BR112022020214A2 - Método para inspecionar opticamente uma superfície de um objeto, utilização do método e dispositivo de inspeção para inspecionar opticamente uma superfície de um objeto - Google Patents

Método para inspecionar opticamente uma superfície de um objeto, utilização do método e dispositivo de inspeção para inspecionar opticamente uma superfície de um objeto

Info

Publication number
BR112022020214A2
BR112022020214A2 BR112022020214A BR112022020214A BR112022020214A2 BR 112022020214 A2 BR112022020214 A2 BR 112022020214A2 BR 112022020214 A BR112022020214 A BR 112022020214A BR 112022020214 A BR112022020214 A BR 112022020214A BR 112022020214 A2 BR112022020214 A2 BR 112022020214A2
Authority
BR
Brazil
Prior art keywords
pattern
image capture
optically inspecting
sequence
inspection device
Prior art date
Application number
BR112022020214A
Other languages
English (en)
Inventor
Leute Stefan
Harada Koichi
Original Assignee
Isra Vision Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Isra Vision Gmbh filed Critical Isra Vision Gmbh
Publication of BR112022020214A2 publication Critical patent/BR112022020214A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N2021/8909—Scan signal processing specially adapted for inspection of running sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Signal Processing (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

MÉTODO PARA INSPECIONAR OPTICAMENTE UMA SUPERFÍCIE DE UM OBJETO, UTILIZAÇÃO DO MÉTODO E DISPOSITIVO DE INSPEÇÃO PARA INSPECIONAR OPTICAMENTE UMA SUPERFÍCIE DE UM OBJETO. A invenção relaciona-se com um método para inspecionar opticamente uma superfície (10) de um objeto (1) e com um dispositivo de inspeção (9). No método, um padrão (13), que é cronologicamente periódico durante uma sequência de captação de imagens e tem diferentes padrões de iluminação (130), é gerado na superfície (10) por meio de um dispositivo de iluminação (8) do dispositivo de inspeção (9) e, na sequência de captação de imagens, múltiplas imagens do padrão (13) na superfície (10) são captadas por meio de um dispositivo de captação de imagens (7) do dispositivo de inspeção (9), a geração de um dos diferentes padrões de iluminação (130) sendo sincronizada, em cada caso, com a captação de uma das imagens do padrão (13); a fase do padrão (13) é determinada a partir da sequência de padrões de iluminação conhecidos (130) captados em pelo menos um pixel; e defeitos (4, 5) na superfície (10) são identificados a partir de desvios do padrão de iluminação (130) captado do padrão de iluminação conhecido (130) gerado. O dispositivo de iluminação (8) e o dispositivo de captação de imagens (7) são dispostos no ângulo de reflexão (ALFA), em que o objeto (1) é movido em relação ao dispositivo de inspeção (9) e a duração da sequência de captação de imagens é escolhida de modo que uma zona de reflexão de sequência (17) possa ser considerada constante.
BR112022020214A 2020-04-09 2021-03-22 Método para inspecionar opticamente uma superfície de um objeto, utilização do método e dispositivo de inspeção para inspecionar opticamente uma superfície de um objeto BR112022020214A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020109945.2A DE102020109945A1 (de) 2020-04-09 2020-04-09 Verfahren und Inspektionseinrichtung zur optischen Inspektion einer Oberfläche
PCT/EP2021/057217 WO2021204521A1 (de) 2020-04-09 2021-03-22 Verfahren und inspektionseinrichtung zur optischen inspektion einer oberfläche

Publications (1)

Publication Number Publication Date
BR112022020214A2 true BR112022020214A2 (pt) 2022-12-13

Family

ID=75302515

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112022020214A BR112022020214A2 (pt) 2020-04-09 2021-03-22 Método para inspecionar opticamente uma superfície de um objeto, utilização do método e dispositivo de inspeção para inspecionar opticamente uma superfície de um objeto

Country Status (11)

Country Link
US (1) US20230140278A1 (pt)
EP (1) EP4133260A1 (pt)
JP (1) JP2023521175A (pt)
KR (1) KR20230014686A (pt)
CN (1) CN115398213A (pt)
BR (1) BR112022020214A2 (pt)
CA (1) CA3179520A1 (pt)
DE (1) DE102020109945A1 (pt)
IL (1) IL297164A (pt)
MX (1) MX2022012556A (pt)
WO (1) WO2021204521A1 (pt)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19643018B4 (de) 1996-10-18 2010-06-17 Isra Surface Vision Gmbh Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
DE10063293A1 (de) * 2000-12-19 2002-07-04 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur mehrkanaligen Inspektion von Oberflächen im Durchlauf
DE102004033526A1 (de) 2004-07-08 2006-02-02 Universität Karlsruhe (TH) Institut für Mess- und Regelungstechnik Verfahren und Vorrichtung zur Analyse zumindest partiell reflektierender Oberflächen
EP1949673B1 (de) 2005-11-10 2015-08-26 SAC Sirius Advanced Cybernetics GmbH Verfahren zur bildaufnahme
JP2010256021A (ja) * 2009-04-21 2010-11-11 Konica Minolta Opto Inc フィルム表面欠陥検査装置、フィルム表面欠陥検査方法及び光学フィルムの製造方法
JP2011064482A (ja) * 2009-09-15 2011-03-31 Kurabo Ind Ltd 高速三次元計測装置及び高速三次元計測方法
JP4685971B2 (ja) * 2009-09-24 2011-05-18 株式会社ケー・デー・イー 検査システム及び検査方法
DE102010021853B4 (de) 2010-05-28 2012-04-26 Isra Vision Ag Einrichtung und Verfahren zur optischen Überprüfung eines Gegenstands
JP5443303B2 (ja) * 2010-09-03 2014-03-19 株式会社サキコーポレーション 外観検査装置及び外観検査方法
DE102011117894A1 (de) 2011-11-04 2013-05-08 OBE OHNMACHT & BAUMGäRTNER GMBH & CO. KG Vorrichtung und Verfahren zur optischen Formerfassung von bewegten Gegenständen
JP6917781B2 (ja) * 2017-05-31 2021-08-11 株式会社キーエンス 画像検査装置
JP7003669B2 (ja) * 2018-01-10 2022-01-20 株式会社アイシン 表面検査装置、及び表面検査方法

Also Published As

Publication number Publication date
US20230140278A1 (en) 2023-05-04
DE102020109945A1 (de) 2021-10-14
CA3179520A1 (en) 2021-10-14
KR20230014686A (ko) 2023-01-30
IL297164A (en) 2022-12-01
MX2022012556A (es) 2023-01-11
JP2023521175A (ja) 2023-05-23
CN115398213A (zh) 2022-11-25
WO2021204521A1 (de) 2021-10-14
EP4133260A1 (de) 2023-02-15

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