BR8901586A - Processo para formar uma camada de oxido de zinco transparente eletricamente condutor sobre um substrato e a referida camada - Google Patents
Processo para formar uma camada de oxido de zinco transparente eletricamente condutor sobre um substrato e a referida camadaInfo
- Publication number
- BR8901586A BR8901586A BR898901586A BR8901586A BR8901586A BR 8901586 A BR8901586 A BR 8901586A BR 898901586 A BR898901586 A BR 898901586A BR 8901586 A BR8901586 A BR 8901586A BR 8901586 A BR8901586 A BR 8901586A
- Authority
- BR
- Brazil
- Prior art keywords
- layer
- substrate
- electrically conductive
- zinc oxide
- transparent electrically
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
- C23C18/1216—Metal oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1291—Process of deposition of the inorganic material by heating of the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
- C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Ceramic Engineering (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8808036A GB2216903A (en) | 1988-04-06 | 1988-04-06 | Transparent conductive zinc oxide layer |
Publications (1)
Publication Number | Publication Date |
---|---|
BR8901586A true BR8901586A (pt) | 1989-11-21 |
Family
ID=10634656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR898901586A BR8901586A (pt) | 1988-04-06 | 1989-04-04 | Processo para formar uma camada de oxido de zinco transparente eletricamente condutor sobre um substrato e a referida camada |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0336574A1 (ja) |
JP (1) | JPH01301515A (ja) |
KR (1) | KR890016715A (ja) |
AU (1) | AU609277B2 (ja) |
BR (1) | BR8901586A (ja) |
GB (2) | GB2216903A (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2661623B1 (fr) * | 1989-04-04 | 1992-07-17 | Commissariat Energie Atomique | Systeme d'injection d'aerosol pour elaboration de couches composites par pyrolyse. |
US5190592A (en) * | 1990-05-02 | 1993-03-02 | Commissariat A L'energie Atomique | Aerosol injection system for producing composite layers by pyrolysis |
DE4304679C2 (de) * | 1992-02-17 | 1996-03-21 | Mitsubishi Electric Corp | Verfahren zur Herstellung einer dünnen dielektrischen Schicht eines Oxid-Systems unter Verwendung des CVD-Verfahrens |
DE19719162C2 (de) * | 1997-05-06 | 2001-02-08 | Fraunhofer Ges Forschung | Verfahren zur Herstellung einer elektrisch leitenden ZnO enthaltenden Schicht auf einem Substrat |
KR20010066533A (ko) * | 1999-12-31 | 2001-07-11 | 정종순 | 안정한 코팅용 기화물 생성방법 및 장치 |
JP4114060B2 (ja) | 2003-02-06 | 2008-07-09 | セイコーエプソン株式会社 | 受光素子の製造方法 |
US8354294B2 (en) * | 2006-01-24 | 2013-01-15 | De Rochemont L Pierre | Liquid chemical deposition apparatus and process and products therefrom |
US10016785B2 (en) | 2011-09-13 | 2018-07-10 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Oxide film deposition method and oxide film deposition device |
CN108138319B (zh) * | 2015-10-19 | 2020-12-01 | 东芝三菱电机产业系统株式会社 | 成膜装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB704793A (en) * | 1951-04-11 | 1954-03-03 | Pittsburgh Plate Glass Co | Method of producing an electroconductive article |
BE526755A (ja) * | 1953-02-24 | 1900-01-01 | ||
US2791521A (en) * | 1953-04-02 | 1957-05-07 | Gen Electric | Electric resistance device provided with zinc oxide electroconductive coating |
DE1496590C3 (de) * | 1964-10-16 | 1973-10-31 | N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) | Verfahren zur Herstellung von warme reflektierenden SnO tief 2 Schichten mit reproduzierbaren optischen und elektrischen Eigenschaften auf Tragern |
US4006378A (en) * | 1975-10-01 | 1977-02-01 | General Electric Company | Optical coating with selectable transmittance characteristics and method of making the same |
DE3166609D1 (en) * | 1980-07-28 | 1984-11-15 | Monsanto Co | Improved method for producing semiconductor grade silicon |
GB2131792A (en) * | 1982-12-10 | 1984-06-27 | Glaverbel | Vitreous material bearing a multi-layer coating and method and apparatus for forming such coating |
GB2139612B (en) * | 1983-05-13 | 1987-03-11 | Glaverbel | Coating a hot vitreous substrate |
EP0223787B1 (en) * | 1985-05-10 | 1992-03-18 | General Electric Company | Selective chemical vapor deposition method and apparatus |
-
1988
- 1988-04-06 GB GB8808036A patent/GB2216903A/en not_active Withdrawn
-
1989
- 1989-03-14 GB GB898905797A patent/GB8905797D0/en active Pending
- 1989-03-14 EP EP89302495A patent/EP0336574A1/en not_active Ceased
- 1989-04-04 BR BR898901586A patent/BR8901586A/pt unknown
- 1989-04-05 AU AU32456/89A patent/AU609277B2/en not_active Ceased
- 1989-04-06 KR KR1019890004518A patent/KR890016715A/ko not_active Application Discontinuation
- 1989-04-06 JP JP1085873A patent/JPH01301515A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB2216903A (en) | 1989-10-18 |
GB8905797D0 (en) | 1989-04-26 |
AU3245689A (en) | 1989-10-19 |
JPH01301515A (ja) | 1989-12-05 |
EP0336574A1 (en) | 1989-10-11 |
GB8808036D0 (en) | 1988-05-05 |
KR890016715A (ko) | 1989-11-29 |
AU609277B2 (en) | 1991-04-26 |
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