CA1134902A - Sputtered electrodes - Google Patents
Sputtered electrodesInfo
- Publication number
- CA1134902A CA1134902A CA000325795A CA325795A CA1134902A CA 1134902 A CA1134902 A CA 1134902A CA 000325795 A CA000325795 A CA 000325795A CA 325795 A CA325795 A CA 325795A CA 1134902 A CA1134902 A CA 1134902A
- Authority
- CA
- Canada
- Prior art keywords
- layers
- electrode
- sputtering
- oxides
- process according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000203 mixture Substances 0.000 claims abstract description 54
- 238000004544 sputter deposition Methods 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims abstract description 31
- 230000008569 process Effects 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 239000000446 fuel Substances 0.000 claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 150000002739 metals Chemical class 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 35
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 31
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 29
- 239000000126 substance Substances 0.000 claims description 25
- 239000000843 powder Substances 0.000 claims description 21
- 239000007789 gas Substances 0.000 claims description 14
- 229910052759 nickel Inorganic materials 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims description 11
- 150000004706 metal oxides Chemical class 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- FIXNOXLJNSSSLJ-UHFFFAOYSA-N ytterbium(III) oxide Inorganic materials O=[Yb]O[Yb]=O FIXNOXLJNSSSLJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 229910052770 Uranium Inorganic materials 0.000 claims description 6
- 239000011149 active material Substances 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 230000002441 reversible effect Effects 0.000 claims description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000004615 ingredient Substances 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 239000007800 oxidant agent Substances 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 239000008247 solid mixture Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000002485 combustion reaction Methods 0.000 claims description 3
- 239000010419 fine particle Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000002923 metal particle Substances 0.000 claims description 3
- 238000013508 migration Methods 0.000 claims description 3
- 230000005012 migration Effects 0.000 claims description 3
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims description 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052797 bismuth Inorganic materials 0.000 claims description 2
- 238000007385 chemical modification Methods 0.000 claims description 2
- 238000009826 distribution Methods 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229930195733 hydrocarbon Natural products 0.000 claims description 2
- 150000002430 hydrocarbons Chemical class 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 claims description 2
- 230000009467 reduction Effects 0.000 claims description 2
- 238000007669 thermal treatment Methods 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims description 2
- 239000000306 component Substances 0.000 claims 5
- 239000002019 doping agent Substances 0.000 claims 2
- 239000011532 electronic conductor Substances 0.000 claims 2
- 239000003381 stabilizer Substances 0.000 claims 2
- DNYWZCXLKNTFFI-UHFFFAOYSA-N uranium Chemical compound [U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U] DNYWZCXLKNTFFI-UHFFFAOYSA-N 0.000 claims 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims 1
- 229910052684 Cerium Inorganic materials 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 239000012615 aggregate Substances 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 229910002091 carbon monoxide Inorganic materials 0.000 claims 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 claims 1
- 230000008030 elimination Effects 0.000 claims 1
- 238000003379 elimination reaction Methods 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 229910052743 krypton Inorganic materials 0.000 claims 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 238000000151 deposition Methods 0.000 abstract description 15
- 230000008021 deposition Effects 0.000 abstract description 12
- 239000000470 constituent Substances 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 8
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 7
- 229910052726 zirconium Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 229910001868 water Inorganic materials 0.000 description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 5
- 239000007787 solid Substances 0.000 description 4
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 2
- 241000588731 Hafnia Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- DRVWBEJJZZTIGJ-UHFFFAOYSA-N cerium(3+);oxygen(2-) Chemical class [O-2].[O-2].[O-2].[Ce+3].[Ce+3] DRVWBEJJZZTIGJ-UHFFFAOYSA-N 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004508 fractional distillation Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002674 ointment Substances 0.000 description 1
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 description 1
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M potassium chloride Inorganic materials [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- IOVGROKTTNBUGK-SJCJKPOMSA-N ritodrine Chemical compound N([C@@H](C)[C@H](O)C=1C=CC(O)=CC=1)CCC1=CC=C(O)C=C1 IOVGROKTTNBUGK-SJCJKPOMSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 230000003019 stabilising effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 229910003454 ytterbium oxide Inorganic materials 0.000 description 1
- 229940075624 ytterbium oxide Drugs 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/88—Processes of manufacture
- H01M4/8825—Methods for deposition of the catalytic active composition
- H01M4/8867—Vapour deposition
- H01M4/8871—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
- C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
- C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
- C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
- C25B11/091—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of at least one catalytic element and at least one catalytic compound; consisting of two or more catalytic elements or catalytic compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/8647—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites
- H01M4/8657—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites layered
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M8/1213—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Metallurgy (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Composite Materials (AREA)
- Mechanical Engineering (AREA)
- Inert Electrodes (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH390378A CH630493A5 (en) | 1978-04-12 | 1978-04-12 | Method of manufacturing electrodes for fuel cells, device for implementing the method and electrode obtained |
| CH3903/78 | 1978-04-12 | ||
| CH177079A CH631834A5 (en) | 1979-02-22 | 1979-02-22 | Sets of pairs of electrodes for fuel cells |
| CH1770/79 | 1979-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1134902A true CA1134902A (en) | 1982-11-02 |
Family
ID=25688604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000325795A Expired CA1134902A (en) | 1978-04-12 | 1979-04-12 | Sputtered electrodes |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4275126A (https=) |
| JP (1) | JPS54137642A (https=) |
| CA (1) | CA1134902A (https=) |
| DE (1) | DE2915705A1 (https=) |
| FR (1) | FR2423065A1 (https=) |
| GB (1) | GB2018833B (https=) |
| IT (1) | IT1113873B (https=) |
| NL (1) | NL7902846A (https=) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU5889880A (en) * | 1979-07-02 | 1981-01-15 | Olin Corporation | Manufacture of low overvoltage electrodes by cathodic sputtering |
| US4493879A (en) * | 1981-03-18 | 1985-01-15 | Hitachi, Ltd. | Fuel cell |
| DE3149910A1 (de) | 1981-12-16 | 1983-06-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zur kathodenzerstaeubung von mindestens zwei verschiedenen materialien |
| JPS58171569A (ja) * | 1982-03-31 | 1983-10-08 | Hidetoshi Tsuchiya | スパッタリング方法 |
| DE3272083D1 (en) | 1982-03-31 | 1986-08-28 | Ibm Deutschland | Reactor for reactive ion etching, and etching process |
| US4545883A (en) * | 1982-07-19 | 1985-10-08 | Energy Conversion Devices, Inc. | Electrolytic cell cathode |
| US4537674A (en) * | 1982-07-19 | 1985-08-27 | Energy Conversion Devices, Inc. | Electrolytic cell anode |
| US4459341A (en) * | 1983-02-02 | 1984-07-10 | The United States Of America As Represented By The United States Department Of Energy | High temperature solid electrolyte fuel cell with ceramic electrodes |
| US4544461A (en) * | 1983-03-28 | 1985-10-01 | Energy Conversion Devices, Inc. | Hydrogen sulfide decomposition cell and catalytic materials therefor |
| US4606806A (en) * | 1984-05-17 | 1986-08-19 | Varian Associates, Inc. | Magnetron sputter device having planar and curved targets |
| US4761218A (en) * | 1984-05-17 | 1988-08-02 | Varian Associates, Inc. | Sputter coating source having plural target rings |
| US4560462A (en) * | 1984-06-22 | 1985-12-24 | Westinghouse Electric Corp. | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| DE3532286A1 (de) * | 1985-09-11 | 1987-04-16 | Dobos Karoly Dr | Anordnung von gasdiffusionselektroden und verfahren fuer die herstellung von gasdiffusionselektroden |
| WO1987002715A1 (en) * | 1985-10-29 | 1987-05-07 | Commonwealth Scientific And Industrial Research Or | Composite electrodes for use in solid electrolyte devices |
| US4702971A (en) * | 1986-05-28 | 1987-10-27 | Westinghouse Electric Corp. | Sulfur tolerant composite cermet electrodes for solid oxide electrochemical cells |
| JPH079061B2 (ja) * | 1986-08-06 | 1995-02-01 | 宇部興産株式会社 | プラズマ制御マグネトロンスパッタリング法及び装置 |
| US4971674A (en) * | 1986-08-06 | 1990-11-20 | Ube Industries, Ltd. | Magnetron sputtering method and apparatus |
| EP0297316B1 (de) * | 1987-07-01 | 1992-01-22 | Messerschmitt-Bölkow-Blohm Gesellschaft mit beschränkter Haftung | Einrichtung zur Stromzuführung in die poröse Anode einer bipolaren Platte eines Zellenstapels in Filterpressenanordnung |
| NO894159L (no) * | 1989-03-22 | 1990-09-24 | Westinghouse Electric Corp | Brennstoffelektrode. |
| JPH0375392A (ja) * | 1989-08-18 | 1991-03-29 | Asahi Chem Ind Co Ltd | 水素発生用電極 |
| DE4002951A1 (de) * | 1990-02-01 | 1991-08-08 | Medicoat Ag Niederrohrdorf | Festelektrolyt - brennstoffzelle und verfahren zu ihrer herstellung |
| JPH048551A (ja) * | 1990-04-26 | 1992-01-13 | Toyo Ink Mfg Co Ltd | 感熱記録装置及びオペーク装置 |
| US5427665A (en) * | 1990-07-11 | 1995-06-27 | Leybold Aktiengesellschaft | Process and apparatus for reactive coating of a substrate |
| US5174875A (en) * | 1990-08-29 | 1992-12-29 | Materials Research Corporation | Method of enhancing the performance of a magnetron sputtering target |
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| WO1999016137A1 (en) * | 1997-09-22 | 1999-04-01 | California Institute Of Technology | Sputter-deposited fuel cell membranes and electrodes |
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| JP4840718B2 (ja) | 2001-08-14 | 2011-12-21 | 日産自動車株式会社 | 固体酸化物形燃料電池 |
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| US7588668B2 (en) * | 2005-09-13 | 2009-09-15 | Applied Materials, Inc. | Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US3377203A (en) * | 1963-12-20 | 1968-04-09 | Univ Ernst Moritz Arndt | Method of producing fuel cells with solid electrolytes and ceramic oxide electrode layers |
| FR1458344A (fr) * | 1964-08-20 | 1966-03-04 | Cons Vacuum Corp | Procédé et appareil de revêtement par électrophorèse |
| FR1459893A (fr) * | 1964-08-22 | 1966-06-17 | Balzers Hochvakuum | Procédé de production des couches minces par dépôt à l'aide de pulvérisation |
| JPS4519459B1 (https=) * | 1964-10-30 | 1970-07-03 | ||
| NL6413003A (https=) * | 1964-11-07 | 1966-05-09 | ||
| US3410728A (en) * | 1965-06-10 | 1968-11-12 | Gen Electric | Electrical device comprising metal oxide-containing solid electrolyte and electrode |
| DE1546728C3 (de) * | 1965-09-18 | 1975-07-17 | Varta Batterie Ag, 3000 Hannover | Verfahren zur Herstellung eines silberhaltigen pulverförmiger! Katalysators für Sauerstoffelektroden |
| FR1528247A (fr) * | 1966-06-22 | 1968-06-07 | Gen Electric | électrolyte à la zircone stabilisée et procédés pour sa préparation |
| US3502562A (en) * | 1967-04-19 | 1970-03-24 | Corning Glass Works | Multiple cathode sputtering fixture |
| DE1671721A1 (de) * | 1967-12-23 | 1971-10-21 | Battelle Institut E V | Sauerstoffelektrode fuer galvanische Zellen,insbesondere als Kathoden in Brennstoffzellen |
| DE1922970A1 (de) * | 1968-05-13 | 1969-12-04 | Westinghouse Electric Corp | Brennstoffzellenbatterie |
| US4001039A (en) * | 1968-07-31 | 1977-01-04 | Leesona Corporation | Electrochemical cell with alkali and alkaline earth metal containing electrolyte |
| CH515622A (fr) * | 1969-10-22 | 1971-11-15 | Raffinage Cie Francaise | Ensemble électrode-électrolyte pour pile à combustible à électrolyte solide fonctionnant à haute température et procédé pour sa fabrication |
| GB1334051A (en) * | 1970-03-12 | 1973-10-17 | Electrical Research Ass | Sputtering |
| US3684578A (en) * | 1970-10-01 | 1972-08-15 | Shoji Makishima | Fuel cell with electrodes having spinel crystal structure |
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| GB1482632A (en) * | 1974-09-11 | 1977-08-10 | Nordiko Ltd | Method and apparatus for sputtering |
| FR2324755A1 (fr) * | 1975-09-19 | 1977-04-15 | Anvar | Dispositif de pulverisation cathodique de grande vitesse de depot |
| US4031291A (en) * | 1976-04-05 | 1977-06-21 | Malcolm A. Fullenwider | Hydrogen-oxidizing catalyst, and fuel cell electrode using same |
| CH608309A5 (https=) * | 1976-05-28 | 1978-12-29 | Raffinage Cie Francaise | |
| NL7607473A (nl) * | 1976-07-07 | 1978-01-10 | Philips Nv | Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting. |
| US4125676A (en) * | 1977-08-15 | 1978-11-14 | United Technologies Corp. | Carbon foam fuel cell components |
| US4107018A (en) * | 1977-09-01 | 1978-08-15 | Bendix Autolite Corporation | Solid electrolyte gas sensor having a protective bonding layer |
-
1979
- 1979-04-11 FR FR7909199A patent/FR2423065A1/fr active Granted
- 1979-04-11 JP JP4312879A patent/JPS54137642A/ja active Granted
- 1979-04-11 NL NL7902846A patent/NL7902846A/xx not_active Application Discontinuation
- 1979-04-11 IT IT21783/79A patent/IT1113873B/it active
- 1979-04-11 US US06/029,158 patent/US4275126A/en not_active Expired - Lifetime
- 1979-04-12 DE DE19792915705 patent/DE2915705A1/de not_active Withdrawn
- 1979-04-12 CA CA000325795A patent/CA1134902A/en not_active Expired
- 1979-04-12 GB GB7913109A patent/GB2018833B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54137642A (en) | 1979-10-25 |
| GB2018833B (en) | 1983-01-26 |
| IT7921783A0 (it) | 1979-04-11 |
| US4275126A (en) | 1981-06-23 |
| FR2423065A1 (fr) | 1979-11-09 |
| FR2423065B1 (https=) | 1983-12-09 |
| GB2018833A (en) | 1979-10-24 |
| JPS618149B2 (https=) | 1986-03-12 |
| DE2915705A1 (de) | 1979-10-25 |
| IT1113873B (it) | 1986-01-27 |
| NL7902846A (nl) | 1979-10-16 |
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