BR9000665A - Processos para formar uma pelicula sobre um substrato - Google Patents

Processos para formar uma pelicula sobre um substrato

Info

Publication number
BR9000665A
BR9000665A BR909000665A BR9000665A BR9000665A BR 9000665 A BR9000665 A BR 9000665A BR 909000665 A BR909000665 A BR 909000665A BR 9000665 A BR9000665 A BR 9000665A BR 9000665 A BR9000665 A BR 9000665A
Authority
BR
Brazil
Prior art keywords
processes
substrate
film
Prior art date
Application number
BR909000665A
Other languages
English (en)
Inventor
David Mark Dobuzinsky
Mark Charles Hakey
Steven John Holmes
David Vaclav Horak
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of BR9000665A publication Critical patent/BR9000665A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/167—Coating processes; Apparatus therefor from the gas phase, by plasma deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0754—Non-macromolecular compounds containing silicon-to-silicon bonds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Thermal Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Silicon Polymers (AREA)
  • Physical Vapour Deposition (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Formation Of Insulating Films (AREA)
  • Paints Or Removers (AREA)
  • Chemical Vapour Deposition (AREA)
BR909000665A 1989-02-15 1990-02-14 Processos para formar uma pelicula sobre um substrato BR9000665A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31132689A 1989-02-15 1989-02-15

Publications (1)

Publication Number Publication Date
BR9000665A true BR9000665A (pt) 1991-01-15

Family

ID=23206394

Family Applications (1)

Application Number Title Priority Date Filing Date
BR909000665A BR9000665A (pt) 1989-02-15 1990-02-14 Processos para formar uma pelicula sobre um substrato

Country Status (12)

Country Link
EP (1) EP0382932B1 (pt)
JP (1) JPH0739629B2 (pt)
KR (1) KR920005620B1 (pt)
CN (1) CN1029043C (pt)
AU (1) AU624467B2 (pt)
BR (1) BR9000665A (pt)
CA (1) CA1334911C (pt)
DE (1) DE68919346T2 (pt)
HK (1) HK90595A (pt)
MX (1) MX172109B (pt)
MY (1) MY110289A (pt)
PH (1) PH27127A (pt)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643655A (ja) * 1991-03-04 1994-02-18 Internatl Business Mach Corp <Ibm> レジスト画像の生成プロセス及び電子デバイス
DE4202652C2 (de) * 1992-01-30 1996-03-28 Fraunhofer Ges Forschung Verfahren zum Aufbringen einer UV- und/oder elektronenstrahlempfindlichen Lackschicht
DE4202651A1 (de) * 1992-01-30 1993-08-05 Fraunhofer Ges Forschung Verfahren zur trockenentwicklung einer siliziumhaltigen ultraviolett- und/oder elektronenstrahlempfindlichen lackschicht
US5635338A (en) * 1992-04-29 1997-06-03 Lucent Technologies Inc. Energy sensitive materials and methods for their use
US5439780A (en) * 1992-04-29 1995-08-08 At&T Corp. Energy sensitive materials and methods for their use
CA2137928C (en) 1992-07-04 2002-01-29 Christopher David Dobson A method of treating a semiconductor wafer
WO1995006900A1 (fr) * 1993-09-03 1995-03-09 Hitachi, Ltd. Procede et appareil de realisation de motifs
US5858880A (en) * 1994-05-14 1999-01-12 Trikon Equipment Limited Method of treating a semi-conductor wafer
JP2001504989A (ja) 1996-08-24 2001-04-10 トリコン エクウィプメンツ リミテッド 平坦化された誘電層を半導体基板上に堆積させるための方法及び装置
US5885751A (en) * 1996-11-08 1999-03-23 Applied Materials, Inc. Method and apparatus for depositing deep UV photoresist films
US7488693B2 (en) 2004-02-17 2009-02-10 Toagosei Co., Ltd. Method for producing silicon oxide film
CN101402446B (zh) * 2008-11-06 2011-06-01 西安交通大学 一种减阻表面的制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4348473A (en) * 1981-03-04 1982-09-07 Xerox Corporation Dry process for the production of microelectronic devices
US4460436A (en) * 1983-09-06 1984-07-17 International Business Machines Corporation Deposition of polymer films by means of ion beams
JPS6250337A (ja) * 1985-08-28 1987-03-05 Nippon Sheet Glass Co Ltd プラズマ重合による保護膜形成方法
US4781942A (en) * 1985-12-19 1988-11-01 Hughes Aircraft Company Process for the photochemical vapor deposition of siloxane polymers
JP2528471B2 (ja) * 1987-06-22 1996-08-28 出光興産株式会社 ジクロロシラン類の製造方法

Also Published As

Publication number Publication date
JPH02263981A (ja) 1990-10-26
MY110289A (en) 1998-04-30
MX172109B (es) 1993-12-03
AU624467B2 (en) 1992-06-11
AU4778890A (en) 1990-08-23
KR920005620B1 (ko) 1992-07-10
EP0382932A3 (en) 1990-12-05
CA1334911C (en) 1995-03-28
EP0382932A2 (en) 1990-08-22
EP0382932B1 (en) 1994-11-09
DE68919346D1 (de) 1994-12-15
CN1029043C (zh) 1995-06-21
DE68919346T2 (de) 1995-05-24
PH27127A (en) 1993-03-16
KR900013102A (ko) 1990-09-03
HK90595A (en) 1995-06-16
CN1044995A (zh) 1990-08-29
JPH0739629B2 (ja) 1995-05-01

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Legal Events

Date Code Title Description
FB20 Grant procedure suspended (art. 20)
FB36 Technical and formal requirements: requirement - article 36 of industrial property law
FA8 Dismissal: dismissal - article 36, par. 1 of industrial property law