AU2003222387A1 - Array of membrane ultrasound transducers - Google Patents

Array of membrane ultrasound transducers

Info

Publication number
AU2003222387A1
AU2003222387A1 AU2003222387A AU2003222387A AU2003222387A1 AU 2003222387 A1 AU2003222387 A1 AU 2003222387A1 AU 2003222387 A AU2003222387 A AU 2003222387A AU 2003222387 A AU2003222387 A AU 2003222387A AU 2003222387 A1 AU2003222387 A1 AU 2003222387A1
Authority
AU
Australia
Prior art keywords
piezoelectric layer
barrier structure
array
ultrasound transducers
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003222387A
Other languages
English (en)
Other versions
AU2003222387A8 (en
Inventor
Peter Bachmann
Hans-Wolfgang Brand
Mareike Klee
Egon Krafczyk
Hans-Peter Lobl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of AU2003222387A8 publication Critical patent/AU2003222387A8/xx
Publication of AU2003222387A1 publication Critical patent/AU2003222387A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
AU2003222387A 2002-05-01 2003-04-29 Array of membrane ultrasound transducers Abandoned AU2003222387A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/137,492 2002-05-01
US10/137,492 US6548937B1 (en) 2002-05-01 2002-05-01 Array of membrane ultrasound transducers
PCT/IB2003/001645 WO2003092915A2 (en) 2002-05-01 2003-04-29 Array of membrane ultrasound transducers

Publications (2)

Publication Number Publication Date
AU2003222387A8 AU2003222387A8 (en) 2003-11-17
AU2003222387A1 true AU2003222387A1 (en) 2003-11-17

Family

ID=22477670

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003222387A Abandoned AU2003222387A1 (en) 2002-05-01 2003-04-29 Array of membrane ultrasound transducers

Country Status (8)

Country Link
US (1) US6548937B1 (de)
EP (1) EP1503872B1 (de)
KR (1) KR20050006204A (de)
CN (1) CN100438991C (de)
AT (1) ATE368526T1 (de)
AU (1) AU2003222387A1 (de)
DE (1) DE60315286T2 (de)
WO (1) WO2003092915A2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6784600B2 (en) * 2002-05-01 2004-08-31 Koninklijke Philips Electronics N.V. Ultrasonic membrane transducer for an ultrasonic diagnostic probe
US7148079B1 (en) * 2002-11-01 2006-12-12 Advanced Micro Devices, Inc. Diamond like carbon silicon on insulator substrates and methods of fabrication thereof
JP2005094735A (ja) * 2003-08-12 2005-04-07 Murata Mfg Co Ltd 電子部品およびその製造方法
US20050075571A1 (en) * 2003-09-18 2005-04-07 Siemens Medical Solutions Usa, Inc. Sound absorption backings for ultrasound transducers
JP4952164B2 (ja) * 2006-09-20 2012-06-13 株式会社デンソー 流量計測素子、質量流量計
EP2174359A2 (de) * 2007-07-03 2010-04-14 Koninklijke Philips Electronics N.V. Dünnschichtdetektor zur präsenzerkennung
CN101352710B (zh) * 2007-07-25 2011-03-16 中国科学院声学研究所 薄膜压电超声换能器
JP5444662B2 (ja) * 2008-08-25 2014-03-19 ソニー株式会社 圧電デバイスの製造方法
EP2490333B1 (de) * 2009-10-13 2019-09-04 Murata Manufacturing Co., Ltd. Akustisches oberflächenwellenelement
WO2012014111A2 (en) 2010-07-30 2012-02-02 Koninklijke Philips Electronics N.V. Thin film ultrasound transducer
DE102012205996A1 (de) 2012-04-12 2013-10-17 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Umfelderfassung eines Fahrzeugs
JP6089499B2 (ja) * 2012-08-28 2017-03-08 セイコーエプソン株式会社 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置
US9364863B2 (en) * 2013-01-23 2016-06-14 Siemens Medical Solutions Usa, Inc. Method for forming an ultrasound transducer array
DE102013205157A1 (de) 2013-03-22 2014-10-09 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Umfelderfassung eines Fahrzeugs
JP5836537B2 (ja) * 2013-03-28 2015-12-24 富士フイルム株式会社 ユニモルフ型超音波探触子
JP6728630B2 (ja) * 2015-10-29 2020-07-22 セイコーエプソン株式会社 圧電素子、圧電モジュール、電子機器、及び圧電素子の製造方法
JP6805630B2 (ja) * 2016-08-24 2020-12-23 セイコーエプソン株式会社 超音波デバイス、超音波モジュール、及び超音波測定装置
CN116944006B (zh) * 2023-09-19 2023-12-15 中北大学 一种d11工作模式驱动的PMUT单元及其制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5075641A (en) * 1990-12-04 1991-12-24 Iowa State University Research Foundation, Inc. High frequency oscillator comprising cointegrated thin film resonator and active device
JP2990926B2 (ja) * 1992-03-16 1999-12-13 住友電気工業株式会社 超音波振動子
US5433917A (en) 1993-09-16 1995-07-18 The Penn State Research Foundation PZT ceramic compositions having reduced sintering temperatures and process for producing same
US5650362A (en) * 1993-11-04 1997-07-22 Fuji Xerox Co. Oriented conductive film and process for preparing the same
US5619476A (en) 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5894452A (en) 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
JP3374557B2 (ja) * 1994-11-29 2003-02-04 住友電気工業株式会社 ダイヤモンド基材および表面弾性波素子
US5828394A (en) 1995-09-20 1998-10-27 The Board Of Trustees Of The Leland Stanford Junior University Fluid drop ejector and method
JP3344888B2 (ja) * 1995-12-28 2002-11-18 日本碍子株式会社 圧電/電歪膜型素子及びその製造方法
NO970220L (no) * 1996-01-19 1997-07-21 Murata Manufacturing Co Transduktor med tynnfilmsjikt av metall, for akustiske overflatebölger
DE19712496A1 (de) * 1996-03-26 1997-10-30 Mitsubishi Materials Corp Piezoelektrische Dünnfilm-Bauelemente
JP2001196896A (ja) * 2000-01-11 2001-07-19 Seiko Epson Corp 表面弾性波素子
JP2001267877A (ja) * 2000-03-21 2001-09-28 Sanyo Electric Co Ltd 弾性表面波デバイス
JP3509709B2 (ja) * 2000-07-19 2004-03-22 株式会社村田製作所 圧電薄膜共振子及び圧電薄膜共振子の製造方法

Also Published As

Publication number Publication date
EP1503872B1 (de) 2007-08-01
CN100438991C (zh) 2008-12-03
EP1503872A2 (de) 2005-02-09
WO2003092915A3 (en) 2004-03-04
KR20050006204A (ko) 2005-01-15
AU2003222387A8 (en) 2003-11-17
CN1649677A (zh) 2005-08-03
WO2003092915A2 (en) 2003-11-13
DE60315286D1 (de) 2007-09-13
US6548937B1 (en) 2003-04-15
DE60315286T2 (de) 2008-02-14
ATE368526T1 (de) 2007-08-15

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase