BR112012009504A2 - controlador de fluxo - Google Patents

controlador de fluxo

Info

Publication number
BR112012009504A2
BR112012009504A2 BR112012009504A BR112012009504A BR112012009504A2 BR 112012009504 A2 BR112012009504 A2 BR 112012009504A2 BR 112012009504 A BR112012009504 A BR 112012009504A BR 112012009504 A BR112012009504 A BR 112012009504A BR 112012009504 A2 BR112012009504 A2 BR 112012009504A2
Authority
BR
Brazil
Prior art keywords
flow
detection unit
control unit
flow rate
detection
Prior art date
Application number
BR112012009504A
Other languages
English (en)
Other versions
BR112012009504B1 (pt
Inventor
Takeshi Sakasegawa
Yuta Oshima
Original Assignee
Smc Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smc Kk filed Critical Smc Kk
Publication of BR112012009504A2 publication Critical patent/BR112012009504A2/pt
Publication of BR112012009504B1 publication Critical patent/BR112012009504B1/pt

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/005—Control of flow characterised by the use of auxiliary non-electric power combined with the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/03—Control of flow with auxiliary non-electric power
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7762—Fluid pressure type
    • Y10T137/7764—Choked or throttled pressure type
    • Y10T137/7768—Pilot controls supply to pressure chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7762—Fluid pressure type
    • Y10T137/7769—Single acting fluid servo
    • Y10T137/777—Spring biased
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y10T137/87193—Pilot-actuated
    • Y10T137/87209—Electric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)

Abstract

é descrito um controlador de fluxo (10) incluindo uma unidade de detecção de fluxo (14) que é fornecida com uma unidade de detecção (12) para detectar a taxa de fluxo de um fluido; e uma unidade de controle de fluxo (180) que é acoplada a unidade de detecção de fluxo (14) e que é capaz de ajustar uma taxa de fluxo de fluido. o sensor de detecção (38) constituindo a unidade de detecção (12) compreende um sensor de fluxo térmico usando tecnologia mems, e a taxa de fluxo que foi detectada pelo sensor de detecção (38) é enviada para a unidade de controle (24). em adição, na unidade de controle de fluxo (18), o estado de fornecimento de ar para a sala de fornecimento (84) é comutada por cada uma das válvulas solenoide de fornecimento de uso (92) e válvulas solenoide de exaustão de uso (94) e com base no estado de fornecimento de ar, uma válvula de controle (58) se fecha e se abre.
BR112012009504-8A 2009-10-20 2010-09-16 Controlador de Fluxo BR112012009504B1 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-241343 2009-10-20
JP2009241343A JP5250875B2 (ja) 2009-10-20 2009-10-20 フローコントローラ
PCT/JP2010/066034 WO2011048896A1 (ja) 2009-10-20 2010-09-16 フローコントローラ

Publications (2)

Publication Number Publication Date
BR112012009504A2 true BR112012009504A2 (pt) 2016-05-17
BR112012009504B1 BR112012009504B1 (pt) 2019-10-15

Family

ID=43900136

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112012009504-8A BR112012009504B1 (pt) 2009-10-20 2010-09-16 Controlador de Fluxo

Country Status (9)

Country Link
US (1) US8800593B2 (pt)
JP (1) JP5250875B2 (pt)
KR (1) KR101416285B1 (pt)
CN (1) CN102576230B (pt)
BR (1) BR112012009504B1 (pt)
DE (1) DE112010004226B4 (pt)
RU (1) RU2515208C2 (pt)
TW (1) TWI432931B (pt)
WO (1) WO2011048896A1 (pt)

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CN111033104B (zh) * 2017-09-30 2021-12-03 株式会社富士金 阀以及流体供给管线
TWI681111B (zh) * 2018-06-26 2020-01-01 陳瑋样 流體調節裝置
TWI662213B (zh) * 2018-10-30 2019-06-11 台灣氣立股份有限公司 Two-stage intake and two-stage exhaust structure of electronically controlled proportional valve
TWI689676B (zh) * 2019-01-10 2020-04-01 台灣氣立股份有限公司 電控大容量比例閥
TWI689678B (zh) * 2019-03-07 2020-04-01 台灣氣立股份有限公司 真空電控比例閥
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US11360014B1 (en) * 2021-07-19 2022-06-14 Multi-Chem Group, Llc Methods and systems for characterizing fluid composition and process optimization in industrial water operations using MEMS technology

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Also Published As

Publication number Publication date
US8800593B2 (en) 2014-08-12
DE112010004226B4 (de) 2017-06-01
JP5250875B2 (ja) 2013-07-31
CN102576230A (zh) 2012-07-11
WO2011048896A1 (ja) 2011-04-28
KR20120085263A (ko) 2012-07-31
TWI432931B (zh) 2014-04-01
JP2011090381A (ja) 2011-05-06
CN102576230B (zh) 2015-05-13
RU2012119820A (ru) 2013-11-27
KR101416285B1 (ko) 2014-07-08
RU2515208C2 (ru) 2014-05-10
TW201133171A (en) 2011-10-01
BR112012009504B1 (pt) 2019-10-15
DE112010004226T5 (de) 2013-01-03
US20120204974A1 (en) 2012-08-16

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06T Formal requirements before examination [chapter 6.20 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 16/09/2010, OBSERVADAS AS CONDICOES LEGAIS. (CO) 20 (VINTE) ANOS CONTADOS A PARTIR DE 16/09/2010, OBSERVADAS AS CONDICOES LEGAIS

B21F Lapse acc. art. 78, item iv - on non-payment of the annual fees in time

Free format text: REFERENTE A 11A ANUIDADE.

B24J Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12)

Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2640 DE 10-08-2021 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.