BRPI0515658A - método de microusinagem a laser, sistema para definir uma trajetória de fluido através de um substrato e meio lido por computador - Google Patents
método de microusinagem a laser, sistema para definir uma trajetória de fluido através de um substrato e meio lido por computadorInfo
- Publication number
- BRPI0515658A BRPI0515658A BRPI0515658-0A BRPI0515658A BRPI0515658A BR PI0515658 A BRPI0515658 A BR PI0515658A BR PI0515658 A BRPI0515658 A BR PI0515658A BR PI0515658 A BRPI0515658 A BR PI0515658A
- Authority
- BR
- Brazil
- Prior art keywords
- substrate
- defining
- fluid path
- computer readable
- readable medium
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 4
- 239000012530 fluid Substances 0.000 title abstract 2
- 238000005459 micromachining Methods 0.000 title 1
- 238000003754 machining Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US60953004P | 2004-09-13 | 2004-09-13 | |
| US10/976,555 US7923658B2 (en) | 2004-09-13 | 2004-10-29 | Laser micromachining methods and systems |
| PCT/US2005/027113 WO2006031303A1 (en) | 2004-09-13 | 2005-07-29 | Laser micromachining methods and systems using a liquid as an assist medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BRPI0515658A true BRPI0515658A (pt) | 2008-07-29 |
Family
ID=35285436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BRPI0515658-0A BRPI0515658A (pt) | 2004-09-13 | 2005-07-29 | método de microusinagem a laser, sistema para definir uma trajetória de fluido através de um substrato e meio lido por computador |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7923658B2 (https=) |
| EP (1) | EP1817135A1 (https=) |
| JP (1) | JP5112868B2 (https=) |
| BR (1) | BRPI0515658A (https=) |
| MX (1) | MX2007002935A (https=) |
| WO (1) | WO2006031303A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080220612A1 (en) * | 2007-03-06 | 2008-09-11 | Ute Drechsler | Protection of polymer surfaces during micro-fabrication |
| US20090020511A1 (en) * | 2007-07-17 | 2009-01-22 | Kommera Swaroop K | Ablation |
| CN109434301B (zh) * | 2018-11-09 | 2020-09-25 | 科立视材料科技有限公司 | 一种可调节平面方向的激光加工载台及其使用方法 |
| CN114571107B (zh) * | 2022-03-28 | 2023-02-21 | 北京理工大学 | 一种超声辅助飞秒激光嵌套加工密封容器阳性微孔的方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3556600A (en) | 1968-08-30 | 1971-01-19 | Westinghouse Electric Corp | Distribution and cutting of rocks,glass and the like |
| US3656988A (en) | 1969-02-27 | 1972-04-18 | Watch Stones Co Ltd | Method for the fabrication of holes in a workpiece by means of laser-beams and apparatus for the performance of the aforesaid method |
| WO1997007928A2 (en) | 1995-08-31 | 1997-03-06 | Biolase Technology, Inc. | User programmable combination of atomized particles for electromagnetically induced cutting |
| US5742028A (en) | 1996-07-24 | 1998-04-21 | General Electric Company | Preloaded laser shock peening |
| US5773791A (en) | 1996-09-03 | 1998-06-30 | Kuykendal; Robert | Water laser machine tool |
| JP2000117480A (ja) | 1998-10-15 | 2000-04-25 | Fanuc Ltd | レーザ加工機 |
| WO2000050198A1 (en) | 1999-02-25 | 2000-08-31 | Seiko Epson Corporation | Method for machining work by laser beam |
| US6333488B1 (en) | 1999-08-30 | 2001-12-25 | General Electric Company | Method for setting up and controlling confinement media flow in laser shock peening |
| US6720522B2 (en) | 2000-10-26 | 2004-04-13 | Kabushiki Kaisha Toshiba | Apparatus and method for laser beam machining, and method for manufacturing semiconductor devices using laser beam machining |
| JP2004515365A (ja) * | 2000-12-15 | 2004-05-27 | エグシル テクノロジー リミテッド | 半導体材料のレーザー加工 |
| US6765174B2 (en) | 2001-02-05 | 2004-07-20 | Denso Corporation | Method for machining grooves by a laser and honeycomb structure forming die and method for producing the same die |
| JP2002240294A (ja) * | 2001-02-21 | 2002-08-28 | Ricoh Co Ltd | 液滴吐出ヘッド及びその製造方法並びにインクジェット記録装置 |
| EP1404481B1 (en) * | 2001-03-22 | 2006-04-19 | Xsil Technology Limited | A laser machining system and method |
| IL159431A0 (en) | 2001-07-02 | 2004-06-01 | Virtek Laser Systems Inc | Method of ablating an opening in a hard, non-metallic substrate |
| JP2003151924A (ja) * | 2001-08-28 | 2003-05-23 | Tokyo Seimitsu Co Ltd | ダイシング方法およびダイシング装置 |
| WO2003028943A1 (en) | 2001-10-03 | 2003-04-10 | Lambda Physik Application Center, L.L.C. | Method and apparatus for fine liquid spray assisted laser material processing |
| US20030062126A1 (en) | 2001-10-03 | 2003-04-03 | Scaggs Michael J. | Method and apparatus for assisting laser material processing |
| TWI236944B (en) * | 2001-12-17 | 2005-08-01 | Tokyo Electron Ltd | Film removal method and apparatus, and substrate processing system |
| US7994450B2 (en) | 2002-01-07 | 2011-08-09 | International Business Machines Corporation | Debris minimization and improved spatial resolution in pulsed laser ablation of materials |
| JP4079309B2 (ja) * | 2002-02-12 | 2008-04-23 | 株式会社リコー | ノズル加工装置及びノズル加工方法 |
| JP2003324263A (ja) | 2002-04-30 | 2003-11-14 | Ngk Spark Plug Co Ltd | プリント配線基板の製造方法 |
| JP4043923B2 (ja) | 2002-11-22 | 2008-02-06 | 東京エレクトロン株式会社 | 加工装置 |
| US7893386B2 (en) | 2003-11-14 | 2011-02-22 | Hewlett-Packard Development Company, L.P. | Laser micromachining and methods of same |
-
2004
- 2004-10-29 US US10/976,555 patent/US7923658B2/en not_active Expired - Fee Related
-
2005
- 2005-07-29 JP JP2007531168A patent/JP5112868B2/ja not_active Expired - Fee Related
- 2005-07-29 WO PCT/US2005/027113 patent/WO2006031303A1/en not_active Ceased
- 2005-07-29 EP EP20050776605 patent/EP1817135A1/en not_active Withdrawn
- 2005-07-29 BR BRPI0515658-0A patent/BRPI0515658A/pt not_active IP Right Cessation
- 2005-07-29 MX MX2007002935A patent/MX2007002935A/es unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US7923658B2 (en) | 2011-04-12 |
| JP5112868B2 (ja) | 2013-01-09 |
| JP2008512250A (ja) | 2008-04-24 |
| US20060054605A1 (en) | 2006-03-16 |
| WO2006031303A1 (en) | 2006-03-23 |
| MX2007002935A (es) | 2007-05-24 |
| EP1817135A1 (en) | 2007-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B07A | Application suspended after technical examination (opinion) [chapter 7.1 patent gazette] | ||
| B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] |
Free format text: REFERENTE A 8A ANUIDADE. |
|
| B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] |
Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 2256 DE 01/04/2014. |