BR112012029474A2 - método de inspeção de matriz - Google Patents

método de inspeção de matriz

Info

Publication number
BR112012029474A2
BR112012029474A2 BR112012029474A BR112012029474A BR112012029474A2 BR 112012029474 A2 BR112012029474 A2 BR 112012029474A2 BR 112012029474 A BR112012029474 A BR 112012029474A BR 112012029474 A BR112012029474 A BR 112012029474A BR 112012029474 A2 BR112012029474 A2 BR 112012029474A2
Authority
BR
Brazil
Prior art keywords
inspection method
matrix inspection
matrix
inspection
Prior art date
Application number
BR112012029474A
Other languages
English (en)
Inventor
Hidekazu Hayashi
Takao Imaoku
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Publication of BR112012029474A2 publication Critical patent/BR112012029474A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/29—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using visual detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/465—Measurement of colour; Colour measuring devices, e.g. colorimeters taking into account the colour perception of the eye; using tristimulus detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0634—Diffuse illumination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Laminated Bodies (AREA)
BR112012029474A 2010-05-19 2011-05-17 método de inspeção de matriz BR112012029474A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010115733 2010-05-19
PCT/JP2011/061337 WO2011145625A1 (ja) 2010-05-19 2011-05-17 型の検査方法

Publications (1)

Publication Number Publication Date
BR112012029474A2 true BR112012029474A2 (pt) 2017-01-24

Family

ID=44991727

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112012029474A BR112012029474A2 (pt) 2010-05-19 2011-05-17 método de inspeção de matriz

Country Status (7)

Country Link
US (1) US8760655B2 (pt)
EP (1) EP2573545B1 (pt)
JP (1) JP5059985B2 (pt)
CN (1) CN102893140B (pt)
BR (1) BR112012029474A2 (pt)
RU (1) RU2515123C1 (pt)
WO (1) WO2011145625A1 (pt)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5728089B2 (ja) * 2011-07-08 2015-06-03 シャープ株式会社 形状検査方法、構造物の製造方法及び形状検査装置
TWI529385B (zh) * 2011-09-26 2016-04-11 三菱麗陽股份有限公司 表面具有微細凹凸結構之構件的檢查裝置及檢查方法、表面具有陽極氧化氧化鋁層的構件的製造方法以及光學膜的製造方法
JP6140990B2 (ja) * 2012-11-30 2017-06-07 キヤノン株式会社 測定装置、インプリントシステム、測定方法及びデバイス製造方法
CN106662415B (zh) 2014-08-07 2018-11-30 夏普株式会社 热交换器、金属构件、电热水器、饮料供应器和饭盒盖
US11473900B2 (en) 2016-07-21 2022-10-18 Assan Aluminyum San. Ve Tic. A. S. Measurement of oxide thickness on aluminum surface by FTIR spectroscopy and chemometrics method
US10161859B2 (en) 2016-10-27 2018-12-25 Honeywell International Inc. Planar reflective ring
JP6988669B2 (ja) * 2018-04-24 2022-01-05 株式会社デンソー レーザ照射されたニッケル膜の検査方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19708776C1 (de) 1997-03-04 1998-06-18 Fraunhofer Ges Forschung Entspiegelungsschicht sowie Verfahren zur Herstellung derselben
RU2150533C1 (ru) * 1999-02-08 2000-06-10 Мирзоев Рустам Аминович Способ формирования объемно-пористого слоя металла с открытой пористостью на электропроводной подложке
US7066234B2 (en) 2001-04-25 2006-06-27 Alcove Surfaces Gmbh Stamping tool, casting mold and methods for structuring a surface of a work piece
DE10020877C1 (de) * 2000-04-28 2001-10-25 Alcove Surfaces Gmbh Prägewerkzeug, Verfahren zum Herstellen desselben, Verfahren zur Strukturierung einer Oberfläche eines Werkstücks und Verwendung einer anodisch oxidierten Oberflächenschicht
US7365860B2 (en) * 2000-12-21 2008-04-29 Sensory Analytics System capable of determining applied and anodized coating thickness of a coated-anodized product
JP4406553B2 (ja) 2003-11-21 2010-01-27 財団法人神奈川科学技術アカデミー 反射防止膜の製造方法
JP2005173120A (ja) * 2003-12-10 2005-06-30 Fuji Photo Film Co Ltd 低反射構造体および低反射構造体の作製方法
JP2005171306A (ja) * 2003-12-10 2005-06-30 Fuji Photo Film Co Ltd 金属微粒子層の作製方法
JP2005200679A (ja) * 2004-01-13 2005-07-28 Fuji Photo Film Co Ltd 微細構造体からなる光学素子
JP4579593B2 (ja) 2004-03-05 2010-11-10 キヤノン株式会社 標的物質認識素子、検出方法及び装置
WO2006059686A1 (ja) 2004-12-03 2006-06-08 Sharp Kabushiki Kaisha 反射防止材、光学素子、および表示装置ならびにスタンパの製造方法およびスタンパを用いた反射防止材の製造方法
JP2007024869A (ja) * 2005-06-14 2007-02-01 Fujifilm Holdings Corp マルチチャンネルセンサ、センシング装置、及びセンシング方法
EP1891414A4 (en) 2005-06-14 2010-04-21 Fujifilm Corp SENSOR, MULTIVOUS SENSOR, DETECTION APPARATUS, AND DETECTION METHOD
JP4955240B2 (ja) * 2005-09-02 2012-06-20 パナソニック株式会社 膜測定装置およびそれを用いる塗工装置
JP2008011471A (ja) * 2006-06-30 2008-01-17 Kyocera Kinseki Corp 圧電発振器
US20080020724A1 (en) * 2006-07-19 2008-01-24 John Robert Orrell Establishing a data link between stacked cargo containers
RU2324015C1 (ru) * 2006-12-15 2008-05-10 Государственное образовательное учреждение высшего профессионального образования Московский государственный институт электронной техники (технический университет) Способ получения пористого анодного оксида алюминия
JP2008205188A (ja) * 2007-02-20 2008-09-04 Mitsubishi Heavy Ind Ltd 膜厚計測方法及びその装置ならびに薄膜製造システム
JP4460020B2 (ja) * 2009-09-11 2010-05-12 財団法人神奈川科学技術アカデミー 陽極酸化ポーラスアルミナからなる鋳型及びその製造方法
JP4595044B2 (ja) * 2009-12-16 2010-12-08 財団法人神奈川科学技術アカデミー 陽極酸化ポーラスアルミナからなる鋳型及びその製造方法

Also Published As

Publication number Publication date
EP2573545B1 (en) 2019-07-03
WO2011145625A1 (ja) 2011-11-24
CN102893140A (zh) 2013-01-23
EP2573545A4 (en) 2017-03-29
CN102893140B (zh) 2014-10-22
JPWO2011145625A1 (ja) 2013-07-22
EP2573545A1 (en) 2013-03-27
US8760655B2 (en) 2014-06-24
JP5059985B2 (ja) 2012-10-31
US20130063725A1 (en) 2013-03-14
RU2515123C1 (ru) 2014-05-10

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]
B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]