FR2979169B1 - Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs - Google Patents

Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs

Info

Publication number
FR2979169B1
FR2979169B1 FR1157423A FR1157423A FR2979169B1 FR 2979169 B1 FR2979169 B1 FR 2979169B1 FR 1157423 A FR1157423 A FR 1157423A FR 1157423 A FR1157423 A FR 1157423A FR 2979169 B1 FR2979169 B1 FR 2979169B1
Authority
FR
France
Prior art keywords
photo
dimensions
active devices
integrated semiconductor
semiconductor systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1157423A
Other languages
English (en)
Other versions
FR2979169A1 (fr
Inventor
Bich-Yen Nguyen
Mariam Sadaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR1157423A priority Critical patent/FR2979169B1/fr
Priority to CN201210282670.8A priority patent/CN102956630B/zh
Publication of FR2979169A1 publication Critical patent/FR2979169A1/fr
Application granted granted Critical
Publication of FR2979169B1 publication Critical patent/FR2979169B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Light Receiving Elements (AREA)
FR1157423A 2011-08-09 2011-08-19 Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs Expired - Fee Related FR2979169B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1157423A FR2979169B1 (fr) 2011-08-19 2011-08-19 Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs
CN201210282670.8A CN102956630B (zh) 2011-08-09 2012-08-09 三维集成半导体系统和形成该三维集成半导体系统的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1157423A FR2979169B1 (fr) 2011-08-19 2011-08-19 Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs

Publications (2)

Publication Number Publication Date
FR2979169A1 FR2979169A1 (fr) 2013-02-22
FR2979169B1 true FR2979169B1 (fr) 2014-04-25

Family

ID=44681351

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1157423A Expired - Fee Related FR2979169B1 (fr) 2011-08-09 2011-08-19 Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs

Country Status (1)

Country Link
FR (1) FR2979169B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2812405B1 (fr) * 2000-07-27 2003-06-20 Centre Nat Rech Scient Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi
US20060177173A1 (en) * 2005-02-04 2006-08-10 Sioptical, Inc. Vertical stacking of multiple integrated circuits including SOI-based optical components
US7936448B2 (en) * 2006-01-27 2011-05-03 Lightwire Inc. LIDAR system utilizing SOI-based opto-electronic components
US7257283B1 (en) * 2006-06-30 2007-08-14 Intel Corporation Transmitter-receiver with integrated modulator array and hybrid bonded multi-wavelength laser array

Also Published As

Publication number Publication date
FR2979169A1 (fr) 2013-02-22

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Legal Events

Date Code Title Description
CD Change of name or company name

Owner name: SOITEC, FR

Effective date: 20130311

PLFP Fee payment

Year of fee payment: 5

ST Notification of lapse

Effective date: 20170428