CA1086870A - X-ray-fluorescence measurement of thin film thicknesses - Google Patents
X-ray-fluorescence measurement of thin film thicknessesInfo
- Publication number
- CA1086870A CA1086870A CA277,086A CA277086A CA1086870A CA 1086870 A CA1086870 A CA 1086870A CA 277086 A CA277086 A CA 277086A CA 1086870 A CA1086870 A CA 1086870A
- Authority
- CA
- Canada
- Prior art keywords
- thickness
- alpha
- sample
- layer
- counts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 17
- 238000009681 x-ray fluorescence measurement Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 238000004876 x-ray fluorescence Methods 0.000 claims abstract description 19
- 239000010410 layer Substances 0.000 claims description 89
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 49
- 230000005284 excitation Effects 0.000 claims description 35
- 239000010931 gold Substances 0.000 claims description 35
- 230000026954 response to X-ray Effects 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 31
- 229910052737 gold Inorganic materials 0.000 claims description 23
- 229910052759 nickel Inorganic materials 0.000 claims description 23
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 239000010949 copper Substances 0.000 claims description 17
- 230000000694 effects Effects 0.000 claims description 16
- 229910052802 copper Inorganic materials 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
- 150000002739 metals Chemical class 0.000 claims description 12
- 239000010408 film Substances 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 8
- 230000003993 interaction Effects 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000011247 coating layer Substances 0.000 claims description 2
- 239000000470 constituent Substances 0.000 claims description 2
- 230000006872 improvement Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 description 11
- 229910016523 CuKa Inorganic materials 0.000 description 7
- 230000014509 gene expression Effects 0.000 description 6
- 229910018054 Ni-Cu Inorganic materials 0.000 description 4
- 229910018481 Ni—Cu Inorganic materials 0.000 description 4
- 238000007747 plating Methods 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- ZBTDWLVGWJNPQM-UHFFFAOYSA-N [Ni].[Cu].[Au] Chemical compound [Ni].[Cu].[Au] ZBTDWLVGWJNPQM-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- XYZDGJMESCAYLB-PZBTWANTSA-N cfau Chemical compound F[C@H]1[C@H](O)[C@@H](CO)O[C@H]1N1C(=O)NC(=O)C(C23B4B2B2B5B6B7B(B5C76)B4B32)=C1 XYZDGJMESCAYLB-PZBTWANTSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- BGRJTUBHPOOWDU-UHFFFAOYSA-N sulpiride Chemical compound CCN1CCCC1CNC(=O)C1=CC(S(N)(=O)=O)=CC=C1OC BGRJTUBHPOOWDU-UHFFFAOYSA-N 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US68746276A | 1976-05-18 | 1976-05-18 | |
| US687,462 | 1976-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1086870A true CA1086870A (en) | 1980-09-30 |
Family
ID=24760542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA277,086A Expired CA1086870A (en) | 1976-05-18 | 1977-04-27 | X-ray-fluorescence measurement of thin film thicknesses |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS52140355A (show.php) |
| CA (1) | CA1086870A (show.php) |
| DE (1) | DE2721589A1 (show.php) |
| FR (1) | FR2393266A1 (show.php) |
| GB (1) | GB1561313A (show.php) |
| NL (1) | NL185306C (show.php) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI59489C (fi) * | 1978-11-21 | 1981-08-10 | Enso Gutzeit Oy | Foerfarande foer maetning av belaeggningsmaengder |
| JPS5758300U (show.php) * | 1980-09-22 | 1982-04-06 | ||
| DE3129049A1 (de) * | 1981-07-23 | 1983-02-24 | Hoesch Werke Ag, 4600 Dortmund | Verfahren und vorrichtung zur zerstoerungsfreien bestimmung der dicke der eisen-zinn-zwischenschicht an elektrolytisch verzinntem blech |
| JPS60140105A (ja) * | 1983-12-27 | 1985-07-25 | Shimadzu Corp | 多層膜分析装置 |
| JPS60142205A (ja) * | 1983-12-29 | 1985-07-27 | Shimadzu Corp | 多層膜分析装置 |
| DD278866A1 (de) * | 1987-11-20 | 1990-05-16 | Akad Wissenschaften Ddr | Verfahren zur phosphorgehaltsbestimmung in stromlos abgeschiedenen metallueberzuegen |
| JP3706989B2 (ja) * | 1999-04-07 | 2005-10-19 | 富士通株式会社 | 蛍光ｘ線を用いた膜厚測定方法 |
| JP4966160B2 (ja) * | 2007-10-26 | 2012-07-04 | シャープ株式会社 | 膜厚測定方法 |
| JP5494322B2 (ja) * | 2009-12-28 | 2014-05-14 | 株式会社デンソー | Ｃｎｔワイヤの製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5146631B2 (show.php) * | 1971-12-29 | 1976-12-10 | ||
| JPS4919222A (show.php) * | 1972-06-15 | 1974-02-20 |
-
1977
- 1977-04-27 CA CA277,086A patent/CA1086870A/en not_active Expired
- 1977-05-13 DE DE19772721589 patent/DE2721589A1/de not_active Ceased
- 1977-05-17 FR FR7715153A patent/FR2393266A1/fr active Granted
- 1977-05-17 NL NL7705443A patent/NL185306C/xx not_active IP Right Cessation
- 1977-05-18 GB GB2084877A patent/GB1561313A/en not_active Expired
- 1977-05-18 JP JP5651677A patent/JPS52140355A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2393266A1 (fr) | 1978-12-29 |
| FR2393266B1 (show.php) | 1982-03-19 |
| NL185306B (nl) | 1989-10-02 |
| GB1561313A (en) | 1980-02-20 |
| JPS52140355A (en) | 1977-11-22 |
| JPS5735768B2 (show.php) | 1982-07-30 |
| NL185306C (nl) | 1990-03-01 |
| NL7705443A (nl) | 1977-11-22 |
| DE2721589A1 (de) | 1977-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |