AU2001279919A1 - Optical interconnection system in a microelectronic circuit produced on a soi substrate - Google Patents
Optical interconnection system in a microelectronic circuit produced on a soi substrateInfo
- Publication number
- AU2001279919A1 AU2001279919A1 AU2001279919A AU7991901A AU2001279919A1 AU 2001279919 A1 AU2001279919 A1 AU 2001279919A1 AU 2001279919 A AU2001279919 A AU 2001279919A AU 7991901 A AU7991901 A AU 7991901A AU 2001279919 A1 AU2001279919 A1 AU 2001279919A1
- Authority
- AU
- Australia
- Prior art keywords
- soi substrate
- interconnection system
- optical interconnection
- microelectronic circuit
- circuit produced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12173—Masking
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Light Receiving Elements (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0009851 | 2000-07-27 | ||
FR0009851A FR2812405B1 (fr) | 2000-07-27 | 2000-07-27 | Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi |
PCT/FR2001/002456 WO2002010816A2 (fr) | 2000-07-27 | 2001-07-26 | Systeme d'interconnexion optique dans un circuit microelectronique realise sur un substrat soi |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001279919A1 true AU2001279919A1 (en) | 2002-02-13 |
Family
ID=8852974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001279919A Abandoned AU2001279919A1 (en) | 2000-07-27 | 2001-07-26 | Optical interconnection system in a microelectronic circuit produced on a soi substrate |
Country Status (8)
Country | Link |
---|---|
US (1) | US20030156778A1 (fr) |
EP (1) | EP1303773A2 (fr) |
JP (1) | JP2004505310A (fr) |
KR (1) | KR20030018060A (fr) |
AU (1) | AU2001279919A1 (fr) |
CA (1) | CA2417143A1 (fr) |
FR (1) | FR2812405B1 (fr) |
WO (1) | WO2002010816A2 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004095084A2 (fr) | 2003-04-23 | 2004-11-04 | Siophcal, Inc. | Dispositifs a ondes lumineuses plans et submicroniques formes sur une plate-forme optique soi (silicium sur isolant) |
JP5130621B2 (ja) | 2005-11-24 | 2013-01-30 | ソニー株式会社 | 半導体基板の製造方法 |
JP4438835B2 (ja) * | 2007-07-20 | 2010-03-24 | ソニー株式会社 | 高周波信号生成方法および高周波信号生成装置 |
KR20100061607A (ko) * | 2008-11-29 | 2010-06-08 | 한국전자통신연구원 | 고속 광배선 소자 |
FR2979169B1 (fr) * | 2011-08-19 | 2014-04-25 | Soitec Silicon On Insulator | Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs |
US8842945B2 (en) | 2011-08-09 | 2014-09-23 | Soitec | Methods of forming three dimensionally integrated semiconductor systems including photoactive devices and semiconductor-on-insulator substrates |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5057022A (en) * | 1989-03-20 | 1991-10-15 | Miller Robert O | Method of making a silicon integrated circuit waveguide |
US5394490A (en) * | 1992-08-11 | 1995-02-28 | Hitachi, Ltd. | Semiconductor device having an optical waveguide interposed in the space between electrode members |
US5367585A (en) * | 1993-10-27 | 1994-11-22 | General Electric Company | Integrated microelectromechanical polymeric photonic switch |
DE19503641A1 (de) * | 1995-02-06 | 1996-08-08 | Forschungszentrum Juelich Gmbh | Schichtstruktur mit einer Silicid-Schicht, sowie Verfahren zur Herstellung einer solchen Schichtstruktur |
US5559912A (en) * | 1995-09-15 | 1996-09-24 | International Business Machines Corporation | Wavelength-selective devices using silicon-on-insulator |
US5986331A (en) * | 1996-05-30 | 1999-11-16 | Philips Electronics North America Corp. | Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate |
US5838870A (en) * | 1997-02-28 | 1998-11-17 | The United States Of America As Represented By The Secretary Of The Air Force | Nanometer-scale silicon-on-insulator photonic componets |
JP3853905B2 (ja) * | 1997-03-18 | 2006-12-06 | 株式会社東芝 | 量子効果装置とblトンネル素子を用いた装置 |
US5987196A (en) * | 1997-11-06 | 1999-11-16 | Micron Technology, Inc. | Semiconductor structure having an optical signal path in a substrate and method for forming the same |
GB2339919B (en) * | 1998-07-17 | 2002-12-11 | Bookham Technology Ltd | Thermo-optic semiconductor device |
GB2343293B (en) * | 1998-10-23 | 2003-05-14 | Bookham Technology Ltd | Manufacture of a silicon waveguide structure |
-
2000
- 2000-07-27 FR FR0009851A patent/FR2812405B1/fr not_active Expired - Fee Related
-
2001
- 2001-07-26 KR KR10-2003-7000960A patent/KR20030018060A/ko not_active Application Discontinuation
- 2001-07-26 AU AU2001279919A patent/AU2001279919A1/en not_active Abandoned
- 2001-07-26 JP JP2002515489A patent/JP2004505310A/ja not_active Withdrawn
- 2001-07-26 EP EP01958187A patent/EP1303773A2/fr not_active Withdrawn
- 2001-07-26 CA CA002417143A patent/CA2417143A1/fr not_active Abandoned
- 2001-07-26 US US10/333,223 patent/US20030156778A1/en not_active Abandoned
- 2001-07-26 WO PCT/FR2001/002456 patent/WO2002010816A2/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
KR20030018060A (ko) | 2003-03-04 |
EP1303773A2 (fr) | 2003-04-23 |
WO2002010816A2 (fr) | 2002-02-07 |
WO2002010816A3 (fr) | 2002-05-23 |
JP2004505310A (ja) | 2004-02-19 |
US20030156778A1 (en) | 2003-08-21 |
FR2812405B1 (fr) | 2003-06-20 |
CA2417143A1 (fr) | 2002-02-07 |
FR2812405A1 (fr) | 2002-02-01 |
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