CA1107379A - Color responsive imaging device employing wavelength dependent semiconductor optical absorption - Google Patents
Color responsive imaging device employing wavelength dependent semiconductor optical absorptionInfo
- Publication number
- CA1107379A CA1107379A CA298,693A CA298693A CA1107379A CA 1107379 A CA1107379 A CA 1107379A CA 298693 A CA298693 A CA 298693A CA 1107379 A CA1107379 A CA 1107379A
- Authority
- CA
- Canada
- Prior art keywords
- layers
- layer
- less
- thickness
- doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 18
- 239000004065 semiconductor Substances 0.000 title claims abstract description 7
- 238000010521 absorption reaction Methods 0.000 title abstract description 10
- 230000003287 optical effect Effects 0.000 title abstract description 4
- 230000001419 dependent effect Effects 0.000 title abstract description 3
- 239000003086 colorant Substances 0.000 claims abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 239000012535 impurity Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 239000007787 solid Substances 0.000 claims description 10
- 239000000969 carrier Substances 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 5
- 230000004044 response Effects 0.000 claims description 3
- 239000002800 charge carrier Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000002000 scavenging effect Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 230000005855 radiation Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 238000001429 visible spectrum Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000003334 potential effect Effects 0.000 description 1
- 230000003389 potentiating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1062—Channel region of field-effect devices of charge coupled devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14806—Structural or functional details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14868—CCD or CID colour imagers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/80—Camera processing pipelines; Components thereof
- H04N23/84—Camera processing pipelines; Components thereof for processing colour signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14831—Area CCD imagers
- H01L27/14843—Interline transfer
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Ceramic Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US78094477A | 1977-03-24 | 1977-03-24 | |
| US780,944 | 1985-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1107379A true CA1107379A (en) | 1981-08-18 |
Family
ID=25121164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA298,693A Expired CA1107379A (en) | 1977-03-24 | 1978-03-10 | Color responsive imaging device employing wavelength dependent semiconductor optical absorption |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS53118932A (fi) |
| CA (1) | CA1107379A (fi) |
| DE (1) | DE2811961C3 (fi) |
| FR (1) | FR2385219A1 (fi) |
| GB (1) | GB1597740A (fi) |
| HK (1) | HK5682A (fi) |
| NL (1) | NL7803196A (fi) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4214264A (en) * | 1979-02-28 | 1980-07-22 | Eastman Kodak Company | Hybrid color image sensing array |
| DE3124716A1 (de) * | 1981-06-24 | 1983-05-19 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | "anordnung zur mehrspektralen abbildung von objekten, vorzugsweise von zielen" |
| JPS5916483A (ja) * | 1982-07-19 | 1984-01-27 | Matsushita Electric Ind Co Ltd | 固体撮像装置 |
| US4533940A (en) * | 1983-06-13 | 1985-08-06 | Chappell Barbara A | High spatial resolution energy discriminator |
| JPH0644842B2 (ja) * | 1987-06-02 | 1994-06-15 | 日本甜菜製糖株式会社 | 移植機の苗補給方法及び装置 |
| JP2502747Y2 (ja) * | 1989-08-31 | 1996-06-26 | ヤンマー農機株式会社 | 歩行型移植機 |
| US9610392B2 (en) | 2012-06-08 | 2017-04-04 | Fresenius Medical Care Holdings, Inc. | Medical fluid cassettes and related systems and methods |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3906544A (en) * | 1971-07-14 | 1975-09-16 | Gen Electric | Semiconductor imaging detector device |
| US3860956A (en) * | 1972-03-17 | 1975-01-14 | Matsushita Electric Ind Co Ltd | Color target and method of manufacturing same |
| DE2247966A1 (de) * | 1972-09-29 | 1974-04-11 | Heinz Prof Dr Rer Nat Beneking | Halbleiteranordnung zum nachweis von lichtstrahlen |
| US3985449A (en) * | 1975-02-07 | 1976-10-12 | International Business Machines Corporation | Semiconductor color detector |
-
1978
- 1978-03-10 CA CA298,693A patent/CA1107379A/en not_active Expired
- 1978-03-18 DE DE2811961A patent/DE2811961C3/de not_active Expired
- 1978-03-23 NL NL7803196A patent/NL7803196A/xx not_active Application Discontinuation
- 1978-03-23 GB GB11717/78A patent/GB1597740A/en not_active Expired
- 1978-03-24 JP JP3403578A patent/JPS53118932A/ja active Granted
- 1978-03-24 FR FR7808621A patent/FR2385219A1/fr active Granted
-
1982
- 1982-02-11 HK HK56/82A patent/HK5682A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6154314B2 (fi) | 1986-11-21 |
| DE2811961A1 (de) | 1978-09-28 |
| JPS53118932A (en) | 1978-10-17 |
| DE2811961B2 (de) | 1979-12-20 |
| NL7803196A (nl) | 1978-09-26 |
| FR2385219B1 (fi) | 1981-10-30 |
| FR2385219A1 (fr) | 1978-10-20 |
| HK5682A (en) | 1982-02-19 |
| DE2811961C3 (de) | 1987-01-22 |
| GB1597740A (en) | 1981-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |