JPS54137642A - Electrode for reversible fuel cell* and method of and apparatus for producing same - Google Patents

Electrode for reversible fuel cell* and method of and apparatus for producing same

Info

Publication number
JPS54137642A
JPS54137642A JP4312879A JP4312879A JPS54137642A JP S54137642 A JPS54137642 A JP S54137642A JP 4312879 A JP4312879 A JP 4312879A JP 4312879 A JP4312879 A JP 4312879A JP S54137642 A JPS54137642 A JP S54137642A
Authority
JP
Japan
Prior art keywords
electrode
fuel cell
producing same
reversible fuel
reversible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4312879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS618149B2 (https=
Inventor
Beruguman Eritsuku
Horurabuiru Jierarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Memorial Institute Inc
Original Assignee
Battelle Memorial Institute Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH390378A external-priority patent/CH630493A5/fr
Priority claimed from CH177079A external-priority patent/CH631834A5/fr
Application filed by Battelle Memorial Institute Inc filed Critical Battelle Memorial Institute Inc
Publication of JPS54137642A publication Critical patent/JPS54137642A/ja
Publication of JPS618149B2 publication Critical patent/JPS618149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • H01M4/8871—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
    • C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C25B11/091—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of at least one catalytic element and at least one catalytic compound; consisting of two or more catalytic elements or catalytic compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8647—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites
    • H01M4/8657—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites layered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1213—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Composite Materials (AREA)
  • Mechanical Engineering (AREA)
  • Inert Electrodes (AREA)
  • Physical Vapour Deposition (AREA)
JP4312879A 1978-04-12 1979-04-11 Electrode for reversible fuel cell* and method of and apparatus for producing same Granted JPS54137642A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH390378A CH630493A5 (en) 1978-04-12 1978-04-12 Method of manufacturing electrodes for fuel cells, device for implementing the method and electrode obtained
CH177079A CH631834A5 (en) 1979-02-22 1979-02-22 Sets of pairs of electrodes for fuel cells

Publications (2)

Publication Number Publication Date
JPS54137642A true JPS54137642A (en) 1979-10-25
JPS618149B2 JPS618149B2 (https=) 1986-03-12

Family

ID=25688604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4312879A Granted JPS54137642A (en) 1978-04-12 1979-04-11 Electrode for reversible fuel cell* and method of and apparatus for producing same

Country Status (8)

Country Link
US (1) US4275126A (https=)
JP (1) JPS54137642A (https=)
CA (1) CA1134902A (https=)
DE (1) DE2915705A1 (https=)
FR (1) FR2423065A1 (https=)
GB (1) GB2018833B (https=)
IT (1) IT1113873B (https=)
NL (1) NL7902846A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58171569A (ja) * 1982-03-31 1983-10-08 Hidetoshi Tsuchiya スパッタリング方法
JPS63157867A (ja) * 1986-08-06 1988-06-30 Ube Ind Ltd プラズマ制御マグネトロンスパッタリング法及び装置

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5889880A (en) * 1979-07-02 1981-01-15 Olin Corporation Manufacture of low overvoltage electrodes by cathodic sputtering
US4493879A (en) * 1981-03-18 1985-01-15 Hitachi, Ltd. Fuel cell
DE3149910A1 (de) 1981-12-16 1983-06-23 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur kathodenzerstaeubung von mindestens zwei verschiedenen materialien
DE3272083D1 (en) 1982-03-31 1986-08-28 Ibm Deutschland Reactor for reactive ion etching, and etching process
US4545883A (en) * 1982-07-19 1985-10-08 Energy Conversion Devices, Inc. Electrolytic cell cathode
US4537674A (en) * 1982-07-19 1985-08-27 Energy Conversion Devices, Inc. Electrolytic cell anode
US4459341A (en) * 1983-02-02 1984-07-10 The United States Of America As Represented By The United States Department Of Energy High temperature solid electrolyte fuel cell with ceramic electrodes
US4544461A (en) * 1983-03-28 1985-10-01 Energy Conversion Devices, Inc. Hydrogen sulfide decomposition cell and catalytic materials therefor
US4606806A (en) * 1984-05-17 1986-08-19 Varian Associates, Inc. Magnetron sputter device having planar and curved targets
US4761218A (en) * 1984-05-17 1988-08-02 Varian Associates, Inc. Sputter coating source having plural target rings
US4560462A (en) * 1984-06-22 1985-12-24 Westinghouse Electric Corp. Apparatus for coating nuclear fuel pellets with a burnable absorber
DE3532286A1 (de) * 1985-09-11 1987-04-16 Dobos Karoly Dr Anordnung von gasdiffusionselektroden und verfahren fuer die herstellung von gasdiffusionselektroden
WO1987002715A1 (en) * 1985-10-29 1987-05-07 Commonwealth Scientific And Industrial Research Or Composite electrodes for use in solid electrolyte devices
US4702971A (en) * 1986-05-28 1987-10-27 Westinghouse Electric Corp. Sulfur tolerant composite cermet electrodes for solid oxide electrochemical cells
US4971674A (en) * 1986-08-06 1990-11-20 Ube Industries, Ltd. Magnetron sputtering method and apparatus
EP0297316B1 (de) * 1987-07-01 1992-01-22 Messerschmitt-Bölkow-Blohm Gesellschaft mit beschränkter Haftung Einrichtung zur Stromzuführung in die poröse Anode einer bipolaren Platte eines Zellenstapels in Filterpressenanordnung
NO894159L (no) * 1989-03-22 1990-09-24 Westinghouse Electric Corp Brennstoffelektrode.
JPH0375392A (ja) * 1989-08-18 1991-03-29 Asahi Chem Ind Co Ltd 水素発生用電極
DE4002951A1 (de) * 1990-02-01 1991-08-08 Medicoat Ag Niederrohrdorf Festelektrolyt - brennstoffzelle und verfahren zu ihrer herstellung
JPH048551A (ja) * 1990-04-26 1992-01-13 Toyo Ink Mfg Co Ltd 感熱記録装置及びオペーク装置
US5427665A (en) * 1990-07-11 1995-06-27 Leybold Aktiengesellschaft Process and apparatus for reactive coating of a substrate
US5174875A (en) * 1990-08-29 1992-12-29 Materials Research Corporation Method of enhancing the performance of a magnetron sputtering target
DE4419167B4 (de) * 1994-06-01 2004-09-02 Leybold Optics Gmbh Vorrichtung zum Beschichten eines Substrates
DE19547700C2 (de) * 1995-12-20 1998-09-17 Forschungszentrum Juelich Gmbh Elektrodensubstrat für eine Brennstoffzelle
CN1129198C (zh) * 1997-02-03 2003-11-26 松下电器产业株式会社 碱性蓄电池的正极活性材料的制造方法
US5985115A (en) * 1997-04-11 1999-11-16 Novellus Systems, Inc. Internally cooled target assembly for magnetron sputtering
WO1999016137A1 (en) * 1997-09-22 1999-04-01 California Institute Of Technology Sputter-deposited fuel cell membranes and electrodes
US5879827A (en) * 1997-10-10 1999-03-09 Minnesota Mining And Manufacturing Company Catalyst for membrane electrode assembly and method of making
US6342131B1 (en) 1998-04-17 2002-01-29 Kabushiki Kaisha Toshiba Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field
JP4840718B2 (ja) 2001-08-14 2011-12-21 日産自動車株式会社 固体酸化物形燃料電池
JP3581354B2 (ja) * 2002-03-27 2004-10-27 株式会社東芝 電界効果トランジスタ
US20040229108A1 (en) * 2002-11-08 2004-11-18 Valdez Thomas I. Anode structure for direct methanol fuel cell
US7282291B2 (en) * 2002-11-25 2007-10-16 California Institute Of Technology Water free proton conducting membranes based on poly-4-vinylpyridinebisulfate for fuel cells
US20050092597A1 (en) * 2003-10-29 2005-05-05 O'neil James Method of forming thin-film electrodes
EP1772915B1 (en) * 2004-06-15 2013-04-10 Mitsubishi Chemical Corporation Nonaqueous electrolyte secondary battery and negative electrode thereof
CN100353597C (zh) * 2004-08-10 2007-12-05 长沙丰日电气集团有限公司 氢空气燃料电池催化膜制作方法
US20070056843A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones
US20070056850A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Large-area magnetron sputtering chamber with individually controlled sputtering zones
US7588668B2 (en) * 2005-09-13 2009-09-15 Applied Materials, Inc. Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers
US20070056845A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Multiple zone sputtering target created through conductive and insulation bonding
WO2007032858A1 (en) * 2005-09-13 2007-03-22 Applied Materials, Inc. Large-area magnetron sputtering chamber with individually controlled sputtering zones
US20070158500A1 (en) * 2006-01-06 2007-07-12 Ion America Corporation Solid oxide fuel cell system for aircraft power, heat, water, and oxygen generation
WO2010085507A1 (en) * 2009-01-20 2010-07-29 President And Fellows Of Harvard College Electrodes for fuel cells
US12212025B2 (en) 2020-10-22 2025-01-28 Ohmium International, Inc. Aircraft electrical power supply system and method of supplying electrical power in an aircraft
CN113355643A (zh) * 2021-08-10 2021-09-07 北京思伟特新能源科技有限公司 一种采用磁控溅射法制备金属支撑单体的方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3377203A (en) * 1963-12-20 1968-04-09 Univ Ernst Moritz Arndt Method of producing fuel cells with solid electrolytes and ceramic oxide electrode layers
FR1458344A (fr) * 1964-08-20 1966-03-04 Cons Vacuum Corp Procédé et appareil de revêtement par électrophorèse
FR1459893A (fr) * 1964-08-22 1966-06-17 Balzers Hochvakuum Procédé de production des couches minces par dépôt à l'aide de pulvérisation
JPS4519459B1 (https=) * 1964-10-30 1970-07-03
NL6413003A (https=) * 1964-11-07 1966-05-09
US3410728A (en) * 1965-06-10 1968-11-12 Gen Electric Electrical device comprising metal oxide-containing solid electrolyte and electrode
DE1546728C3 (de) * 1965-09-18 1975-07-17 Varta Batterie Ag, 3000 Hannover Verfahren zur Herstellung eines silberhaltigen pulverförmiger! Katalysators für Sauerstoffelektroden
FR1528247A (fr) * 1966-06-22 1968-06-07 Gen Electric électrolyte à la zircone stabilisée et procédés pour sa préparation
US3502562A (en) * 1967-04-19 1970-03-24 Corning Glass Works Multiple cathode sputtering fixture
DE1671721A1 (de) * 1967-12-23 1971-10-21 Battelle Institut E V Sauerstoffelektrode fuer galvanische Zellen,insbesondere als Kathoden in Brennstoffzellen
DE1922970A1 (de) * 1968-05-13 1969-12-04 Westinghouse Electric Corp Brennstoffzellenbatterie
US4001039A (en) * 1968-07-31 1977-01-04 Leesona Corporation Electrochemical cell with alkali and alkaline earth metal containing electrolyte
CH515622A (fr) * 1969-10-22 1971-11-15 Raffinage Cie Francaise Ensemble électrode-électrolyte pour pile à combustible à électrolyte solide fonctionnant à haute température et procédé pour sa fabrication
GB1334051A (en) * 1970-03-12 1973-10-17 Electrical Research Ass Sputtering
US3684578A (en) * 1970-10-01 1972-08-15 Shoji Makishima Fuel cell with electrodes having spinel crystal structure
US3884793A (en) * 1971-09-07 1975-05-20 Telic Corp Electrode type glow discharge apparatus
GB1482632A (en) * 1974-09-11 1977-08-10 Nordiko Ltd Method and apparatus for sputtering
FR2324755A1 (fr) * 1975-09-19 1977-04-15 Anvar Dispositif de pulverisation cathodique de grande vitesse de depot
US4031291A (en) * 1976-04-05 1977-06-21 Malcolm A. Fullenwider Hydrogen-oxidizing catalyst, and fuel cell electrode using same
CH608309A5 (https=) * 1976-05-28 1978-12-29 Raffinage Cie Francaise
NL7607473A (nl) * 1976-07-07 1978-01-10 Philips Nv Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting.
US4125676A (en) * 1977-08-15 1978-11-14 United Technologies Corp. Carbon foam fuel cell components
US4107018A (en) * 1977-09-01 1978-08-15 Bendix Autolite Corporation Solid electrolyte gas sensor having a protective bonding layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58171569A (ja) * 1982-03-31 1983-10-08 Hidetoshi Tsuchiya スパッタリング方法
JPS63157867A (ja) * 1986-08-06 1988-06-30 Ube Ind Ltd プラズマ制御マグネトロンスパッタリング法及び装置

Also Published As

Publication number Publication date
GB2018833B (en) 1983-01-26
IT7921783A0 (it) 1979-04-11
US4275126A (en) 1981-06-23
CA1134902A (en) 1982-11-02
FR2423065A1 (fr) 1979-11-09
FR2423065B1 (https=) 1983-12-09
GB2018833A (en) 1979-10-24
JPS618149B2 (https=) 1986-03-12
DE2915705A1 (de) 1979-10-25
IT1113873B (it) 1986-01-27
NL7902846A (nl) 1979-10-16

Similar Documents

Publication Publication Date Title
JPS54137642A (en) Electrode for reversible fuel cell* and method of and apparatus for producing same
JPS54115738A (en) Cell paste and method of producing same
EP0009406A3 (en) Electrodes and method of preparation thereof for use in electrochemical cells
JPS52155342A (en) Method of manufacturing electrode for fuel cell
JPS5335595A (en) Protection method and apparatus for sencing electrode of solid electrolyte electroochemical cell
JPS52154047A (en) Method of manufacturing electrode for fuel cell
ZA772257B (en) Electrocatalysts for fuel cell electrodes and method of manufacture
IL51329A0 (en) Solar cells and method of producing same
GB2013878B (en) Method and apparatus for classification of cells
JPS54147431A (en) Method of and apparatus for nonndestructive test for electrochemical cell
JPS5499935A (en) Litiummiodine cell and method of producing same
JPS55140141A (en) Electrolytic quantity cell and method of making measurementtelectrode suitable for same cell
JPS54131728A (en) Depolarizer* method of producing same and cell
JPS5482628A (en) Solid cell and method of producing same
DE3379307D1 (en) Method of producing electrode for liquid fuel cell
JPS54132730A (en) Lithiummiodine cell and method of producing same
GB2066565B (en) Structured solar cell and method of making same
JPS54159640A (en) Method of and apparatus for storage battery
DE3380800D1 (en) Fuel cell electrode structure and method of making it
JPS5682578A (en) Improved low cost electrode for metallair cell and method of manufacturing same
JPS54131725A (en) Organic electrolyte cell and method of producing same
JPS5489991A (en) Method of activating catalyst for fuel cell electrode
JPS5358641A (en) Method of manufacturing electrode for fuel cell
JPS5572722A (en) Method of and apparatus for continuously burning fuel
JPS5495322A (en) Selffcontained electrode and method of producing same