BE764313A - Appareil destine a assurer la croissance de cristaux sur un substrat - Google Patents
Appareil destine a assurer la croissance de cristaux sur un substratInfo
- Publication number
- BE764313A BE764313A BE764313A BE764313A BE764313A BE 764313 A BE764313 A BE 764313A BE 764313 A BE764313 A BE 764313A BE 764313 A BE764313 A BE 764313A BE 764313 A BE764313 A BE 764313A
- Authority
- BE
- Belgium
- Prior art keywords
- crystals
- growth
- ensure
- substrate
- apparatus intended
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/072—Heterojunctions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1987870A | 1970-03-16 | 1970-03-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE764313A true BE764313A (fr) | 1971-09-16 |
Family
ID=21795534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE764313A BE764313A (fr) | 1970-03-16 | 1971-03-16 | Appareil destine a assurer la croissance de cristaux sur un substrat |
Country Status (7)
Country | Link |
---|---|
US (1) | US3665888A (nl) |
JP (1) | JPS528797B1 (nl) |
BE (1) | BE764313A (nl) |
FR (1) | FR2084623A5 (nl) |
GB (1) | GB1345367A (nl) |
NL (1) | NL155458B (nl) |
SE (1) | SE387057B (nl) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53271B1 (nl) * | 1971-03-05 | 1978-01-06 | ||
US3933123A (en) * | 1971-07-13 | 1976-01-20 | U.S. Philips Corporation | Liquid phase epitaxy |
BE788374A (fr) * | 1971-12-08 | 1973-01-02 | Rca Corp | Procede de depot d'une couche epitaxiale d'un materiau semi-conducteur sur la surface d'un substrat |
JPS5318151B2 (nl) * | 1971-12-14 | 1978-06-13 | ||
US3767481A (en) * | 1972-04-07 | 1973-10-23 | Rca Corp | Method for epitaxially growing layers of a semiconductor material from the liquid phase |
FR2202730A1 (en) * | 1972-10-17 | 1974-05-10 | Thomson Csf | Heated reactor for growth of monocrystals - for producing photosensitive semiconductors, photo-transmitters, infrared detectors etc. |
JPS5342230B2 (nl) * | 1972-10-19 | 1978-11-09 | ||
US3762367A (en) * | 1973-01-12 | 1973-10-02 | Handotai Kenkyu Shinkokai | Growth apparatus for a liquid growth multi-layer film |
JPS5213510B2 (nl) * | 1973-02-26 | 1977-04-14 | ||
US4033291A (en) * | 1973-03-09 | 1977-07-05 | Tokyo Shibaura Electric Co., Ltd. | Apparatus for liquid-phase epitaxial growth |
US3853643A (en) * | 1973-06-18 | 1974-12-10 | Bell Telephone Labor Inc | Epitaxial growth of group iii-v semiconductors from solution |
US4028148A (en) * | 1974-12-20 | 1977-06-07 | Nippon Telegraph And Telephone Public Corporation | Method of epitaxially growing a laminate semiconductor layer in liquid phase |
JPS5248949B2 (nl) * | 1974-12-20 | 1977-12-13 | ||
US4110133A (en) * | 1976-04-29 | 1978-08-29 | The Post Office | Growth of semiconductor compounds by liquid phase epitaxy |
US4047986A (en) * | 1976-05-10 | 1977-09-13 | Integrated Display Systems, Inc. | Epitaxial film formation of a light emitting diode and the product thereof |
JPS5270759A (en) * | 1976-12-25 | 1977-06-13 | Toshiba Corp | Liquid phase growth equipment |
US4359012A (en) * | 1978-01-19 | 1982-11-16 | Handotai Kenkyu Shinkokai | Apparatus for producing a semiconductor device utlizing successive liquid growth |
US4235191A (en) * | 1979-03-02 | 1980-11-25 | Western Electric Company, Inc. | Apparatus for depositing materials on stacked semiconductor wafers |
NL185375C (nl) * | 1980-01-16 | 1990-03-16 | Philips Nv | Inrichting voor het epitaxiaal aanbrengen van een laag halfgeleidermateriaal. |
FR2476690A1 (fr) * | 1980-02-27 | 1981-08-28 | Radiotechnique Compelec | Nacelle utilisable pour des depots epitaxiques en phase liquide et procede de depot mettant en jeu ladite nacelle |
US4500367A (en) * | 1983-10-31 | 1985-02-19 | At&T Bell Laboratories | LPE Growth on group III-V compound semiconductor substrates containing phosphorus |
JP2001160540A (ja) * | 1999-09-22 | 2001-06-12 | Canon Inc | 半導体装置の製造方法、液相成長法及び液相成長装置、太陽電池 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2727839A (en) * | 1950-06-15 | 1955-12-20 | Bell Telephone Labor Inc | Method of producing semiconductive bodies |
US3002821A (en) * | 1956-10-22 | 1961-10-03 | Texas Instruments Inc | Means for continuous fabrication of graded junction transistors |
DE1188555B (de) * | 1960-05-10 | 1965-03-11 | Wacker Chemie Gmbh | Verfahren zur Herstellung hochreiner kristalliner Koerper aus Nitriden, Phosphiden oder Arseniden der III. Hauptgruppe des Periodensystems |
BE632279A (nl) * | 1962-05-14 | |||
FR1473984A (fr) * | 1966-01-10 | 1967-03-24 | Radiotechnique Coprim Rtc | Procédé et dispositif destinés à la fabrication de composés binaires monocristallins |
US3449087A (en) * | 1966-06-27 | 1969-06-10 | Commerce Usa | Purification by selective crystallization and remelt |
US3551219A (en) * | 1968-05-09 | 1970-12-29 | Bell Telephone Labor Inc | Epitaxial growth technique |
-
1970
- 1970-03-16 US US19878A patent/US3665888A/en not_active Expired - Lifetime
-
1971
- 1971-03-05 SE SE7102845A patent/SE387057B/xx unknown
- 1971-03-15 FR FR7108924A patent/FR2084623A5/fr not_active Expired
- 1971-03-15 NL NL7103419.A patent/NL155458B/nl not_active IP Right Cessation
- 1971-03-16 BE BE764313A patent/BE764313A/xx not_active IP Right Cessation
- 1971-03-16 JP JP46014125A patent/JPS528797B1/ja active Pending
- 1971-04-19 GB GB2403171*A patent/GB1345367A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7103419A (nl) | 1971-09-20 |
FR2084623A5 (nl) | 1971-12-17 |
GB1345367A (en) | 1974-01-30 |
JPS528797B1 (nl) | 1977-03-11 |
NL155458B (nl) | 1978-01-16 |
DE2111945B2 (de) | 1977-02-10 |
DE2111945A1 (de) | 1971-09-23 |
US3665888A (en) | 1972-05-30 |
SE387057B (sv) | 1976-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RE | Patent lapsed |
Owner name: WESTERN ELECTRIC CY INC. Effective date: 19850316 |