BR9707547A - Processo para a determinação de uma espessura de uma camada de material eletricamente condutor - Google Patents

Processo para a determinação de uma espessura de uma camada de material eletricamente condutor

Info

Publication number
BR9707547A
BR9707547A BR9707547A BR9707547A BR9707547A BR 9707547 A BR9707547 A BR 9707547A BR 9707547 A BR9707547 A BR 9707547A BR 9707547 A BR9707547 A BR 9707547A BR 9707547 A BR9707547 A BR 9707547A
Authority
BR
Brazil
Prior art keywords
determining
thickness
layer
conductive material
electrically conductive
Prior art date
Application number
BR9707547A
Other languages
English (en)
Inventor
Klaus Dobler
Hansjoerg Hachtel
Reinhard Dimke
Der Heide Franz Auf
Richard Blattert
Josef Weber
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of BR9707547A publication Critical patent/BR9707547A/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
BR9707547A 1996-12-18 1997-11-08 Processo para a determinação de uma espessura de uma camada de material eletricamente condutor BR9707547A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19652750A DE19652750C2 (de) 1996-12-18 1996-12-18 Verfahren zur Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material
PCT/DE1997/002615 WO1998027400A1 (de) 1996-12-18 1997-11-08 Verfahren zur bestimmung einer dicke einer schicht aus elektrisch leitendem material

Publications (1)

Publication Number Publication Date
BR9707547A true BR9707547A (pt) 1999-07-27

Family

ID=7815183

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9707547A BR9707547A (pt) 1996-12-18 1997-11-08 Processo para a determinação de uma espessura de uma camada de material eletricamente condutor

Country Status (10)

Country Link
US (1) US6198278B1 (pt)
EP (1) EP0891532B1 (pt)
JP (1) JP4233609B2 (pt)
KR (1) KR100485199B1 (pt)
CN (1) CN1133865C (pt)
AU (1) AU726794B2 (pt)
BR (1) BR9707547A (pt)
DE (2) DE19652750C2 (pt)
ES (1) ES2218708T3 (pt)
WO (1) WO1998027400A1 (pt)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19820546C1 (de) * 1998-05-08 1999-11-04 Bosch Gmbh Robert Verfahren zur Eliminierung von Meßfehlern bei der Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material
DE19951015C1 (de) 1999-10-22 2001-01-25 Bosch Gmbh Robert Verfahren zur Charakterisierung von Metallelektroden keramischer Sensorelemente
JP4643782B2 (ja) * 1999-12-10 2011-03-02 株式会社キーエンス 渦電流式変位計とそれを用いた距離測定方法
WO2001046684A1 (en) * 1999-12-23 2001-06-28 Kla-Tencor Corporation In-situ metalization monitoring using eddy current measurements and optical measurements
DE102004034081A1 (de) 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material
DE102004034083A1 (de) 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Schichtdicke durch Widerstands- und Induktivitätsmessung einer Sensorspule
JP4699797B2 (ja) * 2005-04-20 2011-06-15 株式会社リベックス 測定方法および装置
US7282909B2 (en) * 2005-06-29 2007-10-16 Lam Research Corporation Methods and apparatus for determining the thickness of a conductive layer on a substrate
DE102006025356A1 (de) * 2006-05-31 2007-12-06 Siemens Ag Verfahren zum Bestimmen der Schichtdicke einer elektrisch leitfähigen Beschichtung auf einem elektrisch leitfähigen Substrat
CN102023477B (zh) * 2009-09-17 2013-06-19 中芯国际集成电路制造(上海)有限公司 光刻方法
CN101788260B (zh) * 2010-03-18 2011-12-28 清华大学 一种金属薄膜厚度的电涡流测量方法
CN102759722A (zh) * 2012-07-17 2012-10-31 江苏省晶石磁性材料与器件工程技术研究有限公司 一种锰锌铁氧体粉体磁化强度测试装置及方法
CN103852000B (zh) * 2014-03-24 2016-05-25 电子科技大学 多层导电涂层厚度的涡流检测方法和装置
WO2018119160A1 (en) * 2016-12-20 2018-06-28 Nickel Greg Devices, systems and methods for evaluating objects subject to repair or other alteration
DE102018206794A1 (de) 2018-05-03 2019-11-07 Robert Bosch Gmbh Verfahren zur Vermessung von Elektrodenfilmen
DE102019112238A1 (de) * 2019-05-10 2020-11-12 HELLA GmbH & Co. KGaA Verfahren zur Kontrolle der Beschichtung eines elektronischen Bauteils

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1237335B (de) * 1963-12-03 1967-03-23 Dr Phil Friedrich Foerster Anordnung zur Messung von Schichtdicken nichtferromagnetischer Medien auf ferromagnetischem Material
FR2071173A5 (pt) * 1969-12-19 1971-09-17 Centre Scient Tech Batiment
GB2145827B (en) * 1983-08-31 1987-04-08 Fischer Gmbh & Co Inst Fur Ele Electromagnetic measuring probe
DE3404720A1 (de) * 1984-02-10 1985-08-14 Karl Deutsch Prüf- und Meßgerätebau GmbH + Co KG, 5600 Wuppertal Verfahren und vorrichtung zur schichtdickenmessung
DE4119903C5 (de) * 1991-06-17 2005-06-30 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Verfahren und Vorrichtung zur Messung dünner Schichten
DE4227735C2 (de) * 1992-08-21 1995-10-12 Leybold Ag Anordnung zum berührungslosen Messen der Dicke von Schichten
US5343146A (en) * 1992-10-05 1994-08-30 De Felsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
DE4327712C2 (de) * 1993-08-18 1997-07-10 Micro Epsilon Messtechnik Sensoranordnung und Verfahren zum Erfassen von Eigenschaften der Oberflächenschicht eines metallischen Targets

Also Published As

Publication number Publication date
JP4233609B2 (ja) 2009-03-04
DE19652750C2 (de) 1999-12-02
AU726794B2 (en) 2000-11-23
US6198278B1 (en) 2001-03-06
WO1998027400A1 (de) 1998-06-25
AU5307298A (en) 1998-07-15
KR100485199B1 (ko) 2005-08-17
ES2218708T3 (es) 2004-11-16
JP2000505905A (ja) 2000-05-16
DE59711472D1 (de) 2004-05-06
CN1210584A (zh) 1999-03-10
KR19990082635A (ko) 1999-11-25
DE19652750A1 (de) 1998-07-02
EP0891532A1 (de) 1999-01-20
CN1133865C (zh) 2004-01-07
EP0891532B1 (de) 2004-03-31

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Legal Events

Date Code Title Description
FB36 Technical and formal requirements: requirement - article 36 of industrial property law
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 08/11/1997, OBSERVADAS AS CONDICOES LEGAIS.

B15K Others concerning applications: alteration of classification

Free format text: PROCEDIMENTO AUTOMATICO DE RECLASSIFICACAO. AS CLASSIFICACOES IPC ANTERIORES ERAM: G01B 7/06; G01B 121/02; G01B 101/00.

Ipc: G01B 7/06 (2006.01)

Ipc: G01B 7/06 (2006.01)

B21A Expiry acc. art. 78, item i of ipl- expiry of the term of protection