FR2312104A1 - Canon generateur d'electrons excite par un plasma - Google Patents

Canon generateur d'electrons excite par un plasma

Info

Publication number
FR2312104A1
FR2312104A1 FR7613810A FR7613810A FR2312104A1 FR 2312104 A1 FR2312104 A1 FR 2312104A1 FR 7613810 A FR7613810 A FR 7613810A FR 7613810 A FR7613810 A FR 7613810A FR 2312104 A1 FR2312104 A1 FR 2312104A1
Authority
FR
France
Prior art keywords
cannon
excited
plasma
electron generator
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7613810A
Other languages
English (en)
Other versions
FR2312104B3 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of FR2312104A1 publication Critical patent/FR2312104A1/fr
Application granted granted Critical
Publication of FR2312104B3 publication Critical patent/FR2312104B3/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
FR7613810A 1975-05-19 1976-05-07 Canon generateur d'electrons excite par un plasma Granted FR2312104A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/578,551 US3970892A (en) 1975-05-19 1975-05-19 Ion plasma electron gun

Publications (2)

Publication Number Publication Date
FR2312104A1 true FR2312104A1 (fr) 1976-12-17
FR2312104B3 FR2312104B3 (fr) 1979-03-16

Family

ID=24313353

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7613810A Granted FR2312104A1 (fr) 1975-05-19 1976-05-07 Canon generateur d'electrons excite par un plasma

Country Status (7)

Country Link
US (1) US3970892A (fr)
JP (1) JPS51141574A (fr)
DE (1) DE2619071A1 (fr)
FR (1) FR2312104A1 (fr)
IL (1) IL49397A0 (fr)
IT (1) IT1061555B (fr)
SE (1) SE7605585L (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2349209A1 (fr) * 1976-04-20 1977-11-18 Hughes Aircraft Co Source a plasma d'ions et d'electrons
FR2494487A1 (fr) * 1980-11-14 1982-05-21 Kreindel July Source d'electrons et d'ions
EP2079092A1 (fr) * 2008-01-11 2009-07-15 Excico Group Dispositif et procédé d'alimentation électrique d'une source d'électrons et source d'électrons à émission secondaire sous bombardement ionique
FR2926395A1 (fr) * 2008-01-11 2009-07-17 Excico Group Source pulsee d'electrons, procede d'alimentation electrique pour source pulsee d'electrons et procede de commande d'une source pulsee d'electrons

Families Citing this family (43)

