CA1110421A - Cibles de pulverisation a tellurure de cadmium et de mercure - Google Patents
Cibles de pulverisation a tellurure de cadmium et de mercureInfo
- Publication number
- CA1110421A CA1110421A CA316,105A CA316105A CA1110421A CA 1110421 A CA1110421 A CA 1110421A CA 316105 A CA316105 A CA 316105A CA 1110421 A CA1110421 A CA 1110421A
- Authority
- CA
- Canada
- Prior art keywords
- cadmium mercury
- mercury telluride
- finely divided
- die
- compact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 title claims abstract description 44
- MCMSPRNYOJJPIZ-UHFFFAOYSA-N cadmium;mercury;tellurium Chemical compound [Cd]=[Te]=[Hg] MCMSPRNYOJJPIZ-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 238000005477 sputtering target Methods 0.000 title claims abstract description 21
- 239000002245 particle Substances 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000000203 mixture Substances 0.000 claims abstract description 18
- 230000001427 coherent effect Effects 0.000 claims abstract description 13
- 238000009826 distribution Methods 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 6
- 238000002156 mixing Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000003491 array Methods 0.000 description 4
- 238000005549 size reduction Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910004262 HgTe Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000011067 equilibration Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B19/00—Selenium; Tellurium; Compounds thereof
- C01B19/007—Tellurides or selenides of metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
- H01L31/02966—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe including ternary compounds, e.g. HgCdTe
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/10—Solid density
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Powder Metallurgy (AREA)
- Bipolar Transistors (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA316,105A CA1110421A (fr) | 1978-11-09 | 1978-11-09 | Cibles de pulverisation a tellurure de cadmium et de mercure |
| GB7936723A GB2037264B (en) | 1978-11-09 | 1979-10-23 | Cadmium mercury telluride sputtering targets |
| DE19792944482 DE2944482A1 (de) | 1978-11-09 | 1979-11-03 | Verstaeubbares target und verfahren zu seiner herstellung |
| JP14343979A JPS5565338A (en) | 1978-11-09 | 1979-11-07 | Sputtering target of telluric mercury cadmium and its manufacture |
| FR7927738A FR2441582A1 (fr) | 1978-11-09 | 1979-11-09 | Procede pour preparer des cibles de vaporisation cathodique de grandes dimensions et de composition homogene en tellurure de mercure et de cadmium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA316,105A CA1110421A (fr) | 1978-11-09 | 1978-11-09 | Cibles de pulverisation a tellurure de cadmium et de mercure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1110421A true CA1110421A (fr) | 1981-10-13 |
Family
ID=4112934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA316,105A Expired CA1110421A (fr) | 1978-11-09 | 1978-11-09 | Cibles de pulverisation a tellurure de cadmium et de mercure |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5565338A (fr) |
| CA (1) | CA1110421A (fr) |
| DE (1) | DE2944482A1 (fr) |
| FR (1) | FR2441582A1 (fr) |
| GB (1) | GB2037264B (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL60734A (en) * | 1979-08-30 | 1984-03-30 | Santa Barbara Res Center | Production of single crystal mercury cadmium telluride |
| DE3300525A1 (de) * | 1983-01-10 | 1984-07-12 | Merck Patent Gmbh, 6100 Darmstadt | Targets fuer die kathodenzerstaeubung |
| DE3627775A1 (de) * | 1986-08-16 | 1988-02-18 | Demetron | Verfahren zur herstellung von targets |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2265872B1 (fr) * | 1974-03-27 | 1977-10-14 | Anvar |
-
1978
- 1978-11-09 CA CA316,105A patent/CA1110421A/fr not_active Expired
-
1979
- 1979-10-23 GB GB7936723A patent/GB2037264B/en not_active Expired
- 1979-11-03 DE DE19792944482 patent/DE2944482A1/de active Granted
- 1979-11-07 JP JP14343979A patent/JPS5565338A/ja active Pending
- 1979-11-09 FR FR7927738A patent/FR2441582A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2944482A1 (de) | 1980-05-29 |
| DE2944482C2 (fr) | 1988-09-08 |
| FR2441582B1 (fr) | 1985-04-19 |
| FR2441582A1 (fr) | 1980-06-13 |
| GB2037264A (en) | 1980-07-09 |
| GB2037264B (en) | 1982-09-29 |
| JPS5565338A (en) | 1980-05-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |