BE757500A - Four tubulaire destine au traitement de dispositifs semi-conducteurs - Google Patents

Four tubulaire destine au traitement de dispositifs semi-conducteurs

Info

Publication number
BE757500A
BE757500A BE757500DA BE757500A BE 757500 A BE757500 A BE 757500A BE 757500D A BE757500D A BE 757500DA BE 757500 A BE757500 A BE 757500A
Authority
BE
Belgium
Prior art keywords
treatment
semiconductor devices
tubular oven
oven intended
intended
Prior art date
Application number
Other languages
English (en)
French (fr)
Inventor
R L Koepp
S J Dudkowski
Original Assignee
Ncr Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE757500A publication Critical patent/BE757500A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0014—Devices wherein the heating current flows through particular resistances
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/006—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/118—Oxide films

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)
BE757500D 1969-10-14 Four tubulaire destine au traitement de dispositifs semi-conducteurs BE757500A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86618569A 1969-10-14 1969-10-14

Publications (1)

Publication Number Publication Date
BE757500A true BE757500A (fr) 1971-03-16

Family

ID=25347091

Family Applications (1)

Application Number Title Priority Date Filing Date
BE757500D BE757500A (fr) 1969-10-14 Four tubulaire destine au traitement de dispositifs semi-conducteurs

Country Status (10)

Country Link
US (1) US3645695A (enrdf_load_stackoverflow)
JP (1) JPS4922781B1 (enrdf_load_stackoverflow)
BE (1) BE757500A (enrdf_load_stackoverflow)
CA (1) CA961385A (enrdf_load_stackoverflow)
CH (1) CH515613A (enrdf_load_stackoverflow)
DE (1) DE2049904A1 (enrdf_load_stackoverflow)
ES (1) ES384378A1 (enrdf_load_stackoverflow)
FR (1) FR2064318B1 (enrdf_load_stackoverflow)
GB (1) GB1260070A (enrdf_load_stackoverflow)
ZA (1) ZA706739B (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742904A (en) * 1971-06-03 1973-07-03 Motorola Inc Steam generator and gas insertion device
DE2206493C3 (de) * 1972-02-11 1975-01-30 Heraeus-Schott Quarzschmelze Gmbh, 6450 Hanau Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie
JPS5277590A (en) * 1975-12-24 1977-06-30 Toshiba Corp Semiconductor producing device
US4154192A (en) * 1976-12-10 1979-05-15 Mitsubishi Denki Kabushiki Kaisha Manufacturing apparatus for semiconductor devices
US4592307A (en) * 1985-02-28 1986-06-03 Rca Corporation Vapor phase deposition apparatus
JPS63105255U (enrdf_load_stackoverflow) * 1986-12-26 1988-07-07

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2746888A (en) * 1952-07-05 1956-05-22 Du Pont Method of forming titanium coating on refractory body
US3010092A (en) * 1958-08-05 1961-11-21 Bourns Inc Variable resistor
US3112215A (en) * 1959-10-09 1963-11-26 Lonza Ag Preparation of catalytically active coatings
US3507627A (en) * 1964-05-22 1970-04-21 Prototech Inc Heating and catalytic chemical reaction apparatus
US3516850A (en) * 1966-09-16 1970-06-23 Texas Instruments Inc Process for metal coating a hydrogen permeable material
US3446659A (en) * 1966-09-16 1969-05-27 Texas Instruments Inc Apparatus and process for growing noncontaminated thermal oxide on silicon

Also Published As

Publication number Publication date
JPS4922781B1 (enrdf_load_stackoverflow) 1974-06-11
FR2064318A1 (enrdf_load_stackoverflow) 1971-07-23
ZA706739B (en) 1971-05-27
DE2049904A1 (de) 1971-05-13
ES384378A1 (es) 1973-02-16
CH515613A (de) 1971-11-15
CA961385A (en) 1975-01-21
US3645695A (en) 1972-02-29
FR2064318B1 (enrdf_load_stackoverflow) 1976-09-03
GB1260070A (en) 1972-01-12

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