CA1011385A - Gas discharge electron gun for generating an electron beam by means of a glow discharge - Google Patents
Gas discharge electron gun for generating an electron beam by means of a glow dischargeInfo
- Publication number
- CA1011385A CA1011385A CA227,294A CA227294A CA1011385A CA 1011385 A CA1011385 A CA 1011385A CA 227294 A CA227294 A CA 227294A CA 1011385 A CA1011385 A CA 1011385A
- Authority
- CA
- Canada
- Prior art keywords
- generating
- discharge
- electron beam
- gas discharge
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Discharge Lamp (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7407059.A NL160114C (nl) | 1974-05-27 | 1974-05-27 | Gasontladingselektronenkanon van het holle anodetype voor het opwekken van een elektronenbundel met behulp van een glimontlading. |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1011385A true CA1011385A (en) | 1977-05-31 |
Family
ID=19821436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA227,294A Expired CA1011385A (en) | 1974-05-27 | 1975-05-20 | Gas discharge electron gun for generating an electron beam by means of a glow discharge |
Country Status (10)
Country | Link |
---|---|
US (1) | US4004172A (hu) |
JP (1) | JPS514496A (hu) |
AT (1) | AT331371B (hu) |
CA (1) | CA1011385A (hu) |
CH (1) | CH588161A5 (hu) |
DE (1) | DE2523360B2 (hu) |
FR (1) | FR2273368B1 (hu) |
GB (1) | GB1518161A (hu) |
NL (1) | NL160114C (hu) |
SE (1) | SE398022B (hu) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2492587A1 (fr) * | 1980-10-20 | 1982-04-23 | V Elektrotekhnichesky | Canon electronique a decharge dans un gaz avec cathode froide |
JPS5927652Y2 (ja) * | 1980-10-27 | 1984-08-10 | 矢崎総業株式会社 | プリント配線板の取付構造 |
JPS5776739A (en) * | 1980-10-31 | 1982-05-13 | Efuimoobitsuchi Kureind Yuurii | Electron/ion source |
JPS60217339A (ja) * | 1984-04-13 | 1985-10-30 | Matsushita Electric Ind Co Ltd | 液晶表示パネルおよびその製造方法 |
US5319481A (en) * | 1986-12-23 | 1994-06-07 | Raychem Corporation | Encapsulated liquid crystal optical read/write storage medium and system |
DE102010049521B3 (de) * | 2010-10-25 | 2012-04-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum Erzeugen eines Elektronenstrahls |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1275261A (en) * | 1968-06-04 | 1972-05-24 | Atomic Energy Authority Uk | Improvements in or relating to non thermionic cathode slow discharge devices |
-
1974
- 1974-05-27 NL NL7407059.A patent/NL160114C/xx not_active IP Right Cessation
-
1975
- 1975-05-08 US US05/575,615 patent/US4004172A/en not_active Expired - Lifetime
- 1975-05-19 GB GB21177/75A patent/GB1518161A/en not_active Expired
- 1975-05-20 CA CA227,294A patent/CA1011385A/en not_active Expired
- 1975-05-23 CH CH663075A patent/CH588161A5/xx not_active IP Right Cessation
- 1975-05-23 SE SE7505870A patent/SE398022B/xx not_active IP Right Cessation
- 1975-05-24 JP JP50061503A patent/JPS514496A/ja active Pending
- 1975-05-26 AT AT399575A patent/AT331371B/de not_active IP Right Cessation
- 1975-05-27 FR FR7516429A patent/FR2273368B1/fr not_active Expired
- 1975-05-27 DE DE19752523360 patent/DE2523360B2/de active Granted
Also Published As
Publication number | Publication date |
---|---|
DE2523360A1 (de) | 1975-12-11 |
SE398022B (sv) | 1977-11-28 |
NL160114C (nl) | 1979-09-17 |
DE2523360B2 (de) | 1976-11-04 |
AT331371B (de) | 1976-08-25 |
ATA399575A (de) | 1975-11-15 |
NL7407059A (nl) | 1975-12-01 |
SE7505870L (sv) | 1975-11-28 |
JPS514496A (hu) | 1976-01-14 |
NL160114B (nl) | 1979-04-17 |
GB1518161A (en) | 1978-07-19 |
CH588161A5 (hu) | 1977-05-31 |
FR2273368A1 (hu) | 1975-12-26 |
FR2273368B1 (hu) | 1979-06-15 |
US4004172A (en) | 1977-10-18 |
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