CA1146771A - Direction sensitive flow velocity meter and sensing plate to be used on it - Google Patents
Direction sensitive flow velocity meter and sensing plate to be used on itInfo
- Publication number
- CA1146771A CA1146771A CA000355634A CA355634A CA1146771A CA 1146771 A CA1146771 A CA 1146771A CA 000355634 A CA000355634 A CA 000355634A CA 355634 A CA355634 A CA 355634A CA 1146771 A CA1146771 A CA 1146771A
- Authority
- CA
- Canada
- Prior art keywords
- fluid
- temperature
- plate
- strips
- sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 56
- 238000010438 heat treatment Methods 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 230000006872 improvement Effects 0.000 claims 9
- 239000007788 liquid Substances 0.000 abstract description 2
- 238000011144 upstream manufacturing Methods 0.000 description 11
- 238000010276 construction Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 230000005678 Seebeck effect Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 for instance Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229960001866 silicon dioxide Drugs 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL79.05356 | 1979-07-09 | ||
| NLAANVRAGE7905356,A NL177629C (nl) | 1979-07-09 | 1979-07-09 | Richtingsgevoelige stroomsnelheidsmeter. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1146771A true CA1146771A (en) | 1983-05-24 |
Family
ID=19833516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000355634A Expired CA1146771A (en) | 1979-07-09 | 1980-07-07 | Direction sensitive flow velocity meter and sensing plate to be used on it |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4373386A (OSRAM) |
| JP (1) | JPS5710459A (OSRAM) |
| CA (1) | CA1146771A (OSRAM) |
| DE (1) | DE3025720A1 (OSRAM) |
| FR (1) | FR2468912A1 (OSRAM) |
| GB (1) | GB2053491A (OSRAM) |
| NL (1) | NL177629C (OSRAM) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2138566B (en) * | 1983-04-15 | 1987-01-28 | Standard Telephones Cables Ltd | Thermal mass flow sensor for fluids |
| JPS604815A (ja) * | 1983-06-23 | 1985-01-11 | Nippon Soken Inc | 流量測定装置 |
| US4576050A (en) * | 1984-08-29 | 1986-03-18 | General Motors Corporation | Thermal diffusion fluid flow sensor |
| US4713970A (en) * | 1984-08-29 | 1987-12-22 | General Motors Corporation | Thermal diffusion fluid flow sensor |
| US4561303A (en) * | 1984-12-06 | 1985-12-31 | Ford Motor Company | Mass airflow sensor with backflow detection |
| NL8702229A (nl) * | 1987-09-18 | 1989-04-17 | Bronkhorst High Tech Bv | Richtingsgevoelige stroomsnelheidsmeter. |
| JPH0663799B2 (ja) * | 1987-10-05 | 1994-08-22 | 株式会社村田製作所 | 熱型流量検出装置 |
| NL8901602A (nl) * | 1989-06-23 | 1991-01-16 | Bronkhorst High Tech Bv | Geintegreerde halfgeleider-schakeling voor thermische metingen. |
| US5233868A (en) * | 1992-04-13 | 1993-08-10 | Coats Montgomery R | Non-intrusive mass flow measuring apparatus and method |
| JP3203788B2 (ja) * | 1992-07-24 | 2001-08-27 | オムロン株式会社 | 物理量センサ及びその製造方法 |
| JP2948040B2 (ja) * | 1993-01-12 | 1999-09-13 | 株式会社日立製作所 | 発熱抵抗式空気流量計 |
| NL1000454C2 (nl) * | 1995-05-30 | 1996-12-03 | Mierij Meteo Bv | Inrichting voor het bepalen van de richting en snelheid van een luchtstroom. |
| CH695166A5 (de) * | 2000-04-25 | 2005-12-30 | Sensirion Ag | Verfahren und Vorrichtung zum Messen des Flusses einer Flüssigkeit. |
| EP1426740B1 (de) * | 2002-11-27 | 2014-11-19 | Sensirion Holding AG | Vorrichtung zur Messung des Flusses und mindestens eines Materialparameters eines Fluids |
| KR100713978B1 (ko) * | 2003-02-03 | 2007-05-04 | 인디안 인스티투트 오브 싸이언스 | 가스 흐름 속도의 측정 방법, 고체 물질 위의 가스 흐름을이용한 에너지 전환 방법, 및 그에 관한 장치 |
| NL1025617C2 (nl) * | 2003-05-13 | 2004-11-18 | Berkin Bv | Massadebietmeter. |
| EP1840535B1 (en) * | 2006-03-31 | 2011-01-12 | Sensirion Holding AG | Flow sensor with thermocouples |
| US20090084177A1 (en) * | 2007-09-27 | 2009-04-02 | Ao Xiaolei S | Thermal flow measurement system and method |
| EP2175246B1 (en) | 2008-10-09 | 2017-07-19 | Sensirion AG | A method for measuring a fluid composition parameter by means of a flow sensor |
| EP2204555B1 (en) * | 2009-01-02 | 2011-08-03 | Sensirion AG | Ammonia storage system |
| US7874207B2 (en) * | 2009-01-29 | 2011-01-25 | Intrinsic Minds, Llc | Fluid flow direction detection |
| CN115327167B (zh) * | 2021-04-25 | 2025-06-27 | 泰科电子(上海)有限公司 | 速度传感器 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1996943A (en) * | 1929-12-19 | 1935-04-09 | Detroit Lubricator Co | Fluid measuring device |
| US2255771A (en) * | 1937-01-27 | 1941-09-16 | Marcel J E Golay | Fluid flow meter |
| US2496339A (en) * | 1945-11-15 | 1950-02-07 | Liquidometer Corp | Wind direction indicator |
| GB601298A (en) | 1945-11-27 | 1948-05-03 | British Insulated Callenders | An improved arrangement for detecting flow, and the direction of flow of fluid in electric cables and pipe lines |
| US2546822A (en) * | 1948-11-15 | 1951-03-27 | Products Mfg Co Inc | Combination roller toy |
| US2786354A (en) * | 1950-01-07 | 1957-03-26 | Gen Motors Corp | Thermal type flowmeter |
| US2745283A (en) * | 1950-01-23 | 1956-05-15 | Hastings Instr Company Inc | Temperature change compensated thermal measuring device |
| US2647401A (en) * | 1950-04-11 | 1953-08-04 | Claude M Hathaway | Thermal flowmeter |
| BE518110A (OSRAM) | 1952-03-05 | |||
| GB767569A (en) | 1953-09-08 | 1957-02-06 | Nat Res Dev | Apparatus for measuring the rate of flow of a fluid |
| US3075515A (en) * | 1958-10-17 | 1963-01-29 | Albert M Richards | Blood flow meter |
| US3030806A (en) * | 1959-06-08 | 1962-04-24 | Davis Merlin | Seebeck-peltier flowmeter |
| GB1072514A (en) | 1963-08-19 | 1967-06-21 | Heinz Frank Poppendiek | Means and techniques useful in fluid flow determinations |
| GB1095476A (OSRAM) | 1963-10-17 | 1900-01-01 | ||
| US3945855A (en) * | 1965-11-24 | 1976-03-23 | Teledyne, Inc. | Thermoelectric device including an alloy of GeTe and AgSbTe as the P-type element |
| GB1193973A (en) * | 1966-11-02 | 1970-06-03 | Graviner Colnbrook Ltd | Improvements in Apparatus Responsive to Fluid Flow |
| GB1116178A (en) | 1966-11-18 | 1968-06-06 | Standard Telephones Cables Ltd | A fluid flowmeter |
| GB1230638A (OSRAM) | 1968-06-08 | 1971-05-05 | ||
| US3592055A (en) * | 1969-02-12 | 1971-07-13 | Thermo Systems Inc | Directional sensor |
| US3732729A (en) * | 1971-08-19 | 1973-05-15 | N Greene | Speed sensor |
| SE391036B (sv) * | 1973-12-03 | 1977-01-31 | Elektronik Konstruktions Ab | Anordning for metning och/eller overvakning av ett strommande mediums stromningshastighet |
| US3996799A (en) * | 1975-09-29 | 1976-12-14 | Putten Antonius Ferdinandus Pe | Device for measuring the flow velocity of a medium |
| NL7609696A (en) * | 1976-08-31 | 1978-03-02 | Brooks Instr Nederland B V | Direction sensitive flow speed meter - consists of chip with sensor section and data process section using temp. sensitive transistors at front and back |
| DE2715552A1 (de) * | 1977-04-07 | 1978-10-19 | Bosch Gmbh Robert | Stroemungsmesser |
-
1979
- 1979-07-09 NL NLAANVRAGE7905356,A patent/NL177629C/xx not_active IP Right Cessation
-
1980
- 1980-07-03 US US06/165,608 patent/US4373386A/en not_active Expired - Lifetime
- 1980-07-04 GB GB8021955A patent/GB2053491A/en not_active Withdrawn
- 1980-07-07 CA CA000355634A patent/CA1146771A/en not_active Expired
- 1980-07-08 JP JP9321780A patent/JPS5710459A/ja active Pending
- 1980-07-08 DE DE19803025720 patent/DE3025720A1/de not_active Ceased
- 1980-07-09 FR FR8015259A patent/FR2468912A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB2053491A (en) | 1981-02-04 |
| FR2468912B1 (OSRAM) | 1984-03-30 |
| NL177629C (nl) | 1985-10-16 |
| US4373386A (en) | 1983-02-15 |
| NL177629B (nl) | 1985-05-17 |
| JPS5710459A (en) | 1982-01-20 |
| NL7905356A (nl) | 1981-01-13 |
| FR2468912A1 (fr) | 1981-05-08 |
| DE3025720A1 (de) | 1981-02-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |