
DE3170300D1 (en) 1985-06-05

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