MX2022012556A - Metodo y dispositivo de inspeccion para inspeccionar opticamente una superficie. - Google Patents

Metodo y dispositivo de inspeccion para inspeccionar opticamente una superficie.

Info

Publication number
MX2022012556A
MX2022012556A MX2022012556A MX2022012556A MX2022012556A MX 2022012556 A MX2022012556 A MX 2022012556A MX 2022012556 A MX2022012556 A MX 2022012556A MX 2022012556 A MX2022012556 A MX 2022012556A MX 2022012556 A MX2022012556 A MX 2022012556A
Authority
MX
Mexico
Prior art keywords
pattern
image
inspection device
sequence
illumination
Prior art date
Application number
MX2022012556A
Other languages
English (en)
Inventor
Stefan Leute
Koichi Harada
Original Assignee
Isra Vision Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Isra Vision Gmbh filed Critical Isra Vision Gmbh
Publication of MX2022012556A publication Critical patent/MX2022012556A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N2021/8909—Scan signal processing specially adapted for inspection of running sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Signal Processing (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

La invención se refiere a un método para inspeccionar ópticamente una superficie (10) de un objeto (1) y a un dispositivo de inspección (9). En el método, un patrón (13), que es cronológicamente periódico durante una secuencia de captura de imágenes y tiene diferentes patrones de iluminación (130), se genera sobre la superficie (10) por medio de un dispositivo de iluminación (8) del dispositivo de inspección (9) y, en la secuencia de captura de imágenes, se capturan múltiples imágenes del patrón (13) sobre la superficie (10) por medio de un dispositivo de captura de imágenes (7) del dispositivo de inspección (9), estando sincronizada en cada caso la generación de uno de los diferentes patrones de iluminación (130) con la captura de una de las imágenes del patrón (13); el patrón de fase (13) se determina a partir de la secuencia de patrones de iluminación (130) conocidos capturados en al menos un píxel; y los defectos (4, 5) en la superficie (10) se identifican a partir de las desviaciones del patrón de iluminación (130) capturadas del patrón de iluminación (130) conocido generado. El dispositivo de iluminación (8) y el dispositivo de captura de imágenes (7) están dispuestos en el ángulo de reflexión (a), en donde el objeto (1) se mueve con respecto al dispositivo de inspección (9), y la duración de la secuencia de captura de imágenes se selecciona de manera que una región de reflexión (17) de la secuencia pueda considerarse constante (figura 4b).
MX2022012556A 2020-04-09 2021-03-22 Metodo y dispositivo de inspeccion para inspeccionar opticamente una superficie. MX2022012556A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020109945.2A DE102020109945A1 (de) 2020-04-09 2020-04-09 Verfahren und Inspektionseinrichtung zur optischen Inspektion einer Oberfläche
PCT/EP2021/057217 WO2021204521A1 (de) 2020-04-09 2021-03-22 Verfahren und inspektionseinrichtung zur optischen inspektion einer oberfläche

Publications (1)

Publication Number Publication Date
MX2022012556A true MX2022012556A (es) 2023-01-11

Family

ID=75302515

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2022012556A MX2022012556A (es) 2020-04-09 2021-03-22 Metodo y dispositivo de inspeccion para inspeccionar opticamente una superficie.

Country Status (11)

Country Link
US (1) US20230140278A1 (es)
EP (1) EP4133260A1 (es)
JP (1) JP2023521175A (es)
KR (1) KR20230014686A (es)
CN (1) CN115398213A (es)
BR (1) BR112022020214A2 (es)
CA (1) CA3179520A1 (es)
DE (1) DE102020109945A1 (es)
IL (1) IL297164A (es)
MX (1) MX2022012556A (es)
WO (1) WO2021204521A1 (es)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19643018B4 (de) 1996-10-18 2010-06-17 Isra Surface Vision Gmbh Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
DE10063293A1 (de) * 2000-12-19 2002-07-04 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur mehrkanaligen Inspektion von Oberflächen im Durchlauf
DE102004033526A1 (de) 2004-07-08 2006-02-02 Universität Karlsruhe (TH) Institut für Mess- und Regelungstechnik Verfahren und Vorrichtung zur Analyse zumindest partiell reflektierender Oberflächen
EP1949673B1 (de) 2005-11-10 2015-08-26 SAC Sirius Advanced Cybernetics GmbH Verfahren zur bildaufnahme
JP2010256021A (ja) * 2009-04-21 2010-11-11 Konica Minolta Opto Inc フィルム表面欠陥検査装置、フィルム表面欠陥検査方法及び光学フィルムの製造方法
JP2011064482A (ja) * 2009-09-15 2011-03-31 Kurabo Ind Ltd 高速三次元計測装置及び高速三次元計測方法
JP4685971B2 (ja) * 2009-09-24 2011-05-18 株式会社ケー・デー・イー 検査システム及び検査方法
DE102010021853B4 (de) 2010-05-28 2012-04-26 Isra Vision Ag Einrichtung und Verfahren zur optischen Überprüfung eines Gegenstands
JP5443303B2 (ja) * 2010-09-03 2014-03-19 株式会社サキコーポレーション 外観検査装置及び外観検査方法
DE102011117894A1 (de) 2011-11-04 2013-05-08 OBE OHNMACHT & BAUMGäRTNER GMBH & CO. KG Vorrichtung und Verfahren zur optischen Formerfassung von bewegten Gegenständen
JP6917781B2 (ja) * 2017-05-31 2021-08-11 株式会社キーエンス 画像検査装置
JP7003669B2 (ja) * 2018-01-10 2022-01-20 株式会社アイシン 表面検査装置、及び表面検査方法

Also Published As

Publication number Publication date
US20230140278A1 (en) 2023-05-04
DE102020109945A1 (de) 2021-10-14
CA3179520A1 (en) 2021-10-14
KR20230014686A (ko) 2023-01-30
IL297164A (en) 2022-12-01
JP2023521175A (ja) 2023-05-23
CN115398213A (zh) 2022-11-25
WO2021204521A1 (de) 2021-10-14
BR112022020214A2 (pt) 2022-12-13
EP4133260A1 (de) 2023-02-15

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