AU2001286659A1 - Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control - Google Patents

Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control

Info

Publication number
AU2001286659A1
AU2001286659A1 AU2001286659A AU8665901A AU2001286659A1 AU 2001286659 A1 AU2001286659 A1 AU 2001286659A1 AU 2001286659 A AU2001286659 A AU 2001286659A AU 8665901 A AU8665901 A AU 8665901A AU 2001286659 A1 AU2001286659 A1 AU 2001286659A1
Authority
AU
Australia
Prior art keywords
optimization
monitoring
methods
control
process operation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
AU2001286659A
Other languages
English (en)
Inventor
Mason L. Freed
Randall S. Mundt
Costas J. Spanos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Onwafer Technologies Inc
Original Assignee
Onwafer Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onwafer Technologies Inc filed Critical Onwafer Technologies Inc
Publication of AU2001286659A1 publication Critical patent/AU2001286659A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32019—Dynamic reconfiguration to maintain optimal design, fabrication, assembly
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Drying Of Semiconductors (AREA)
  • Testing And Monitoring For Control Systems (AREA)
AU2001286659A 2000-08-22 2001-08-22 Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control Withdrawn AU2001286659A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/643,614 US6691068B1 (en) 2000-08-22 2000-08-22 Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
US09643614 2000-08-22
PCT/US2001/026315 WO2002017030A2 (en) 2000-08-22 2001-08-22 Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control

Publications (1)

Publication Number Publication Date
AU2001286659A1 true AU2001286659A1 (en) 2002-03-04

Family

ID=24581572

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001286659A Withdrawn AU2001286659A1 (en) 2000-08-22 2001-08-22 Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control

Country Status (7)

Country Link
US (1) US6691068B1 (ja)
EP (1) EP1311917A2 (ja)
JP (1) JP5184733B2 (ja)
KR (2) KR100854354B1 (ja)
CN (1) CN100371839C (ja)
AU (1) AU2001286659A1 (ja)
WO (1) WO2002017030A2 (ja)

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US6691068B1 (en) 2004-02-10
EP1311917A2 (en) 2003-05-21
KR100854354B1 (ko) 2008-08-26
JP2004507889A (ja) 2004-03-11
CN100371839C (zh) 2008-02-27
WO2002017030A2 (en) 2002-02-28
WO2002017030B1 (en) 2003-03-27
KR100885472B1 (ko) 2009-02-24
KR20080035031A (ko) 2008-04-22
KR20030048015A (ko) 2003-06-18
JP5184733B2 (ja) 2013-04-17
CN1479887A (zh) 2004-03-03

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