CA1126855A - Defect inspection system - Google Patents

Defect inspection system

Info

Publication number
CA1126855A
CA1126855A CA345,970A CA345970A CA1126855A CA 1126855 A CA1126855 A CA 1126855A CA 345970 A CA345970 A CA 345970A CA 1126855 A CA1126855 A CA 1126855A
Authority
CA
Canada
Prior art keywords
inspection system
defect inspection
defect
signal
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA345,970A
Other languages
English (en)
French (fr)
Inventor
Hajime Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hajime Industries Ltd
Original Assignee
Hajime Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hajime Industries Ltd filed Critical Hajime Industries Ltd
Application granted granted Critical
Publication of CA1126855A publication Critical patent/CA1126855A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)
CA345,970A 1979-02-20 1980-02-19 Defect inspection system Expired CA1126855A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1886879A JPS55110905A (en) 1979-02-20 1979-02-20 Defect detecting device
JP18868/1979 1979-02-20

Publications (1)

Publication Number Publication Date
CA1126855A true CA1126855A (en) 1982-06-29

Family

ID=11983513

Family Applications (1)

Application Number Title Priority Date Filing Date
CA345,970A Expired CA1126855A (en) 1979-02-20 1980-02-19 Defect inspection system

Country Status (6)

Country Link
US (1) US4302773A (en, 2012)
JP (1) JPS55110905A (en, 2012)
CA (1) CA1126855A (en, 2012)
DE (1) DE3006341A1 (en, 2012)
FR (1) FR2449884A1 (en, 2012)
GB (1) GB2046899B (en, 2012)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU553069B2 (en) * 1981-07-17 1986-07-03 W.R. Grace & Co.-Conn. Radial scan, pulsed light article inspection ccv system 0
US4598420A (en) * 1983-12-08 1986-07-01 Mts Systems Corporation Optical grid analyzer system for automatically determining strain in deformed sheet metal
GB2175396B (en) * 1985-05-22 1989-06-28 Filler Protection Developments Apparatus for examining objects
JPS6219738A (ja) * 1985-07-19 1987-01-28 Tokan Kogyo Co Ltd 使い捨てコツプのカ−ル部不良検査装置
DE3734294A1 (de) * 1987-10-09 1989-04-27 Sick Optik Elektronik Erwin Optische oberflaechen-inspektionsvorrichtung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3584963A (en) * 1968-12-27 1971-06-15 Rca Corp Optical flaw detector
US3749496A (en) * 1971-07-16 1973-07-31 Bendix Corp Automatic quality control surface inspection system for determining the character of a surface by measuring the shape and intensity of a modulated beam
US3700909A (en) * 1972-03-09 1972-10-24 Columbia Research Corp Method for detecting pinhole defects in foil material
US4025201A (en) * 1975-04-21 1977-05-24 Ball Brothers Service Corporation Method and apparatus for video inspection of articles of manufacture by decussate paths of light
DE2617111C3 (de) * 1976-04-17 1986-02-20 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zum Feststellen einer Bewegung im Überwachungsbereich einer Fernsehkamera
JPS5571937A (en) * 1978-11-24 1980-05-30 Kanebo Ltd Method of and device for inspecting surface

Also Published As

Publication number Publication date
GB2046899B (en) 1983-10-26
FR2449884A1 (fr) 1980-09-19
US4302773A (en) 1981-11-24
GB2046899A (en) 1980-11-19
FR2449884B1 (en, 2012) 1984-11-02
JPH0157283B2 (en, 2012) 1989-12-05
JPS55110905A (en) 1980-08-27
DE3006341A1 (de) 1980-08-28
DE3006341C2 (en, 2012) 1990-01-25

Similar Documents

Publication Publication Date Title
KR100283834B1 (ko) 반도체칩의 본딩방법 및 그 장치
US4435641A (en) Inspection apparatus for inspecting an object to determine whether or not it contains an abnormality, defect or the like
US4549437A (en) Acoustic testing of complex multiple segment structures
CA1126855A (en) Defect inspection system
JPS648560A (en) Apparatus for testing and/or monitoring digital video-tape recorder
CA1139425A (en) Object inspection system
US4543602A (en) Surface inspection method
JPS608707A (ja) はんだ付外観検出方法
US4277802A (en) Defect inspection system
JPH01257250A (ja) ディスク表面検査装置における欠陥種別の判別方法
JPS63193539A (ja) Ｉｃリ−ドフレ−ムの外観検査方法
ATE51711T1 (de) Verfahren und vorrichtung zur detektion und abbildung von messpunkten, die einen bestimmten signalverlauf aufweisen.
JPH01112468A (ja) プリント基板検査装置
KR0119723B1 (ko) 집적회로의 리드 검사방법 및 그 장치
JPH09321500A (ja) 半田付け状態の外観検査方法
JPS62274205A (ja) リ−ド平坦度検査方法および装置
JPS59208406A (ja) パタ−ン認識装置
JPS6216372B2 (en, 2012)
JPS58206289A (ja) バ−スト信号測定器
JPS62299705A (ja) 実装部品検査装置
JPS6070334A (ja) レンズの欠点検査装置
JPS58132649A (ja) 印刷配線板の自動検査装置
JPS59165183A (ja) パタ−ン認識装置
JPS6484138A (en) Surface inspection device
JPS6216373B2 (en, 2012)

Legal Events

Date Code Title Description
MKEX Expiry