AU2002227349A1 - Material for electrodes of low temperature plasma generators - Google Patents

Material for electrodes of low temperature plasma generators

Info

Publication number
AU2002227349A1
AU2002227349A1 AU2002227349A AU2734902A AU2002227349A1 AU 2002227349 A1 AU2002227349 A1 AU 2002227349A1 AU 2002227349 A AU2002227349 A AU 2002227349A AU 2734902 A AU2734902 A AU 2734902A AU 2002227349 A1 AU2002227349 A1 AU 2002227349A1
Authority
AU
Australia
Prior art keywords
electrodes
low temperature
temperature plasma
plasma generators
generators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002227349A
Other languages
English (en)
Inventor
Malcolm Caplan
Valeri Vasil'evich Ribin
Philip Grigor'evich Rutberg
Alexei Anatol'evich Safronov
Valentin Ivanovich Shekalov
Vasili Nikolaevich Shiryaev
Sergei Evge'evich Vinogradov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Publication of AU2002227349A1 publication Critical patent/AU2002227349A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
    • C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
    • C22C32/0021—Matrix based on noble metals, Cu or alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/3255—Material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Plasma Technology (AREA)
AU2002227349A 2000-11-30 2001-11-28 Material for electrodes of low temperature plasma generators Abandoned AU2002227349A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
RU00129858/09(03 2000-11-30
RU2000129858/09A RU2176833C1 (ru) 2000-11-30 2000-11-30 Материал электродов генераторов низкотемпературной плазмы
PCT/US2001/047685 WO2002045116A1 (fr) 2000-11-30 2001-11-28 Matiere pour electrodes de generateurs de plasma a basse temperature

Publications (1)

Publication Number Publication Date
AU2002227349A1 true AU2002227349A1 (en) 2002-06-11

Family

ID=20242739

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002227349A Abandoned AU2002227349A1 (en) 2000-11-30 2001-11-28 Material for electrodes of low temperature plasma generators

Country Status (4)

Country Link
US (1) US7462089B2 (fr)
AU (1) AU2002227349A1 (fr)
RU (1) RU2176833C1 (fr)
WO (1) WO2002045116A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2505882C1 (ru) * 2012-11-08 2014-01-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный университет" (СПбГУ) Состав материала для изготовления электродов генераторов низкотемпературной плазмы

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4168565A (en) * 1977-05-18 1979-09-25 Denki Kagaku Kogyo Kabushiki Kaisha Method for manufacturing thermionic cathode
GB1446507A (en) * 1978-09-15 1976-08-18 V N I Pk I T I Elektrosvarochn Electrode for plasma arc working of conductive materials
EP0035602B1 (fr) * 1980-03-03 1984-07-04 BBC Aktiengesellschaft Brown, Boveri & Cie. Procédé de préparation par métallurgie des poudres d'un alliage-mémoire à base de cuivre, de zinc et d'aluminium
US5114469A (en) * 1987-12-10 1992-05-19 General Dynamics Corporation Air Defense Systems Division Low-temperature consolidation metal-based compositions and method
KR920001334B1 (ko) * 1989-11-09 1992-02-10 삼성전관 주식회사 디스펜서 음극
KR920004900B1 (ko) * 1990-03-13 1992-06-22 삼성전관 주식회사 함침형 음극구조체와 그 제조방법
DE4114856A1 (de) * 1991-05-07 1992-11-12 Licentia Gmbh Vorratskathode und verfahren zu deren herstellung
DE4212315A1 (de) * 1992-04-13 1993-10-14 Boehringer Mannheim Gmbh Blutlanzettenvorrichtung zur Entnahme von Blut für Diagnosezwecke
US5464962A (en) * 1992-05-20 1995-11-07 Hypertherm, Inc. Electrode for a plasma arc torch
US5609777A (en) * 1993-02-23 1997-03-11 Adamas At Ag Electric-arc plasma steam torch
GB2279495A (en) * 1993-06-22 1995-01-04 Thorn Microwave Devices Limite Thermionic cathode
DE4408941A1 (de) * 1994-03-16 1995-09-21 Licentia Gmbh Vorratskathode
US5756959A (en) * 1996-10-28 1998-05-26 Hypertherm, Inc. Coolant tube for use in a liquid-cooled electrode disposed in a plasma arc torch
US5865980A (en) * 1997-06-26 1999-02-02 Aluminum Company Of America Electrolysis with a inert electrode containing a ferrite, copper and silver
US5911919A (en) * 1997-09-08 1999-06-15 Integrated Thermal Sciences, Inc. Electron emission materials and components
US6020572A (en) * 1998-08-12 2000-02-01 The Esab Group, Inc. Electrode for plasma arc torch and method of making same
US6584132B2 (en) * 2000-11-01 2003-06-24 Cymer, Inc. Spinodal copper alloy electrodes
JP4501103B2 (ja) 2003-10-17 2010-07-14 株式会社安川電機 半導体ウェハ搬送ロボットのキャリブレーション方法およびそれを備えた半導体ウェハ搬送ロボット、ウェハ搬送装置

Also Published As

Publication number Publication date
US7462089B2 (en) 2008-12-09
US20070249256A1 (en) 2007-10-25
WO2002045116A1 (fr) 2002-06-06
RU2176833C1 (ru) 2001-12-10

Similar Documents

Publication Publication Date Title
AU2001293260A1 (en) Electrode for glow-discharge atmospheric plasma treatment
AU2001296323A1 (en) Chamber configuration for confining a plasma
AU6914200A (en) Laser chamber with fully integrated electrode feedthrough main insulator
AU2002212963A1 (en) Method of and structure for controlling electrode temperature
AU2002245088A1 (en) Low contamination plasma chamber components and methods for making the same
AU2002241536A1 (en) True-time delay generator
AU4870699A (en) Plasma electrode with arc-starting grooves
AU2002211652A1 (en) Method of making an electrode
AU2001238188A1 (en) Multi-zone rf electrode for capacitive plasma sources
AU2003240520A1 (en) Electrode design for stable micro-scale plasma discharges
AU2001259482A1 (en) Extreme-uv electrical discharge source
AU2001235659A1 (en) Pipes containing heat insulating material
AU2002235787A1 (en) Separation of x- and y-sperm cells
AU2002223088A1 (en) Chemical plasma cathode
AU2001281022A1 (en) Layered arrangements of lithium electrodes
AU2000255610A1 (en) Use of temperature sensitive liposomes
AU2001292489A1 (en) Voltage controlled oscillator
AU2001274612A1 (en) Microstrip gas chamber
AU2002227349A1 (en) Material for electrodes of low temperature plasma generators
GB0016750D0 (en) Improved material for electrode manufacture
AU2002349016A1 (en) Field generating membrane electrode
AU2001222686A1 (en) Electrical generator
AU2002221137A1 (en) Directly heated electrode for gas discharge tube
AU3206601A (en) Thermal insulation material
AU2001267635A1 (en) Faceplate provided with electrodes made of conductive material