AU2003222387A1 - Array of membrane ultrasound transducers - Google Patents
Array of membrane ultrasound transducersInfo
- Publication number
- AU2003222387A1 AU2003222387A1 AU2003222387A AU2003222387A AU2003222387A1 AU 2003222387 A1 AU2003222387 A1 AU 2003222387A1 AU 2003222387 A AU2003222387 A AU 2003222387A AU 2003222387 A AU2003222387 A AU 2003222387A AU 2003222387 A1 AU2003222387 A1 AU 2003222387A1
- Authority
- AU
- Australia
- Prior art keywords
- piezoelectric layer
- barrier structure
- array
- ultrasound transducers
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000012528 membrane Substances 0.000 title abstract 3
- 238000002604 ultrasonography Methods 0.000 title abstract 3
- 230000004888 barrier function Effects 0.000 abstract 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 229910003460 diamond Inorganic materials 0.000 abstract 1
- 239000010432 diamond Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/137,492 | 2002-05-01 | ||
US10/137,492 US6548937B1 (en) | 2002-05-01 | 2002-05-01 | Array of membrane ultrasound transducers |
PCT/IB2003/001645 WO2003092915A2 (en) | 2002-05-01 | 2003-04-29 | Array of membrane ultrasound transducers |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2003222387A8 AU2003222387A8 (en) | 2003-11-17 |
AU2003222387A1 true AU2003222387A1 (en) | 2003-11-17 |
Family
ID=22477670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003222387A Abandoned AU2003222387A1 (en) | 2002-05-01 | 2003-04-29 | Array of membrane ultrasound transducers |
Country Status (8)
Country | Link |
---|---|
US (1) | US6548937B1 (de) |
EP (1) | EP1503872B1 (de) |
KR (1) | KR20050006204A (de) |
CN (1) | CN100438991C (de) |
AT (1) | ATE368526T1 (de) |
AU (1) | AU2003222387A1 (de) |
DE (1) | DE60315286T2 (de) |
WO (1) | WO2003092915A2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6784600B2 (en) * | 2002-05-01 | 2004-08-31 | Koninklijke Philips Electronics N.V. | Ultrasonic membrane transducer for an ultrasonic diagnostic probe |
US7148079B1 (en) * | 2002-11-01 | 2006-12-12 | Advanced Micro Devices, Inc. | Diamond like carbon silicon on insulator substrates and methods of fabrication thereof |
JP2005094735A (ja) * | 2003-08-12 | 2005-04-07 | Murata Mfg Co Ltd | 電子部品およびその製造方法 |
US20050075571A1 (en) * | 2003-09-18 | 2005-04-07 | Siemens Medical Solutions Usa, Inc. | Sound absorption backings for ultrasound transducers |
JP4952164B2 (ja) * | 2006-09-20 | 2012-06-13 | 株式会社デンソー | 流量計測素子、質量流量計 |
EP2174359A2 (de) * | 2007-07-03 | 2010-04-14 | Koninklijke Philips Electronics N.V. | Dünnschichtdetektor zur präsenzerkennung |
CN101352710B (zh) * | 2007-07-25 | 2011-03-16 | 中国科学院声学研究所 | 薄膜压电超声换能器 |
JP5444662B2 (ja) * | 2008-08-25 | 2014-03-19 | ソニー株式会社 | 圧電デバイスの製造方法 |
EP2490333B1 (de) * | 2009-10-13 | 2019-09-04 | Murata Manufacturing Co., Ltd. | Akustisches oberflächenwellenelement |
WO2012014111A2 (en) | 2010-07-30 | 2012-02-02 | Koninklijke Philips Electronics N.V. | Thin film ultrasound transducer |
DE102012205996A1 (de) | 2012-04-12 | 2013-10-17 | Robert Bosch Gmbh | Sensoranordnung und Verfahren zur Umfelderfassung eines Fahrzeugs |
JP6089499B2 (ja) * | 2012-08-28 | 2017-03-08 | セイコーエプソン株式会社 | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置 |