* Cited by examiner, † Cited by third party
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US4095115A (en) * 1976-12-27 1978-06-13 Accelerators, Inc. Ozone generation apparatus and method
US4755722A (en) * 1984-04-02 1988-07-05 Rpc Industries Ion plasma electron gun
US4694222A (en) * 1984-04-02 1987-09-15 Rpc Industries Ion plasma electron gun
US4647818A (en) * 1984-04-16 1987-03-03 Sfe Technologies Nonthermionic hollow anode gas discharge electron beam source
US4642522A (en) * 1984-06-18 1987-02-10 Hughes Aircraft Company Wire-ion-plasma electron gun employing auxiliary grid
FR2591035B1 (fr) * 1985-11-29 1988-02-26 Onera (Off Nat Aerospatiale) Canon a electrons operant par emission secondaire sous bombardement ionique
US4707637A (en) * 1986-03-24 1987-11-17 Hughes Aircraft Company Plasma-anode electron gun
US4737688A (en) * 1986-07-22 1988-04-12 Applied Electron Corporation Wide area source of multiply ionized atomic or molecular species
US4786844A (en) * 1987-03-30 1988-11-22 Rpc Industries Wire ion plasma gun
US4749911A (en) * 1987-03-30 1988-06-07 Rpc Industries Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge
EP0336282B1 (fr) * 1988-04-08 1992-06-10 Siemens Aktiengesellschaft Tube à rayons X à plasma, en particulier pour la préionisation des lasers à gaz, méthode de génération de rayons X avec un tel tube et utilisation de ce dernier
US4910435A (en) * 1988-07-20 1990-03-20 American International Technologies, Inc. Remote ion source plasma electron gun
US5003178A (en) * 1988-11-14 1991-03-26 Electron Vision Corporation Large-area uniform electron source
US5003226A (en) * 1989-11-16 1991-03-26 Avco Research Laboratories Plasma cathode
US5202910A (en) * 1990-08-28 1993-04-13 North American Philips Corporation Anode for arc discharge devices
US5317235A (en) * 1993-03-22 1994-05-31 Ism Technolog Magnetically-filtered cathodic arc plasma apparatus
US5561298A (en) * 1994-02-09 1996-10-01 Hughes Aircraft Company Destruction of contaminants using a low-energy electron beam
US6271529B1 (en) 1997-12-01 2001-08-07 Ebara Corporation Ion implantation with charge neutralization
US6027616A (en) * 1998-05-01 2000-02-22 Mse Technology Applications, Inc. Extraction of contaminants from a gas
US8891583B2 (en) 2000-11-15 2014-11-18 Ati Properties, Inc. Refining and casting apparatus and method
US6496529B1 (en) * 2000-11-15 2002-12-17 Ati Properties, Inc. Refining and casting apparatus and method
DE10215040B4 (de) 2002-04-05 2019-02-21 Leybold Optics Gmbh Vorrichtung und Verfahren zum Be- und Entladen einer Vakuumkammer
US6975073B2 (en) * 2003-05-19 2005-12-13 George Wakalopulos Ion plasma beam generating device
AU2003291513A1 (en) * 2003-11-12 2005-06-29 International Business Machines Corporation Ionization test for electrical verification
US7695590B2 (en) 2004-03-26 2010-04-13 Applied Materials, Inc. Chemical vapor deposition plasma reactor having plural ion shower grids
US8058156B2 (en) * 2004-07-20 2011-11-15 Applied Materials, Inc. Plasma immersion ion implantation reactor having multiple ion shower grids
US7767561B2 (en) 2004-07-20 2010-08-03 Applied Materials, Inc. Plasma immersion ion implantation reactor having an ion shower grid
US20060243379A1 (en) * 2005-04-29 2006-11-02 E-Beam & Light, Inc. Method and apparatus for lamination by electron beam irradiation
US7578960B2 (en) * 2005-09-22 2009-08-25 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US7803211B2 (en) * 2005-09-22 2010-09-28 Ati Properties, Inc. Method and apparatus for producing large diameter superalloy ingots
US7803212B2 (en) * 2005-09-22 2010-09-28 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US8381047B2 (en) * 2005-11-30 2013-02-19 Microsoft Corporation Predicting degradation of a communication channel below a threshold based on data transmission errors
US8748773B2 (en) * 2007-03-30 2014-06-10 Ati Properties, Inc. Ion plasma electron emitters for a melting furnace
BRPI0809581A2 (pt) 2007-03-30 2019-03-12 Ati Properties Inc fornalha de fusão incluindo emissor de elétrons de plasma de íon descarregado por filamento
US7798199B2 (en) * 2007-12-04 2010-09-21 Ati Properties, Inc. Casting apparatus and method
ATE554497T1 (de) 2008-01-11 2012-05-15 Excico Group N V Ionenquelle mit elektrischer entladung über glühfaden
WO2009112667A1 (fr) * 2008-01-11 2009-09-17 Excico Group Source d'ions à décharge électrique par filament
KR101025932B1 (ko) * 2008-10-06 2011-03-30 김용환 전자빔 후처리를 이용한 투명성 산화 전극 제조 방법
JP5380263B2 (ja) * 2009-12-15 2014-01-08 キヤノンアネルバ株式会社 イオンビーム発生器
US8747956B2 (en) 2011-08-11 2014-06-10 Ati Properties, Inc. Processes, systems, and apparatus for forming products from atomized metals and alloys
US9257253B1 (en) * 2014-08-21 2016-02-09 Altair Technologies, Inc. Systems and methods utilizing a triode hollow cathode electron gun for linear particle accelerators
CN112582247B (zh) * 2020-12-14 2023-09-12 北京无线电计量测试研究所 一种用于囚禁离子的小型真空装置和方法
DE102023101628A1 (de) 2023-01-24 2024-07-25 Carl Zeiss Microscopy Gmbh Teilchenstrahlmikroskop

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3831052A (en) * 1973-05-25 1974-08-20 Hughes Aircraft Co Hollow cathode gas discharge device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2349209A1 (fr) * 1976-04-20 1977-11-18 Hughes Aircraft Co Source a plasma d'ions et d'electrons
FR2494487A1 (fr) * 1980-11-14 1982-05-21 Kreindel July Source d'electrons et d'ions
EP2079092A1 (fr) * 2008-01-11 2009-07-15 Excico Group Dispositif et procédé d'alimentation électrique d'une source d'électrons et source d'électrons à émission secondaire sous bombardement ionique
FR2926395A1 (fr) * 2008-01-11 2009-07-17 Excico Group Source pulsee d'electrons, procede d'alimentation electrique pour source pulsee d'electrons et procede de commande d'une source pulsee d'electrons
WO2009106759A1 (fr) * 2008-01-11 2009-09-03 Excico Group Source puisée d'électrons, procédé d'alimentation électrique pour source puisée d'électrons et procédé de commande d'une source puisée d'électrons
WO2009112668A1 (fr) * 2008-01-11 2009-09-17 Excico Group Dispositif et procédé d'alimentation électrique d'une source d'électrons et source d'électrons à émission secondaire sous bombardement ionique
CN101952926B (zh) * 2008-01-11 2012-11-21 埃克西可集团公司 脉冲电子源、脉冲电子源的供电方法和控制脉冲电子源的方法
US8664863B2 (en) 2008-01-11 2014-03-04 Excico Group Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
US8698402B2 (en) 2008-01-11 2014-04-15 Excico Group Pulsed electron source, power supply method for pulsed electron source and method for controlling a pulsed electron source
TWI470919B (zh) * 2008-01-11 2015-01-21 Excico Group Nv An electron source and a secondary emission electron source under an ion impact

Also Published As

Publication number Publication date
US3970892A (en) 1976-07-20
JPS51141574A (en) 1976-12-06
IT1061555B (it) 1983-04-30
DE2619071A1 (de) 1976-12-02
SE7605585L (sv) 1976-11-20
IL49397A0 (en) 1976-09-30
FR2312104B3 (fr) 1979-03-16

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Legal Events

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