GB8905797D0 - Producing a layer of transparent conductive zinc oxide - Google Patents

Producing a layer of transparent conductive zinc oxide

Info

Publication number
GB8905797D0
GB8905797D0 GB898905797A GB8905797A GB8905797D0 GB 8905797 D0 GB8905797 D0 GB 8905797D0 GB 898905797 A GB898905797 A GB 898905797A GB 8905797 A GB8905797 A GB 8905797A GB 8905797 D0 GB8905797 D0 GB 8905797D0
Authority
GB
United Kingdom
Prior art keywords
producing
layer
zinc oxide
transparent conductive
conductive zinc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB898905797A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imperial Chemical Industries Ltd
Original Assignee
Imperial Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imperial Chemical Industries Ltd filed Critical Imperial Chemical Industries Ltd
Publication of GB8905797D0 publication Critical patent/GB8905797D0/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1291—Process of deposition of the inorganic material by heating of the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Surface Treatment Of Glass (AREA)
GB898905797A 1988-04-06 1989-03-14 Producing a layer of transparent conductive zinc oxide Pending GB8905797D0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8808036A GB2216903A (en) 1988-04-06 1988-04-06 Transparent conductive zinc oxide layer

Publications (1)

Publication Number Publication Date
GB8905797D0 true GB8905797D0 (en) 1989-04-26

Family

ID=10634656

Family Applications (2)

Application Number Title Priority Date Filing Date
GB8808036A Withdrawn GB2216903A (en) 1988-04-06 1988-04-06 Transparent conductive zinc oxide layer
GB898905797A Pending GB8905797D0 (en) 1988-04-06 1989-03-14 Producing a layer of transparent conductive zinc oxide

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB8808036A Withdrawn GB2216903A (en) 1988-04-06 1988-04-06 Transparent conductive zinc oxide layer

Country Status (6)

Country Link
EP (1) EP0336574A1 (en)
JP (1) JPH01301515A (en)
KR (1) KR890016715A (en)
AU (1) AU609277B2 (en)
BR (1) BR8901586A (en)
GB (2) GB2216903A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2661623B1 (en) * 1989-04-04 1992-07-17 Commissariat Energie Atomique AEROSOL INJECTION SYSTEM FOR PREPARING COMPOSITE LAYERS BY PYROLYSIS.
US5190592A (en) * 1990-05-02 1993-03-02 Commissariat A L'energie Atomique Aerosol injection system for producing composite layers by pyrolysis
DE4304679C2 (en) * 1992-02-17 1996-03-21 Mitsubishi Electric Corp Process for producing a thin dielectric layer of an oxide system using the CVD process
DE19719162C2 (en) * 1997-05-06 2001-02-08 Fraunhofer Ges Forschung Process for producing an electrically conductive layer containing ZnO on a substrate
KR20010066533A (en) * 1999-12-31 2001-07-11 정종순 Vaporization method and equipment for preparation of stable vapor mixture for coating
JP4114060B2 (en) 2003-02-06 2008-07-09 セイコーエプソン株式会社 Manufacturing method of light receiving element
US8354294B2 (en) * 2006-01-24 2013-01-15 De Rochemont L Pierre Liquid chemical deposition apparatus and process and products therefrom
WO2013038484A1 (en) * 2011-09-13 2013-03-21 東芝三菱電機産業システム株式会社 Oxide film deposition method and oxide film deposition device
JP6510667B2 (en) * 2015-10-19 2019-05-08 東芝三菱電機産業システム株式会社 Film deposition system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB704793A (en) * 1951-04-11 1954-03-03 Pittsburgh Plate Glass Co Method of producing an electroconductive article
BE538192A (en) * 1953-02-24 1900-01-01
US2791521A (en) * 1953-04-02 1957-05-07 Gen Electric Electric resistance device provided with zinc oxide electroconductive coating
DE1496590C3 (en) * 1964-10-16 1973-10-31 N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) Process for the production of warm reflective SnO deep 2 layers with reproducible optical and electrical properties on carriers
US4006378A (en) * 1975-10-01 1977-02-01 General Electric Company Optical coating with selectable transmittance characteristics and method of making the same
DE3166609D1 (en) * 1980-07-28 1984-11-15 Monsanto Co Improved method for producing semiconductor grade silicon
GB2131792A (en) * 1982-12-10 1984-06-27 Glaverbel Vitreous material bearing a multi-layer coating and method and apparatus for forming such coating
GB2139612B (en) * 1983-05-13 1987-03-11 Glaverbel Coating a hot vitreous substrate
DE3684414D1 (en) * 1985-05-10 1992-04-23 Gen Electric METHOD AND DEVICE FOR SELECTIVE CHEMICAL EVAPORATION.

Also Published As

Publication number Publication date
EP0336574A1 (en) 1989-10-11
GB8808036D0 (en) 1988-05-05
GB2216903A (en) 1989-10-18
AU3245689A (en) 1989-10-19
BR8901586A (en) 1989-11-21
KR890016715A (en) 1989-11-29
JPH01301515A (en) 1989-12-05
AU609277B2 (en) 1991-04-26

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