US9364863B2 (en) * | 2013-01-23 | 2016-06-14 | Siemens Medical Solutions Usa, Inc. | Method for forming an ultrasound transducer array |
DE102013205157A1 (de) | 2013-03-22 | 2014-10-09 | Robert Bosch Gmbh | Sensoranordnung und Verfahren zur Umfelderfassung eines Fahrzeugs |
JP5836537B2 (ja) * | 2013-03-28 | 2015-12-24 | 富士フイルム株式会社 | ユニモルフ型超音波探触子 |
JP6728630B2 (ja) * | 2015-10-29 | 2020-07-22 | セイコーエプソン株式会社 | 圧電素子、圧電モジュール、電子機器、及び圧電素子の製造方法 |
JP6805630B2 (ja) * | 2016-08-24 | 2020-12-23 | セイコーエプソン株式会社 | 超音波デバイス、超音波モジュール、及び超音波測定装置 |
CN116944006B (zh) * | 2023-09-19 | 2023-12-15 | 中北大学 | 一种d11工作模式驱动的PMUT单元及其制备方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5075641A (en) * | 1990-12-04 | 1991-12-24 | Iowa State University Research Foundation, Inc. | High frequency oscillator comprising cointegrated thin film resonator and active device |
JP2990926B2 (ja) * | 1992-03-16 | 1999-12-13 | 住友電気工業株式会社 | 超音波振動子 |
US5433917A (en) | 1993-09-16 | 1995-07-18 | The Penn State Research Foundation | PZT ceramic compositions having reduced sintering temperatures and process for producing same |
US5650362A (en) * | 1993-11-04 | 1997-07-22 | Fuji Xerox Co. | Oriented conductive film and process for preparing the same |
US5619476A (en) | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
US5894452A (en) | 1994-10-21 | 1999-04-13 | The Board Of Trustees Of The Leland Stanford Junior University | Microfabricated ultrasonic immersion transducer |
JP3374557B2 (ja) * | 1994-11-29 | 2003-02-04 | 住友電気工業株式会社 | ダイヤモンド基材および表面弾性波素子 |
US5828394A (en) | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
JP3344888B2 (ja) * | 1995-12-28 | 2002-11-18 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
NO970220L (no) * | 1996-01-19 | 1997-07-21 | Murata Manufacturing Co | Transduktor med tynnfilmsjikt av metall, for akustiske overflatebölger |
DE19712496A1 (de) * | 1996-03-26 | 1997-10-30 | Mitsubishi Materials Corp | Piezoelektrische Dünnfilm-Bauelemente |
JP2001196896A (ja) * | 2000-01-11 | 2001-07-19 | Seiko Epson Corp | 表面弾性波素子 |
JP2001267877A (ja) * | 2000-03-21 | 2001-09-28 | Sanyo Electric Co Ltd | 弾性表面波デバイス |
JP3509709B2 (ja) * | 2000-07-19 | 2004-03-22 | 株式会社村田製作所 | 圧電薄膜共振子及び圧電薄膜共振子の製造方法 |
-
2002
- 2002-05-01 US US10/137,492 patent/US6548937B1/en not_active Expired - Fee Related
-
2003
- 2003-04-29 WO PCT/IB2003/001645 patent/WO2003092915A2/en active IP Right Grant
- 2003-04-29 AU AU2003222387A patent/AU2003222387A1/en not_active Abandoned
- 2003-04-29 EP EP03717473A patent/EP1503872B1/de not_active Expired - Lifetime
- 2003-04-29 AT AT03717473T patent/ATE368526T1/de not_active IP Right Cessation
- 2003-04-29 KR KR10-2004-7017374A patent/KR20050006204A/ko not_active Application Discontinuation
- 2003-04-29 DE DE60315286T patent/DE60315286T2/de not_active Expired - Lifetime
- 2003-04-29 CN CNB038096897A patent/CN100438991C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1503872B1 (de) | 2007-08-01 |
CN100438991C (zh) | 2008-12-03 |
EP1503872A2 (de) | 2005-02-09 |
WO2003092915A3 (en) | 2004-03-04 |
KR20050006204A (ko) | 2005-01-15 |
AU2003222387A8 (en) | 2003-11-17 |
CN1649677A (zh) | 2005-08-03 |
WO2003092915A2 (en) | 2003-11-13 |
DE60315286D1 (de) | 2007-09-13 |
US6548937B1 (en) | 2003-04-15 |
DE60315286T2 (de) | 2008-02-14 |
ATE368526T1 (de) | 2007-08-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |